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Method for the production of substrates with a uniform dispersion of extremely fine granules

Assignee: Sharp Corp
•
Filing: 1986-01-27
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Granted: 1987-03-31
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Expires: 2006-01-27
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Abstract

Abstract A method for the production of substrates with a uniform dispersion of extremely fine granules comprising: forming extremely fine granules in a granule-formation chamber under a reduced pressure by a gas-evaporation technique, introducing said extremely fine granules into a granule-recovering chamber under high vacuum, which is adjacent to said granule-formation chamber, through a slit formed in the partition between said granule-formation chamber and said granule-recovering chamber, and allowing said extremely fine granules to be dispersed on and attached to a supporter disposed in said granule-recovering chamber.

Inventors

  • 👤 Tatsuo Morita
  • 👤 Yoshiharu Nakajima
  • 👤 Shigeo Nakajima

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-04 12:19
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22

Claims Analysis

Total Claims: 5
Claim 1
Independent Claim 86 words
A method for the production of substrates with a uniform dispersion of extremely fine granules comprising: forming extremely fine granules in a granule-formation chamber under a reduced pressure by a gas-evaporation technique, introducing said extremely fine granules into a granule-recovering chamber under high vacuum, which is adjacent to said granule-formation chamber, through a slit formed in the partition between said granule-formation chamber and said granule-recovering chamber, and allowing said extremely fine granules to be dispersed on and attached to a supporter disposed in said granule-recovering chamber.
Claim 2
Independent Claim 86 words
A method for the production of substrates with a uniform dispersion of extremely fine granules comprising: forming extremely fine granules in a granule-formation chamber under a reduced pressure by a gas-evaporation technique, introducing said extremely fine granules into a granule-recovering chamber under high vacuum, which is adjacent to said granule-formation chamber, through a slit formed in the partition between said granule-formation chamber and said granule-recovering chamber, and allowing said extremely fine granules to be dispersed on and attached to a supporter disposed in said granule-recovering chamber.
Claim 3
Dependent Claim 53 words
A method for the production of substrates with a uniform dispersion of extremely fine granules according to claim 1, wherein said partition is provided with a throttling mechanism which attains a variable control of the diameter of said slit to thereby adjust the pressure difference between said granule-formation chamber and said granule-recovering chamber.
Claim 4
Dependent Claim 42 words
A method for the production of substrates with a uniform dispersion of extremely fine granules according to claim 1, wherein said supporter is cooled by a cooling means while said extremely fine granules are being dispersed on and attached to said supporter.
Claim 5
Dependent Claim 56 words
A method for the production of substrates with a uniform dispersion of extremely fine granules according to claim 1, which further comprises evaporating a dispersion medium composed of evaporable materials contained in said granule-recovering chamber, and allowing said extremely fine granules to be dispersed on and attached to said supporter, together with said evaporated dispersion medium.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1990-03-30 1990-09-29 1991-03-31 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1994-03-30 1994-09-29 1995-03-31 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1998-03-30 1998-09-29 1999-03-31 $7700.00 Window Closed / Lapsed

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