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US4648917A Expired / Lapsed US ⏱️ 0.0 years remaining

Non isothermal method for epitaxially growing HgCdTe

Assignee: Lockheed Martin Tactical Systems Inc
•
Filing: 1985-08-26
•
Granted: 1987-03-10
•
Expires: 2005-08-26
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Abstract

Abstract A layer of HgCdTe (15) is epitaxially grown onto a CdTe substrate (5). A HgTe source (3) is spaced from the CdTe substrate (5) a distance of between 0.1 mm and 10 mm. The substrate (5) and source (3) are heated within a temperature range of between 500 DEG C. and 625 DEG C. for a processing step having a duration of between 5 minutes and 4 hours. During at least 5 minutes of this processing step, the substrate (5) is made to have a greater temperature than the source (3). Preferably the substrate (5) is never at a lower temperature than the source (3). The source (3) and substrate (5) are heated together in a thermally insulating, reusable ampoule (17). The CdTe substrate (5) is preferably a thin film epitaxially grown on a support (10) e.g., of sapphire or GaAs. When support (10) is not used, the CdTe substrate (5) is polished; and sublimation and solid state diffusion growth mechanisms are present in the growth of the HgCdTe (15). Means are disclosed for preventing contamination of the reactants during HgTe (3) synthesis and bulk CdTe wafer (5) polishing.

Inventors

  • 👤 Robert E. Kay
  • 👤 Hakchill Chan
  • 👤 Fred Ju
  • 👤 Burton A. Bray

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-29 12:11
CPC Classifications
C; C30; C30B; C30B23/00; C30B23/02; C30B29/00; C30B29/10; C30B29/46; C30B29/48; H; H10; H10P; H10P14/00; H10P14/20; H10P14/22; H10P14/29; H10P14/2901; H10P14/2907; H10P14/2911; H10P14/2913; H10P14/2917; H10P14/2921; H10P14/32; H10P14/3202; H10P14/3224; H10P14/3232; H10P14/34; H10P14/3402; H10P14/3424; H10P14/3432

Claims Analysis

Total Claims: 11
Claim 1
Independent Claim 80 words
A method for epitaxially growing a layer of HgCdTe on a CdTe substrate wherein a HgTe source is spaced from the CdTe substrate a distance of between 0.1 mm and 10 mm, and the CdTe and HgTe are heated within a temperature range of between 500° C. and 625° C. during a processing step having a duration of between 5 minutes and 4 hours, during at least 5 minutes of which the CdTe substrate is hotter than the HgTe source.
Claim 2
Independent Claim 80 words
A method for epitaxially growing a layer of HgCdTe on a CdTe substrate wherein a HgTe source is spaced from the CdTe substrate a distance of between 0.1 mm and 10 mm, and the CdTe and HgTe are heated within a temperature range of between 500° C. and 625° C. during a processing step having a duration of between 5 minutes and 4 hours, during at least 5 minutes of which the CdTe substrate is hotter than the HgTe source.
Claim 3
Dependent Claim 23 words
The method of claim 1 wherein, during the processing step, the CdTe substrate is never at a lower temperature than the HgTe source.
Claim 4
Dependent Claim 62 words
The method of claim 1 wherein the epitaxially grown HgCdTe layer has a thickness of between 0.7 micron and 30 microns; and the mole fraction of Cd in the epitaxially grown HgCdTe which is a distance of at least 10% of the HgCdTe layer thickness away from the CdTe substrate varies by no more than 10% as a function of said distance.
Claim 5
Dependent Claim 32 words
The method of claim 1 wherein the source is Hg y Te; y is between 0.8 and 1, inclusively; and the Hg and Te have been ground together in an argon environment.
Claim 6
Dependent Claim 31 words
The method of claim 1 wherein the CdTe substrate is a thin film epitaxially grown on a support fabricated of a material from the class of materials comprising sapphire and GaAs.
Claim 7
Dependent Claim 43 words
The method of claim 1 wherein changing the crystal plane or the axial orientation of the CdTe substrate does not affect the rate of growth of the HgCdTe layer, the single crystal nature of the HgCdTe, or the mirror-like finish of the HgCdTe.
Claim 8
Dependent Claim 32 words
The method of claim 1 wherein the lower the mole fraction of Hg in the HgTe source, the greater the mole fraction of Hg in the grown HgCdTe layer, and vice versa.
Claim 9
Dependent Claim 47 words
The method of claim 1 wherein, at the beginning of the processing step, the CdTe substrate is at least as hot as the HgTe source, and, at some time during the processing step, the temperature of the HgTe source with respect to the CdTe substrate is lowered.
Claim 10
Dependent Claim 22 words
The method of claim 1 wherein the HgTe source and the CdTe substrate are heated together in a thermally insulating reusable ampoule.
Claim 11
Dependent Claim 32 words
The method of claim 1 wherein the substrate 5 is a bulk wafer of CdTe that has been polished by a silicone rubber pad wet with a solution of bromine in methanol.

References Cited (Backward Citations)

US3622405A Cited
US3793070A Cited
US4418096A Cited
US4447470A Cited
US4487813A Cited
US4487640A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1990-03-09 1990-09-08 1991-03-10 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1994-03-09 1994-09-08 1995-03-10 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1998-03-09 1998-09-08 1999-03-10 $7700.00 Window Closed / Lapsed

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