Patent US4660061A successfully refreshed from Google Patents.
US4660061A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Intermediate normal metal layers in superconducting circuitry
Assignee: Unisys Corp
•
Filing: 1985-12-16
•
Granted: 1987-04-21
•
Expires: 2005-12-16
Abstract
Abstract A thin, nominally 150 angstroms, normal metal layer, nominally the noble normal metal palladium, sandwiched intermediate between two superconducting layers, nominally niobium, supports totally superconducting current flow therethrough such normal metal layer by the quantum mechanical tunneling effect. Such a thin normal metal layer is useful as a stop etch layer for fabrication process control, including especially the selective niobium anodization process, as an oxidation resistant or immune layer to which totally superconducting electrical contact may be reliably made such as by soldering, and as a patterned resistor in those regions of the substrate plane where such thin normal metal layer is not sandwiched by superconducting layers. Particularly concerning such stop etch function, a thin normal layer of palladium will serve as a stop etch layer to the etching of niobium while not precluding totally superconducting contact therethrough such thin palladium layer. Particularly concerning the electrical contact function, a superconducting wire, nominally niobium, may be soldered with lead-tin or indium-tin to a thin normal metal layer of palladium in the formation of a totally superconducting connection therethrough such thin palladium layer. Particularly concerning such patterned resistor, terminus superconducting sandwiches of niobium-thin palladium-niobium may be electrically resistively interconnected by such thin palladium layer precisely patterned in the region(s) wherein it is not sandwiched, only such unsandwiched region(s) of such thin palladium layer contributing controllably determinable resistance to the interconnection(s).
Inventors
- 👤 Mark F. Sweeny
- 👤 Meir Gershenson
- 👤 David L. Fleming
- 👤 Robert E. Barta
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 05:37
CPC Classifications
H; H10; H10N; H10N60/00; H10N60/80; H10N60/81; Y; Y10; Y10S; Y10S505/00; Y10S505/825; Y10S505/873; Y10S505/874
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
142 words
In a superconducting device comprising a first superconducting layer, a junction layer on said first superconducting layer, an insulating layer on said first superconducting layer, at least one superconducting area on said junction layer surrounded by said insulator layer, superconducting connector pad means disposed over said superconducting area, and superconducting wire means electrically connected to said superconducting connector pad means, the improvement comprising a first metal layer disposed over said insulator layer and intermediate said superconducting area and said connector pad means and a second metal layer disposed between said connector pad means and said superconductor wire means wherein said first metal layer covers said superconducting area and said first and second metal layers are sufficiently thin to allow quantum mechanical tunneling between said connector pad means and said superconducting area and said connector pad means and said superconducting wire means, respectively.
Claim 2
Dependent Claim
142 words
In a superconducting device comprising a first superconducting layer, a junction layer on said first superconducting layer, an insulating layer on said first superconducting layer, at least one superconducting area on said junction layer surrounded by said insulator layer, superconducting connector pad means disposed over said superconducting area, and superconducting wire means electrically connected to said superconducting connector pad means, the improvement comprising a first metal layer disposed over said insulator layer and intermediate said superconducting area and said connector pad means and a second metal layer disposed between said connector pad means and said superconductor wire means wherein said first metal layer covers said superconducting area and said first and second metal layers are sufficiently thin to allow quantum mechanical tunneling between said connector pad means and said superconducting area and said connector pad means and said superconducting wire means, respectively.
Claim 3
Dependent Claim
24 words
In a superconducting device as claimed in claim 1 the further improvement wherein said metal layers are each 150 angstroms, or less, in thickness.
Claim 4
Dependent Claim
19 words
In a superconducting device as claimed in claim 1 the improvement wherein said metal layers are noble metal layers.
Claim 5
Dependent Claim
24 words
In a superconducting device as claimed in claim 3 the further improvement wherein said metal layers are each 150 angstroms, or less, in thickness.
Claim 6
Dependent Claim
18 words
In a superconducting device as claimed in claim 4 the further improvement wherein said noble metal is palladium.
Claim 7
Dependent Claim
31 words
In a superconducting device as claimed in claim 1 the further improvement wherein said first metal layer is configured to form as stripline connection between a plurality of connector pad means.
Claim 8
Dependent Claim
24 words
In a superconducting device as claimed in claim 5 the further improvement wherein said first metal layer is 150 angstroms, or less, in thickness.
Claim 9
Dependent Claim
21 words
In a superconducting device as claimed in claim 5 the improvement wherein said first metal layer is a noble metal layer.
Claim 10
Dependent Claim
18 words
In a superconducting device as claimed in claim 8 the further improvement wherein said noble metal is palladium.
Claim 11
Dependent Claim
60 words
In a superconducting device comprising at least one superconducting connector pad means, superconducting wire means electrically connected to said connector pad means and a metal layer intermediate said connector pad means and said superconducting wire means, the improvement wherein said metal layer is sufficiently thin to allow quantum mechanical tunneling between said connector pad means and said superconducting wire means.
Claim 12
Dependent Claim
60 words
In a superconducting device comprising at least one superconducting connector pad means, superconducting wire means electrically connected to said connector pad means and a metal layer intermediate said connector pad means and said superconducting wire means, the improvement wherein said metal layer is sufficiently thin to allow quantum mechanical tunneling between said connector pad means and said superconducting wire means.
Claim 13
Dependent Claim
23 words
In a superconducting device as claimed in claim 10 the further improvement wherein said metal layer is 150 angstroms, or less, in thickness.
Claim 14
Dependent Claim
20 words
In a superconducting device as claimed in claim 10 the improvement wherein said metal layer is a noble metal layer.
Claim 15
Dependent Claim
23 words
In a superconducting device as claimed in claim 12 the further improvement wherein said metal layer is 150 angstroms, or less, in thickness.
Claim 16
Dependent Claim
18 words
In a superconducting device as claimed in claim 13 the further improvement wherein said noble metal is palladium.
Claim 17
Dependent Claim
58 words
In a superconducting device comprising at least one superconducting connector pad means and a superconducting area means the improvement comprising a metal layer intermediate said connector pad means and said superconducting area wherein said metal layer covers said superconducting area and is sufficiently thin to allow quantum mechanical tunneling between said connector pad means and said superconducting area.
Claim 18
Dependent Claim
58 words
In a superconducting device comprising at least one superconducting connector pad means and a superconducting area means the improvement comprising a metal layer intermediate said connector pad means and said superconducting area wherein said metal layer covers said superconducting area and is sufficiently thin to allow quantum mechanical tunneling between said connector pad means and said superconducting area.
Claim 19
Dependent Claim
23 words
In a superconducting device as claimed in claim 15 the further improvement wherein said metal layer is 150 angstroms, or less, in thickness.
Claim 20
Dependent Claim
20 words
In a superconducting device as claimed in claim 15 the improvement wherein said metal layer is a noble metal layer.
Claim 21
Dependent Claim
23 words
In a superconducting device as claimed in claim 17 the further improvement wherein said metal layer is 150 angstroms, or less, in thickness.
Claim 22
Dependent Claim
18 words
In a superconducting device as claimed in claim 18 the further improvement wherein said noble metal is palladium.
Claim 23
Dependent Claim
89 words
In a superconducting device comprising at least one superconducting pad means, at least one superconducting area and superconducting wire means the improvement comprising a first metal layer intermediate said connector pad means and said superconducting area and a second metal layer intermediate said connector pad means and said superconducting wire means wherein said first and second metal layers are sufficiently thin to allow quantum mechanical tunneling between said connector pad means and said superconducting area in a first direction and between said superconducting wire means in a second direction.
Claim 24
Dependent Claim
89 words
In a superconducting device comprising at least one superconducting pad means, at least one superconducting area and superconducting wire means the improvement comprising a first metal layer intermediate said connector pad means and said superconducting area and a second metal layer intermediate said connector pad means and said superconducting wire means wherein said first and second metal layers are sufficiently thin to allow quantum mechanical tunneling between said connector pad means and said superconducting area in a first direction and between said superconducting wire means in a second direction.
Claim 25
Dependent Claim
24 words
In a superconducting device as claimed in claim 20 the further improvement wherein said metal layers are each 150 angstroms, or less, in thickness.
Claim 26
Dependent Claim
19 words
In a superconducting device as claimed in claim 20 the improvement wherein said metal layers are noble metal layers.
Claim 27
Dependent Claim
24 words
In a superconducting device as claimed in claim 22 the further improvement wherein said metal layers are each 150 angstroms, or less, in thickness.
Claim 28
Dependent Claim
18 words
In a superconducting device as claimed in claim 23 the further improvement wherein said noble metal is palladium.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-04-20 | 1990-10-20 | 1991-04-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-04-20 | 1994-10-20 | 1995-04-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-04-20 | 1998-10-20 | 1999-04-21 | $7700.00 | Window Closed / Lapsed |