US4647548A
Expired / Lapsed
US
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Targets for cathode sputtering
Assignee: Merck Patent GmbH
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Filing: 1984-01-10
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Granted: 1987-03-03
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Expires: 2004-01-10
Abstract
Abstract Oxide-ceramic targets which can be used in magnetically enhanced cathode sputtering and which are based on hot-pressed indium oxide/tin oxide mixtures, which have a density of at least 75% of the theoretical density and which have been diminished to such an extent in the oxygen content compared with the stoichiometric composition that they have an electrical conductivity which corresponds to a specific resistance of 0.6 to 0.1 Ω· cm can be prepared by compression-molding the metal oxide mixture in a reducing atmosphere under a pressure of 50 to 600 kg/cm 2 and at a temperature of 850° to 1,000° C. The targets can be used in direct-voltage sputtering.
Inventors
- 👤 Hans D. Klein
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:57
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3407; C23C14/3414; C23C14/06; C23C14/08; C23C14/086
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
65 words
An oxide-ceramic composition useful as a target in magnetically enhanced cathode sputtering, comprising a hot-pressed indium oxide/tin oxide mixture of a density of at least 75% of the theoretical density and which has been diminished to such an extent in its oxygen content compared with the stoichiometric composition that it has an electric conductivity which corresponds to a specific resistance of 0.6 to 0.1 Ω·cm.
Claim 2
Dependent Claim
65 words
An oxide-ceramic composition useful as a target in magnetically enhanced cathode sputtering, comprising a hot-pressed indium oxide/tin oxide mixture of a density of at least 75% of the theoretical density and which has been diminished to such an extent in its oxygen content compared with the stoichiometric composition that it has an electric conductivity which corresponds to a specific resistance of 0.6 to 0.1 Ω·cm.
Claim 3
Dependent Claim
26 words
A composition of claim 1, wherein the amount of tin oxide in the mixture is 1-20% by weight and of indium oxide is 99-80% by weight.
Claim 4
Dependent Claim
15 words
A composition of claim 2, wherein the amount of tin oxide is 9-11% by weight.
Claim 5
Dependent Claim
16 words
A composition of claim 1 having a density which is 75-90 % of the theoretical density.
Claim 6
Dependent Claim
15 words
A composition of claim 1 having a density which is 75-95% of the theoretical density.
Claim 7
Dependent Claim
55 words
A process for preparing an oxide-ceramic composition of claim 1 comprising compression-molding the indium oxide/tin oxide mixture to such an extent in a reducing atmosphere under a pressure of 50 to 600 kg/cm 2 and at a temperature of 850° to 1,000° C. that the composition's density is at least 75% of the theoretical density.
Claim 8
Dependent Claim
28 words
A process of claim 6, wherein a temperature of 900° to 920° C. and a pressure of 50 to 100 kg/cm 2 are maintained during the compression molding.
Claim 9
Dependent Claim
14 words
A process of claim 6, wherein the compression-molding takes place in a graphite mold.
Claim 10
Dependent Claim
24 words
A process of claim 6, wherein carbon or an organic material which produces carbon at the compression-molding temperature is present in the molding press.
Claim 11
Dependent Claim
24 words
A process of claim 6, wherein up to 2% by weight of tin or indium powder is contained in the metal oxide powder mixture.
Claim 12
Dependent Claim
32 words
A process of claim 6, wherein the temperature and the duration of the compression-molding are such that the resultant composition's electrical conductivity corresponds to a specific resistance of 0.6 to 0.1 Ω·cm.
Claim 13
Dependent Claim
29 words
A process of claim 6, wherein the compression molding time is 1-2 hours in total and the time of the mold at its highest temperature is about 30 minutes.
Claim 14
Dependent Claim
9 words
The composition prepared by the process of claim 6.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-03-02 | 1990-09-01 | 1991-03-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-03-02 | 1994-09-01 | 1995-03-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-03-02 | 1998-09-01 | 1999-03-03 | $7700.00 | Window Closed / Lapsed |