Patent US4639377A successfully refreshed from Google Patents.
US4639377A
Expired / Lapsed
US
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Thin film formation technique and equipment
Assignee: Hitachi Ltd
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Filing: 1985-04-22
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Granted: 1987-01-27
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Expires: 2005-04-22
Abstract
Abstract A thin film formation technique and apparatus therefor which comprises converting a molecular beam effusing from a molecular beam source equipment to a pulsed molecular beam; introducing the pulsed molecular beam into an ionization chamber in such a fashion that the most of the pulsed molecular beam is caused to be incident to a substrate while a part is ionized by the ionization chamber; amplifying the ion or the electron converted from the ion and converting it to an electrical signal; calculating the flux and speed of the molecular beam; controlling the molecular beam effusing from the molecular beam source equipment on the basis of the calculation information; and forming the thin film on the substrate.
Inventors
- 👤 Shigehiko Yamamoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 19:51
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/28; C23C14/54; C23C14/542; C23C14/544
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
143 words
In a thin film formation technique which sticks molecules onto a substrate and forms a thin film, the thin film formation technique comprising the steps of: converting a molecular beam effusing from molecular beam source equipment to a pulsed molecular beam; introducing said pulsed molecular beam into an ionization chamber so that most of said pulsed molecular beam is caused to be incident on said substrate while a part of said pulsed molecular beam is ionized by said ionization chamber; amplifying the ion or the electron converted from the ion and converting it to an electrical signal; calculating the flux and speed of said molecular beam in accordance with the electrical signal; controlling said molecular beam effusing from said molecular beam source equipment on the basis of the calculation information of the flux and speed; and forming said thin film on said substrate.
Claim 2
Dependent Claim
143 words
In a thin film formation technique which sticks molecules onto a substrate and forms a thin film, the thin film formation technique comprising the steps of: converting a molecular beam effusing from molecular beam source equipment to a pulsed molecular beam; introducing said pulsed molecular beam into an ionization chamber so that most of said pulsed molecular beam is caused to be incident on said substrate while a part of said pulsed molecular beam is ionized by said ionization chamber; amplifying the ion or the electron converted from the ion and converting it to an electrical signal; calculating the flux and speed of said molecular beam in accordance with the electrical signal; controlling said molecular beam effusing from said molecular beam source equipment on the basis of the calculation information of the flux and speed; and forming said thin film on said substrate.
Claim 3
Dependent Claim
24 words
The thin film formation technique according to claim 1, wherein said pulsed molecular beam has a period of from 10 Hz to 1 KHz.
Claim 4
Dependent Claim
129 words
In a thin film formation equipment which sticks a molecules onto a substrate and forms a thin film, the thin film formation equipment comprising: molecular beam source equipment for effusing a molecular beam; means for cutting the effused molecular beam at a high speed and converting it to a pulsed molecular beam; an ionization chamber for ionizing a part of said pulsed molecular beam; means for amplifying the ion or the electron converted from the ion and changing it to an electrical signal, and for calculating the flux and speed of said molecular beam; and feed-back means for feeding back the calculation information of the flux and speed to said molecular beam source equipment to control said molecular beam to enable formation of a thin film on the substrate.
Claim 5
Dependent Claim
129 words
In a thin film formation equipment which sticks a molecules onto a substrate and forms a thin film, the thin film formation equipment comprising: molecular beam source equipment for effusing a molecular beam; means for cutting the effused molecular beam at a high speed and converting it to a pulsed molecular beam; an ionization chamber for ionizing a part of said pulsed molecular beam; means for amplifying the ion or the electron converted from the ion and changing it to an electrical signal, and for calculating the flux and speed of said molecular beam; and feed-back means for feeding back the calculation information of the flux and speed to said molecular beam source equipment to control said molecular beam to enable formation of a thin film on the substrate.
Claim 6
Dependent Claim
17 words
The thin film formation equipment according to claim 3, wherein said ionization chamber is a mass spectrometer.
Claim 7
Dependent Claim
44 words
The thin film formation technique according to claim 2, wherein the step of converting a molecular beam to a pulsed molecular beam includes cutting the molecular beam and further comprising the step of detecting the timing of the molecular beam cutting by a photo-sensor.
Claim 8
Dependent Claim
21 words
The film formation technique according to claim 5, further comprising the step of selecting a molecular beam having a predetermined speed.
Claim 9
Dependent Claim
55 words
The thin film formation technique according to claim 2, wherein the step of introducing said pulsed molecular beam into the ionization chamber includes passing most of said pulsed molecular beam through the ionization chamber without being ionized by said ionization chamber so as to be incident on said substrate to form said thin film thereon.
Claim 10
Dependent Claim
41 words
The thin film formation equipment according to claim 3, wherein said cutting means cuts the molecular beam at a fixed speed corresponding to a predetermined period of said pulsed molecular beam selected to be in the range of 10 Hz-1 KHz.
Claim 11
Dependent Claim
28 words
The thin film formation equipment according to claim 3, further comprising a photo-sensor for detecting the timing of the cutting of said molecular beam by said cutting means.
Claim 12
Dependent Claim
20 words
The thin film formation equipment according to claim 3, further comprising means for selecting a speed for said molecular beam.
Claim 13
Dependent Claim
49 words
The thin film formation equipment according to claim 3, wherein said ionization chamber is disposed for receiving said pulsed molecular beam and for passing most of said pulsed molecular beam therethrough without ionization so as to be incident on said substrate to enable formation of a thin film thereon.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-01-26 | 1990-07-28 | 1991-01-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-01-26 | 1994-07-28 | 1995-01-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-01-26 | 1998-07-28 | 1999-01-27 | $7700.00 | Window Closed / Lapsed |