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US4656101A Expired / Lapsed US ⏱️ 0.0 years remaining

Electronic device with a protective film

Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1985-11-07
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Granted: 1987-04-07
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Expires: 2005-11-07
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Abstract

Abstract A electronic device having a structure in which at least one electronic element, including an insulating film or covered with a protecting film, is formed on a substrate, where the insulating or protecting film consist principally of aluminum nitride. Alternatively, the insulating or protecting film can be a laminated member composed of a film consisting principally of aluminum nitride and a film consisting principally of silicon oxide or silicon nitride.

Inventors

  • 👤 Shunpei Yamazaki

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-27 22:03
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/692; H10P14/6938; H10P14/6939; H10P14/69391; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/6336; H10P14/66; H10P14/662; H10P14/668; H10P14/6921; H10P14/69215; H10P14/694; H10P14/6943; H10P14/69433; H10W; H10W20/00; H10W20/40; H10W20/45; H10W20/48; Y; Y10; Y10T; Y10T428/00; Y10T428/12; Y10T428/12493; Y10T428/12528; Y10T428/12535; Y10T428/12576; Y10T428/12611

Claims Analysis

Total Claims: 4
Claim 1
Independent Claim 39 words
An electronic device which has a structure in which at least one electronic element including an insulating film or covered with a protecting film is formed on a substrate, the insulating or protecting film consisting principally of aluminum nitride.
Claim 2
Dependent Claim 39 words
An electronic device which has a structure in which at least one electronic element including an insulating film or covered with a protecting film is formed on a substrate, the insulating or protecting film consisting principally of aluminum nitride.
Claim 3
Dependent Claim 58 words
An electronic device which has a structure in which at least one electronic element including an insulating film or covered with a protecting film is formed on a substrate, the insulating or protecting film being a laminated member composed of a film consisting principally of aluminum nitride and a film consisting principally of silicon oxide or silicon nitride.
Claim 4
Dependent Claim 58 words
An electronic device which has a structure in which at least one electronic element including an insulating film or covered with a protecting film is formed on a substrate, the insulating or protecting film being a laminated member composed of a film consisting principally of aluminum nitride and a film consisting principally of silicon oxide or silicon nitride.

References Cited (Backward Citations)

US4525223A Cited
US4523966A Cited
US4576851A Cited
US4527184A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1990-04-06 1990-10-06 1991-04-07 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1994-04-06 1994-10-06 1995-04-07 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1998-04-06 1998-10-06 1999-04-07 $7700.00 Window Closed / Lapsed

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