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Substrate for an integrated circuit

Assignee: Niterra Co Ltd
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Filing: 1985-12-13
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Granted: 1987-03-10
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Expires: 2005-12-13
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Abstract

Abstract A substrate for supporting an integrated circuit made of a ceramic member with a thin film of conductive metal applied to the ceramic member. The ceramic member consists essentially of a sintered ceramic material capable of forming a surface finish upon sintering, having a roughness that is less than 10 times the thickness dimension of the conductive film applied thereto. The ceramic material is either crystalline glass or a glass-coated ceramic.

Inventors

  • 👤 Kazuo Kondo
  • 👤 Tsuneyuki Sukegawa

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-01 14:41
CPC Classifications
C; C03; C03C; C03C10/00; C03C10/0036; C03C10/0045; C03C10/0054; H; H10; H10W; H10W70/00; H10W70/60; H10W70/67; H10W70/69; H10W70/692; H10W99/00; Y; Y10; Y10S; Y10S428/00; Y10S428/901; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802; Y10T428/24917; Y10T428/24926

Claims Analysis

Total Claims: 7
Claim 1
Independent Claim 79 words
A substrate for supporting an integrated circuit device, said substrate being comprised of a ceramic member with a thin film of conductive metal applied to selective portions thereof, said ceramic member consisting essentially of a sintered ceramic material capable of forming a surface finish upon sintering of a roughness, a factor of about ten times less than the thickness of said thin film, said ceramic material being selected from the group consisting of crystalline glasses and glass-coated ceramic compositions.
Claim 2
Dependent Claim 79 words
A substrate for supporting an integrated circuit device, said substrate being comprised of a ceramic member with a thin film of conductive metal applied to selective portions thereof, said ceramic member consisting essentially of a sintered ceramic material capable of forming a surface finish upon sintering of a roughness, a factor of about ten times less than the thickness of said thin film, said ceramic material being selected from the group consisting of crystalline glasses and glass-coated ceramic compositions.
Claim 3
Dependent Claim 105 words
The substrate of claim 1 wherein said ceramic material is a crystalline glass consisting essentially of from 55 to 63% weight, SiO 2 , 20 to 28 weight % Al 2 O 3 , 10 to 18 weight % MgO and 2 to 6 weight % ZnO and from 0.1 to 6 weight % of an additive selected from the group of B 2 O 3 , P 2 O 5 or mixtures thereof, said ceramic material being formed into said ceramic member by comminuting said material to a powder, molding said powder into a preform and sintering said preform into said sintered ceramic article.
Claim 4
Dependent Claim 83 words
The substrate of claim 1 wherein said ceramic material is a glass coated ceramic composition, said ceramic material comprising a mixture containing ceramic particles having a layer of SiO 2 thereon in a matrix wherein said matrix is selected from the group consisting of a glass and a crystalline glass, said ceramic particles comprising from 5 to 60 volume % of said ceramic composition, said ceramic compositions having a coefficient of thermal expansion in the range of from 5 to 45×10 -7 .
Claim 5
Dependent Claim 84 words
The substrate of claim 1 wherein said ceramic material is a crystalline glass consisting essentially of 40 to 52 weight % SiO 2 , 27 to 37 weight % Al 2 O 3 , 10 to 20 weight % MgO, 2 to 8 weight % CaO, and 0.1-3 weight % ZrO 2 , said ceramic material being formed into said ceramic member by comminuting said material to a powder, molding said powder into a preform and sintering said preform into said sintered ceramic article.
Claim 6
Dependent Claim 111 words
The substrate of claim 1 wherein said ceramic material is a crystalline glass consisting essentially of from 55 to 63% weight % SiO 2 , 20 to 28 weight % Al 2 O 3 , 1 to 8 weight % Y 2 O 3 , and 10 to 20 weight % MgO, and from 0.1 to 5 weight % of an additive selected from the group consisting of B 2 O 3 , P 2 O 5 and mixtures thereof, said ceramic material being formed into said ceramic member by comminuting said material to a powder, molding said powder into a preform and sintering said preform into said sintered ceramic article.
Claim 7
Dependent Claim 23 words
The substrate of claim 1 wherein said conductive film includes an element selected from groups 4A, 5A or 6A of the periodic table.

References Cited (Backward Citations)

US2053244A Cited
US4540671A Cited
US4608316A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1990-03-09 1990-09-08 1991-03-10 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1994-03-09 1994-09-08 1995-03-10 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1998-03-09 1998-09-08 1999-03-10 $7700.00 Window Closed / Lapsed

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