US4647954A
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Low temperature tunneling transistor
Assignee: International Business Machines Corp
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Filing: 1984-09-27
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Granted: 1987-03-03
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Expires: 2004-09-27
Abstract
Abstract The transistor comprises two electrodes, source (12) and drain (13), with a semiconductor tunnel channel (11) arranged therebetween. A gate (14) for applying control signals is coupled to the channel. The semiconductor, at low temperatures, behaves like an insulator with a low barrier (some meV) through which charge carriers can tunnel under the influence of an applied drain voltage. The tunnel current can be controlled by a gate voltage V G which modifies the barrier height between source and drain thereby changing the tunnel probability.
Inventors
- 👤 Volker Graf
- 👤 Pierre L. Gueret
- 👤 Carl A. Mueller
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 13:31
CPC Classifications
H; H10; H10N; H10N60/00; H10N60/10; H10N60/128; H10D; H10D62/00; H10D62/80; H10D62/81; H10D62/815; H10D62/8171; Y; Y10; Y10S; Y10S505/00; Y10S505/825; Y10S505/856; Y10S505/857; Y10S505/86
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
232 words
A tunneling transistor for use at an operating temperature in an environment in the range of liquid helium temperature to liquid nitrogen temperature, comprising: (a) doped semiconductor barrier means (11) having, at operating temperature, the composite of doping and of dimensions such that tunnel current dominates the current of thermionically excited carriers, and the difference in energy between the Fermi-level and either the conduction band minimum or the valence band maximum of the semiconductor is on the order of MeV; (b) a source electrode (12), connected to said semiconductor barrier means (11) at a first position; (c) a drain electrode (13), laterally located at a second position at a finite distance, on the order of 100 nm, from said source electrode (12), across which finite distance tunnel currents may flow in said semiconductor barrier material (11); (d) at least one gate electrode (14), operably juxtaposed to said semiconductor barrier material (11), positioned at a third position between said first and second positions for controlling tunneling current in said barrier material (11) by means of signals in the mV range; whereby a low height energy barrier permits control of the tunneling current between said source electrode (12) and said drain electrode (13) by means of signals in the mV range applied to said gate electrode (14); and (e) means for applying to said gate terminal (14) a control signal in the mV range.
Claim 2
Dependent Claim
232 words
A tunneling transistor for use at an operating temperature in an environment in the range of liquid helium temperature to liquid nitrogen temperature, comprising: (a) doped semiconductor barrier means (11) having, at operating temperature, the composite of doping and of dimensions such that tunnel current dominates the current of thermionically excited carriers, and the difference in energy between the Fermi-level and either the conduction band minimum or the valence band maximum of the semiconductor is on the order of MeV; (b) a source electrode (12), connected to said semiconductor barrier means (11) at a first position; (c) a drain electrode (13), laterally located at a second position at a finite distance, on the order of 100 nm, from said source electrode (12), across which finite distance tunnel currents may flow in said semiconductor barrier material (11); (d) at least one gate electrode (14), operably juxtaposed to said semiconductor barrier material (11), positioned at a third position between said first and second positions for controlling tunneling current in said barrier material (11) by means of signals in the mV range; whereby a low height energy barrier permits control of the tunneling current between said source electrode (12) and said drain electrode (13) by means of signals in the mV range applied to said gate electrode (14); and (e) means for applying to said gate terminal (14) a control signal in the mV range.
Claim 3
Dependent Claim
18 words
A tunneling transistor according to claim 10, wherein said doped semiconductor barrier means (11) is a mixed crystal.
Claim 4
Dependent Claim
67 words
A tunneling transistor according to claim 1, for use at an operating temperature in the superconductivity range of temperatures near the temperature of liquid helium, wherein said electrodes consist of one or more thin layers of superconductive material adjacent one or more thin layers of ohmic metallic material of the class which exhibits proximity effect superconductivity in the presence of a covering a layer of superconducting material.
Claim 5
Dependent Claim
42 words
A tunneling transistor according to claim 1, wehrein said doped semiconductor barrier (11) means material is CdS and wherein a layer of Al is deposited at said source electrode (12) and drain electrode (13) areas of said doped semiconductor barrier means (11).
Claim 6
Dependent Claim
19 words
A tunneling transistor according to claim 1, wherein said source electrode (12) consists of superconducting material at operating temperature.
Claim 7
Dependent Claim
31 words
A tunneling transistor according to claim 1 wherein said source electrode (12), said drain electrode (13) and said gate electrode (14) consist of ohmic materials from the group Al, Au, Ag.
Claim 8
Dependent Claim
35 words
A tunneling transistor according to claim 5, wherein the difference in energy between conduction band Fermi-level of the semiconductor barrier means (11) metal is in the range of the energy gap of the superconductor electrode.
Claim 9
Dependent Claim
17 words
A tunneling transistor according to claim 1, wherein said doped semiconductor barrier means (11) material is n-doped.
Claim 10
Dependent Claim
16 words
A tunneling transistor according to claim 1, wherein said doped semiconductor barrier (11) material is p-doped.
Claim 11
Dependent Claim
24 words
A tunneling transistor according to claim 1, wherein said doped semiconductor barrier (11) material has a band gap on the order of 5-10 meV.
Claim 12
Dependent Claim
20 words
A tunneling transistor according to claim 1, wherein said doped semiconductor barrier means (11) is a nipi superlattice structure (52).
Claim 13
Dependent Claim
24 words
A tunneling transistor according to claim 1, wherein said gate electrode (14) is electrically isolated (30, 31, 32) from said doped semiconductor barrier (11).
Claim 14
Dependent Claim
19 words
A tunneling transistor according to claim 10, wherein said doped semiconductor barrier (11) material is an alloy of elements.
Claim 15
Dependent Claim
19 words
A tunneling transistor according to claim 11, wherein said nipi superlattice structure (52) is formed in a GaAs crystal.
Claim 16
Dependent Claim
52 words
A tunneling transistor according to claim 1, wherein said doped semiconductor barrier (11) material is InAs and wherein a layer of a material from the group Al, Au, and Ag is deposited in the area of said source electrode (12) and said drain electrode (13) areas of said semiconductor barrier means (11).
Claim 17
Dependent Claim
37 words
A tunneling transistor according to claim 11, wherein said ohmic contacts between said source and drain electrodes and the nipi structure are obtained by depositing a thin film of AuGe between said electrodes and the nipi surfaces.
Claim 18
Dependent Claim
24 words
A tunneling transistor according to claim 12, wherein said gate electrode (14) is isolated from said semiconductor (11) by a thin oxide layer (30).
Claim 19
Dependent Claim
34 words
A tunneling transistor according to claim 12, wherein said gate (14) is isolated from said semiconductor barrier (11) by a Schottky barrier (31) formed in said semiconductor barrier layer (11) adjacent said gate (14).
Claim 20
Dependent Claim
45 words
A tunneling transistor according to claim 12, wherein said gate (14) is isolated from said semiconductor barrier (11) in that a semiconductor layer (32) of material having a band gap significantly greater than 10 meV is formed at said semiconductor surface underneath said gate (14).
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