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US4649101A
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Process for the production of photoresist relief structures having an overhang character using o-quinone diazide photoresist with overexposure
Assignee: Novartis Corp
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Filing: 1985-07-26
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Granted: 1987-03-10
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Expires: 2005-07-26
Abstract
Abstract A process for the production of photoresist relief structures possessing an overhang character comprising coating a substrate with a positive-working photoresist composition based on phenol/formaldehyde condensates of the novolak resin type and photosensitive o-quinonediazide compounds, imagewise overexposure of the photoresist layer at an energy exceeding that required to produce relief structures with a 90° angle between the photoresist compound and the substrate, and treatment of the overexposed layer and substrate with a buffered, aqueous, alkaline developer containing 1-100 ppm of an oxyethylated alkylphenol as a non-ionic surfactant.
Inventors
- 👤 Klaus P. Thiel
- 👤 Raimund Sindlinger
- 👤 Hans J. Merrem
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 14:29
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/30; G03F7/32; G03F7/322; G03F7/20
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
132 words
A process for the production of photoresist relief structures, comprising: (a) coating a substrate with a positive-working photoresist composition comprising an admixture of a phenol/formaldehyde condensate of the novolak type and a photosensitive o-quinoediazide compound, so as to obtain a single photoresist layer, (b) imagewise overexposing the single dried photoresist layer, at a sufficient exposure energy of 15-25 mJ/cm 2 so that the resulting side walls of the relief structure resulting after development of the exposed layer will have an overhang structure wherein the sidewalls of the relief structure form an angle of about 95°-120° with the substrate surface, and (c) treating the exposed photoresist layer with a buffered, aqueous alkaline developer containing 1-100 ppm of an oxyethylated alkylphenol non-ionic surfactant, whereby an image is produce in the coating on the substrate.
Claim 2
Dependent Claim
132 words
A process for the production of photoresist relief structures, comprising: (a) coating a substrate with a positive-working photoresist composition comprising an admixture of a phenol/formaldehyde condensate of the novolak type and a photosensitive o-quinoediazide compound, so as to obtain a single photoresist layer, (b) imagewise overexposing the single dried photoresist layer, at a sufficient exposure energy of 15-25 mJ/cm 2 so that the resulting side walls of the relief structure resulting after development of the exposed layer will have an overhang structure wherein the sidewalls of the relief structure form an angle of about 95°-120° with the substrate surface, and (c) treating the exposed photoresist layer with a buffered, aqueous alkaline developer containing 1-100 ppm of an oxyethylated alkylphenol non-ionic surfactant, whereby an image is produce in the coating on the substrate.
Claim 3
Dependent Claim
16 words
A process according to claim 1, wherein the exposure energy is about 15-25 mJ/cm 2 .
Claim 4
Dependent Claim
16 words
A process according to claim 2, wherein the exposure energy is about 18-22 mJ/cm 2 .
Claim 5
Dependent Claim
25 words
A process according to claim 1, wherein the positive-working photoresist composition comprises a condensation product of formaldehyde with a phenolic compound and a napthoquinonediazidesulphonyl derivative.
Claim 6
Dependent Claim
28 words
A process according to claim 1, wherein the positive working photoresist composition comprises an esterification product of 5-oxo-6-diazo-5,6-dihydronaphthalenesulfonic acid and 2,3,4-dihydroxybenzophenone and further comprises a cresol/formaldehyde novolak resin.
Claim 7
Dependent Claim
19 words
A process according to claim 1, wherein the surfactant comprises an ethoxylation product of a C 6-14 alkyl phenol.
Claim 8
Dependent Claim
16 words
A process according to claim 6, wherein the surfactant has a degree of ethoxylation of 2-20.
Claim 9
Dependent Claim
18 words
A process according to claim 7, wherein the surfactant has a mean degree of ethoxylation of about 9.
Claim 10
Dependent Claim
25 words
A process according to claim 1, wherein the side walls of the relief structure form an angle of at least 91° with the substrate surface.
Claim 11
Dependent Claim
138 words
In a method for obtaining a latent image in a substrate containing a single photoresist layer, the photoresist being a composition comprising an admixture of a phenol/formaldehyde condensate of the novolak type and a photosensitive o-quinonediazide compound, said method comprising generating the image by exposing the dried photoresist layer and subsequently developing the layer, whereby an image is produced in the coating on the substrate, the improvement comprising overexposing the single photoresist layer at a sufficient exposure energy of 15-25 mJ/cm 2 so that the side walls of the relief structure resulting after development of the exposed layer will have an overhang character wherein the sidewalls of the relief structure form an angle of about 95°-120° with the substrate surface, and subsequently developing the photoresist layer in a developer containing 1-100 ppm of an oxyethylated alkylphenol non-ionic surfactant.
Claim 12
Dependent Claim
138 words
In a method for obtaining a latent image in a substrate containing a single photoresist layer, the photoresist being a composition comprising an admixture of a phenol/formaldehyde condensate of the novolak type and a photosensitive o-quinonediazide compound, said method comprising generating the image by exposing the dried photoresist layer and subsequently developing the layer, whereby an image is produced in the coating on the substrate, the improvement comprising overexposing the single photoresist layer at a sufficient exposure energy of 15-25 mJ/cm 2 so that the side walls of the relief structure resulting after development of the exposed layer will have an overhang character wherein the sidewalls of the relief structure form an angle of about 95°-120° with the substrate surface, and subsequently developing the photoresist layer in a developer containing 1-100 ppm of an oxyethylated alkylphenol non-ionic surfactant.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-03-09 | 1990-09-08 | 1991-03-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-03-09 | 1994-09-08 | 1995-03-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-03-09 | 1998-09-08 | 1999-03-10 | $7700.00 | Window Closed / Lapsed |