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US4447470A Expired / Lapsed US ⏱️ 0.0 years remaining

Composition control of CSVPE HgCdTe

Assignee: Lockheed Martin Tactical Systems Inc
•
Filing: 1982-12-06
•
Granted: 1984-05-08
•
Expires: 2002-12-06
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Abstract

Abstract Methods for growing HgCdTe (15) upon a CdTe substrate (5) using a HgTe source (3) and close-spaced vapor phase epitaxy (CSVPE). A processing temperature T of between 520° C. and 625° C. is employed over a processing time t of between approximately 1/4 and 4 hours. The thickness A of the grown HgCdTe (15) is a linear function of processing time t. The mole fraction x of cadmium in the HgCdTe (15) is a linear function of temperature T and an exponential function of the mole fraction y of mercury in the source (3). The lower the relative amount of mercury in the source (3), the greater the relative amount of mercury in the end product (15), and vice versa. Any crystal plane and any axial orientation of the CdTe substrate (5) can be used without affecting the rate of growth of the HgCdTe (15), the single crystal nature of the HgCdTe (15), or the mirror-like finish of its surface. At least 90% of the transition between the CdTe substrate (5) and the grown HgCdTe layer (15) occurs within the first 20% of the HgCdTe layer (15); for distances greater than this away from the substrate (5), the HgCdTe (15) exhibits a substantially uniform x.

Inventors

  • 👤 Robert E. Kay

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-29 00:48
CPC Classifications
H; H10; H10F; H10F71/00; H10F71/125; H10F71/1253; H10F77/00; H10F77/10; H10F77/12; H10F77/123; H10F77/1237; H10P; H10P14/00; H10P14/20; H10P14/22; H10P14/29; H10P14/2901; H10P14/2913; H10P14/2917; H10P14/34; H10P14/3402; H10P14/3424; H10P14/3432

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 53 words
A method for growing a layer of HgCdTe on a CdTe substrate using a HgTe source and close-spaced vapor phase epitaxy, wherein close-spaced CdTe and HgTe are heated together at a constant processing temperature of between 520° C. and 625° C. for a fixed processing time of between 1/4 hour and 4 hours.
Claim 2
Independent Claim 53 words
A method for growing a layer of HgCdTe on a CdTe substrate using a HgTe source and close-spaced vapor phase epitaxy, wherein close-spaced CdTe and HgTe are heated together at a constant processing temperature of between 520° C. and 625° C. for a fixed processing time of between 1/4 hour and 4 hours.
Claim 3
Dependent Claim 46 words
The method of claim 1 wherein changing the crystal plane or the axial orientation of the CdTe substrate does not affect the rate of growth of the HgCdTe layer, the single crystal nature of the HgCdTe, or the mirror-like finish of the surface of the HgCdTe.
Claim 4
Dependent Claim 60 words
The method of claim 1 wherein the grown HgCeTe layer has a thickness of between 3 microns and 24 microns; and the mole fraction of cadmium in the HgCdTe which is a distance of at least 20% of the HgCdTe layer thickness away from the CdTe substrate varies by no more than 10 % as a function of said distance.
Claim 5
Dependent Claim 20 words
The method of claim 1 wherein the thickness of the grown HgCdTe layer is a linear function of processing time.
Claim 6
Dependent Claim 31 words
The method of claim 1 wherein the thickness of the grown HgCdTe layer is a substantially linear function of processing temperature up to a HgCdTe layer thickness of approximately 20 microns.
Claim 7
Dependent Claim 33 words
The method of claim 1 wherein for any mole fraction of mercury in the HgTe source, the mole fraction of cadmium in the grown HgCdTe layer is a linear function of processing temperature.
Claim 8
Dependent Claim 32 words
The method of claim 1 wherein the lower the mole fraction of mercury in the HgTe source, the greater the mole fraction of mercury in the grown HgCdTe layer, and vice versa.

References Cited (Backward Citations)

US3218204A Cited
US3472685A Cited
US3619283A Cited
US3779803A Cited
US3664866A Cited
US3658582A Cited
US3884788A Cited
US3902924A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1987-05-08 1987-11-07 1988-05-08 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1991-05-08 1991-11-07 1992-05-08 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1995-05-08 1995-11-07 1996-05-08 $7700.00 Window Closed / Lapsed

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