Abstract Chalcogenide suboxide, particularly tellurium oxides TeOx, are possible to reversibly change optical characteristics by changing power of irradiating light to repeat recording and erasure. If the TeOx is x<1, high sensitivity is obtained but the characteristic of film is greatly deteriorated due to the environment. In accordance with this invention there is proposed a film which can be used as an optical recording medium having a high sensitivity and a high stability under the conditions that a partial pressure of oxygen is in the range from 1x10-4-9x10-3 Torr and a high frequency power for forming a plasma in the range of 50-500 W and wherein the TeOx film is formed by metal tellurium vapor passing through a plasma of oxygen gas.
A method for manufacturing a recording medium characterized in that a film formed from a tellurium suboxide TeO x (0<x<2) is formed on a substrate by causing a metal tellurium vapor to pass through oxygen gas in the form of a plasma.
Claim 2
Independent Claim
42 words
A method for manufacturing a recording medium characterized in that a film formed from a tellurium suboxide TeO x (0<x<2) is formed on a substrate by causing a metal tellurium vapor to pass through oxygen gas in the form of a plasma.
Claim 3
Dependent Claim
21 words
The manufacturing method according to claim 1 wherein formation of the oxygen gas plasma is made by a high frequency power.
Claim 4
Dependent Claim
19 words
The manufacturing method according to claim 2 wherein a partial pressure of oxygen is 1×10 4 -9×10 3 Torr.
Claim 5
Dependent Claim
18 words
The manufacturing method according to claim 3 wherein an output of the high frequency power is 50-500 W.
Claim 6
Dependent Claim
23 words
The manufacturing method according to claim 4 wherein the partial pressure of at least one oxygen and the high frequency power is constant.