US4166784A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Feedback control for vacuum deposition apparatus
Assignee: Applied Films Lab Inc
•
Filing: 1978-04-28
•
Granted: 1979-09-04
•
Expires: 1998-04-28
Abstract
Abstract Method and apparatus for controlling vacuum deposition of a thin film onto a substrate, wherein the vacuum deposition produces a glow discharge. The glow discharge is monitored and light therefrom is converted to an electrical signal which is compared to a preset reference signal and used to optimize thin film properties by controlling deposition parameters such as current between electrodes or the supply of gas to a reactive sputtering apparatus. The overall intensity of the glow discharge, or the intensity of certain wavelengths, or the ratio of certain wavelength intensities may be monitored. The time derivative of the electrical signal may be taken to quicken response to light changes. The method and apparatus of the present invention are particularly applicable to reactive sputtering. As an alternative embodiment in reactive sputtering, cathode voltage may be monitored instead of the light.
Inventors
- 👤 John Chapin
- 👤 Charles R. Condon
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 23:02
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/54; C23C14/542; C23C14/543; C23C14/0021; C23C14/0036; C23C14/0042
Claims Analysis
Total Claims: 31
Claim 1
Independent Claim
118 words
In an apparatus for depositing an intermediately reacted thin film onto a substrate, said apparatus having a chamber, a power supply, means for providing a flow of reactive gas to the apparatus, and producing a glow discharge having light intensity, a control device comprising: converting means for converting the light intensity of the glow discharge into an electrical signal indicative of the light intensity; comparing means for comparing the electrical output signal to a reference signal to obtain a comparison signal; adjusting means for rapidly adjusting said flow of said reactive gas to said apparatus by venting said gas outside said chamber in response to said comparison signal to control the depositing of said intermediately reacted thin film.
Claim 2
Dependent Claim
118 words
In an apparatus for depositing an intermediately reacted thin film onto a substrate, said apparatus having a chamber, a power supply, means for providing a flow of reactive gas to the apparatus, and producing a glow discharge having light intensity, a control device comprising: converting means for converting the light intensity of the glow discharge into an electrical signal indicative of the light intensity; comparing means for comparing the electrical output signal to a reference signal to obtain a comparison signal; adjusting means for rapidly adjusting said flow of said reactive gas to said apparatus by venting said gas outside said chamber in response to said comparison signal to control the depositing of said intermediately reacted thin film.
Claim 3
Dependent Claim
91 words
The apparatus of claim 1 wherein said comparing means comprises: an amplifier, connected to said converting means, for amplifying said electrical signal; a differentiating circuit connected to said amplifier, for taking the time derivative of said electrical signal; an addition circuit connected to said differentiating circuit for adding the time derivative of the electrical signal to the electrical signal to obtain a summed signal; and a comparator, connected to said addition circuit and inputting said reference signal, for comparing the summed signal to said reference signal to produce said comparison signal.
Claim 4
Dependent Claim
23 words
The apparatus of claim 1 wherein said adjusting means further comprises: means for adjusting said power supply in response to said comparison signal.
Claim 5
Dependent Claim
89 words
The apparatus of claim 1 wherein said converting means for converting light intensity to an electrical signal comprises: a first photoelectric sensor producing a first electric signal in proportionate response to light of a first wavelength, said light being received from said glow discharge; a second photoelectric sensor producing a second electric signal in proportionate response to light of a second wavelength, said light being received from said glow discharge; and means for comparing the first electric signal to the second electric signal and outputting to the adjusting means.
Claim 6
Dependent Claim
85 words
The converting means of claim 4 wherein said means for comparing the first electric signal to the second electric signal comprises: a first logarithmic amplifier, connected to the first photoelectric sensor, for producing a first logarithmic output of the first electric signal; a second logarithmic amplifier, connected to the second photoelectric sensor, for producing a second logarithmic output of the second electric signal; and a subtracting circuit for subtracting the first logarithmic output from second logarithmic output and outputting the difference to the comparing means.
Claim 7
Dependent Claim
29 words
The apparatus of claim 5 wherein said first logarithmic amplifier and said second logarithmic amplifier comprise serially connected diodes between an input and an output of an operational amplifier.
Claim 8
Dependent Claim
158 words
In an apparatus for reactive sputtering, said apparatus producing a glow discharge and comprising an anode, a cathode, a power supply for creating a potential drop between the anode and the cathode, a cathode adapted to comprise a target material, means for supporting a substrate to be coated, means for producing reduced pressure in the apparatus, means for providing a sputtering gas, a means for providing a flow of reactive gas to the apparatus, said reactive gas reacting with said target material to form an intermediately reacted product, the improvement comprising: converting means for converting the light intensity of the glow discharge into an electrical signal proportional to the light intensity; comparing means for comparing the electrical signal to a reference signal to obtain a comparison signal; said comparing means comprising differentiating means for obtaining a comparison signal having a phase lead; and adjusting means for adjusting said flow of reactive gas in response to said comparison signal.
Claim 9
Dependent Claim
158 words
In an apparatus for reactive sputtering, said apparatus producing a glow discharge and comprising an anode, a cathode, a power supply for creating a potential drop between the anode and the cathode, a cathode adapted to comprise a target material, means for supporting a substrate to be coated, means for producing reduced pressure in the apparatus, means for providing a sputtering gas, a means for providing a flow of reactive gas to the apparatus, said reactive gas reacting with said target material to form an intermediately reacted product, the improvement comprising: converting means for converting the light intensity of the glow discharge into an electrical signal proportional to the light intensity; comparing means for comparing the electrical signal to a reference signal to obtain a comparison signal; said comparing means comprising differentiating means for obtaining a comparison signal having a phase lead; and adjusting means for adjusting said flow of reactive gas in response to said comparison signal.
Claim 10
Dependent Claim
11 words
The apparatus of claim 7 wherein said reactive gas is oxygen.
Claim 11
Dependent Claim
23 words
The apparatus of claim 7 wherein the target material is selected from the group consisting of silicon, indium-tin alloy, tin-antimony alloy, and aluminum.
Claim 12
Dependent Claim
72 words
The apparatus of claim 7 wherein said converting means comprises means for converting the light intensity of light of a first wavelength to a first signal and the light intensity of light of a second wavelength to a second signal and means for comparing said first signal and said second signal to produce said electrical signal proportional to the ratio of the light intensity of the first wavelength and the second wavelength.
Claim 13
Dependent Claim
21 words
The apparatus of claim 7 wherein said adjusting means comprises a vent valve for venting said reactive gas to the atmosphere.
Claim 14
Dependent Claim
15 words
The apparatus of claim 11 further comprising a metering valve downstream of said vent valve.
Claim 15
Dependent Claim
111 words
In a process for coating an article by reactive sputtering in a sputtering apparatus including a chamber, an anode, a cathode, means for providing a flow of reactive gas, and a sputtering power supply, said apparatus emitting a glow discharge having a light intensity, the improvement comprising: (a) converting the light intensity of the glow discharge into an electrical signal proportional to the light intensity; (b) comparing the electrical signal to a reference signal to obtain a comparison signal; and (c) adjusting the flow of said reactive gas in rapid response to said comparison signal by venting said gas outside said chamber to a rate which produces an intermediately reacted compound.
Claim 16
Dependent Claim
111 words
In a process for coating an article by reactive sputtering in a sputtering apparatus including a chamber, an anode, a cathode, means for providing a flow of reactive gas, and a sputtering power supply, said apparatus emitting a glow discharge having a light intensity, the improvement comprising: (a) converting the light intensity of the glow discharge into an electrical signal proportional to the light intensity; (b) comparing the electrical signal to a reference signal to obtain a comparison signal; and (c) adjusting the flow of said reactive gas in rapid response to said comparison signal by venting said gas outside said chamber to a rate which produces an intermediately reacted compound.
Claim 17
Dependent Claim
57 words
The process of claim 13 further comprising the steps of: (a) amplifying said electrical signal; (b) taking the time derivative of the electrical signal; (c) adding the time derivative of the electrical signal to the electrical signal to obtain a summed signal; and (d) comparing the summed signal to said reference signal to obtain said comparison signal.
Claim 18
Dependent Claim
29 words
The process of claim 13 wherein said adjusting the flow of reactive gas comprises the step of: venting said reactive gas outside the apparatus to reduce the flow thereof.
Claim 19
Dependent Claim
66 words
The process of claim 13 wherein said converting of the light intensity to an electrical signal comprises the steps of: (a) converting the light intensity of light of a first wavelength band to a first electrical signal; (b) converting the light intensity of light of a second wavelength band to a second electrical signal; and (c) comparing the first electrical signal to the second electrical signal.
Claim 20
Dependent Claim
58 words
The process of claim 16 wherein said comparing of the first electrical signal to the second electrical signal comprises the steps of: (a) taking a logarithim of the first electrical signal; (b) taking a logarithim of the second electrical signal; and (c) subtracting the logarithim of the first electrical signal from the logarithim of the second electrical signal.
Claim 21
Dependent Claim
11 words
The process of claim 13 wherein said reactive gas is oxygen.
Claim 22
Dependent Claim
15 words
The process of claim 18 wherein said cathode target material consists essentially of indium-tin alloy.
Claim 23
Dependent Claim
11 words
The process of claim 19 wherein said article is transparent ceramic.
Claim 24
Dependent Claim
17 words
The process of claim 13 wherein said sputtering process comprises the step of: coating an unheated article.
Claim 25
Dependent Claim
24 words
The process of claim 13 wherein said cathode comprises unreacted material which sputters at a relatively high rate compared to said intermediately reacted compound.
Claim 26
Dependent Claim
116 words
In a method for coating an article in a reactive sputtering apparatus including an anode, a cathode and a sputtering power supply, wherein a flow of reactive gas is added to the apparatus to react with material from a target on the cathode surface to form a compound, the improvement comprising: (a) selecting a target material with a first observed cathode voltage having a measurable difference from an observed cathode voltage of said compound; (b) measuring the cathode voltage during said reactive sputtering to obtain an electrical signal; (c) comparing the electrical signal with a reference signal to obtain a comparison signal; and (d) adjusting the rate of said sputtering in response to said comparison signal.
Claim 27
Dependent Claim
116 words
In a method for coating an article in a reactive sputtering apparatus including an anode, a cathode and a sputtering power supply, wherein a flow of reactive gas is added to the apparatus to react with material from a target on the cathode surface to form a compound, the improvement comprising: (a) selecting a target material with a first observed cathode voltage having a measurable difference from an observed cathode voltage of said compound; (b) measuring the cathode voltage during said reactive sputtering to obtain an electrical signal; (c) comparing the electrical signal with a reference signal to obtain a comparison signal; and (d) adjusting the rate of said sputtering in response to said comparison signal.
Claim 28
Dependent Claim
57 words
The method of claim 23 further comprising the steps of: (a) amplifying said electrical signal. (b) taking the time derivative of the electrical signal; (c) adding the time derivative of the electrical signal to the electrical signal to obtain a summed signal; and (d) comparing the summed signal to said reference signal to obtain said comparison signal.
Claim 29
Dependent Claim
29 words
The method of claim 23 wherein said adjusting the rate of said sputtering comprises the step of: venting said reactive gas outside the apparatus to reduce the flow thereof.
Claim 30
Dependent Claim
11 words
The method of claim 25 wherein said reactive gas is oxygen.
Claim 31
Dependent Claim
26 words
The method of claim 23 wherein said cathode consists essentially of a member of the group consisting of indium-tin alloy, tin-antimony alloy, silicon, magnesium, and aluminum.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-09-03 | 1983-03-05 | 1983-09-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-09-03 | 1987-03-05 | 1987-09-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-09-03 | 1991-03-05 | 1991-09-04 | $7700.00 | Window Closed / Lapsed |