US4642171A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Phototreating apparatus
Assignee: Toshiba Corp
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Filing: 1985-07-18
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Granted: 1987-02-10
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Expires: 2005-07-18
Abstract
Abstract A phototreating apparatus has a vacuum container for storing a solid material, a gas inlet for introducing a photoreactive gas into the container, and a light source for radiating into the container, light having a specific wavelength such that it causes a photoreaction of the photoreactive gas. The apparatus phototreats the solid material in the container by utilizing the photoreaction of the photoreactive gas. At least an inner surface of the vacuum container consists of a material which absorbs the light having the specific wavelength.
Inventors
- 👤 Makoto Sekine
- 👤 Haruo Okano
- 👤 Yasuhiro Horiike
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 23:33
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/48; C23C16/483; B; B01; B01J; B01J19/00; B01J19/08; B01J19/12; C23F; C23F4/00; G; G03; G03F; G03F7/00; G03F7/004; G03F7/0041
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
82 words
A phototreating apparatus having a vacuum container for storing a solid material, means for introducing a photoreactive gas into said container, and a light source for supplying light having a predetermined wavelength to said container, causing a photoreaction of the photoreactive gas, said apparatus phototreating the solid material in the container by utilizing the photoreaction of the photoreactive gas, wherein at least an inner surface of said vacuum container comprises a light-absorbing material capable of absorbing the light having the predetermined wavelength.
Claim 2
Dependent Claim
82 words
A phototreating apparatus having a vacuum container for storing a solid material, means for introducing a photoreactive gas into said container, and a light source for supplying light having a predetermined wavelength to said container, causing a photoreaction of the photoreactive gas, said apparatus phototreating the solid material in the container by utilizing the photoreaction of the photoreactive gas, wherein at least an inner surface of said vacuum container comprises a light-absorbing material capable of absorbing the light having the predetermined wavelength.
Claim 3
Dependent Claim
23 words
An apparatus according to claim 1, wherein a layer comprising said light-absorbing material is coated on an inner surface of said vacuum container.
Claim 4
Dependent Claim
14 words
An apparatus according to claim 1, wherein said vacuum container comprises said light-absorbing material.
Claim 5
Dependent Claim
25 words
An apparatus according to claim 1, wherein said light-absorbing material is a member selected from the group consisting of carbon, polytetrafluoroethylene resin and polyimide resin.
Claim 6
Dependent Claim
13 words
An apparatus according to claim 1, wherein said light source emits ultraviolet rays.
Claim 7
Dependent Claim
24 words
An apparatus according to claim 1, wherein said light source is arranged to vertically radiate a surface of the solid material to be treated.
Claim 8
Dependent Claim
30 words
An apparatus according to claim 6, further comprising another light source for emitting light which passes through said container parallel to said surface of the solid material to be treated.
Claim 9
Dependent Claim
19 words
An apparatus according to claim 1, wherein selective etching on a light-irradiated surface of the solid material is performed.
Claim 10
Dependent Claim
19 words
An apparatus according to claim 1, wherein a film is deposited on a light-irradiated surface of the solid material.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-02-09 | 1990-08-11 | 1991-02-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-02-09 | 1994-08-11 | 1995-02-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-02-09 | 1998-08-11 | 1999-02-10 | $7700.00 | Window Closed / Lapsed |