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US4638345A Expired / Lapsed US ⏱️ 0.0 years remaining

IR imaging array and method of making same

Assignee: RCA Corp
•
Filing: 1983-06-01
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Granted: 1987-01-20
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Expires: 2003-06-01
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Abstract

Abstract An array of infra-red (IR) detectors for a CCD image sensor includes a plurality of spaced areas of a conductive material at the surface of a substrate of semiconductor material of one conductivity type with each conductive area forming a Schottky-barrier diode with the substrate to form the IR detectors. Each detector includes a high conductivity contact region within the substrate. Between the detector area is a guard band which consists of a region of a conductivity type opposite to that of the substrate within the substrate and around said detector area. The guard band is spaced from the contact regions and each conductive area overlaps a portion of its adjacent guard band.

Inventors

  • 👤 Hammam Elabd
  • 👤 Walter F. Kosonocky

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-29 19:04
CPC Classifications
H; H10; H10F; H10F39/00; H10F39/10; H10F39/12; H10F39/15; H10F39/157; H10F30/00; H10F30/20; H10F30/21; H10F30/22; H10F30/227

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 141 words
An array of infra-red detectors comprising a substrate of single crystal silicon of one conductivity type, a plurality of spaced apart detector areas of a conductive material at one surface of said substrate with each of said conductive areas forming a Schottky-barrier junction with said substrate, each conductive area including a conductive coupling region of a conductivity type opposite to that of the substrate within the substrate under and in contact with a portion of the conductive material, and means between adjacent detector areas isolating said areas from each other, said isolating means consisting of a region of a conductivity type opposite to that of the substrate in said substrate and extending along said one surface between said areas with each of said areas contacting said region, said region extending around the conductive areas and being spaced from the coupling regions.
Claim 2
Dependent Claim 141 words
An array of infra-red detectors comprising a substrate of single crystal silicon of one conductivity type, a plurality of spaced apart detector areas of a conductive material at one surface of said substrate with each of said conductive areas forming a Schottky-barrier junction with said substrate, each conductive area including a conductive coupling region of a conductivity type opposite to that of the substrate within the substrate under and in contact with a portion of the conductive material, and means between adjacent detector areas isolating said areas from each other, said isolating means consisting of a region of a conductivity type opposite to that of the substrate in said substrate and extending along said one surface between said areas with each of said areas contacting said region, said region extending around the conductive areas and being spaced from the coupling regions.
Claim 3
Dependent Claim 22 words
An array in accordance with claim 1 in which each of the conductive areas overlaps a portion of the adjacent isolation region.
Claim 4
Dependent Claim 18 words
An array in accordance with claim 1 in which each of said conductive areas is a conductive silicide.
Claim 5
Dependent Claim 28 words
An array in accordance with claim 1 in which the periphery of each of the conductive areas overlaps a portion of the isolation region around said conductive area.
Claim 6
Dependent Claim 35 words
An array in accordance with claim 4 including a layer of an insulating material over said one surface of the substrate and a reflective metal layer on the insulating layer and over the detector areas.
Claim 7
Dependent Claim 31 words
An array in accordance with claim 1 in which the isolation region is a region containing a relatively low amount of conductivity modifier so as to be of relatively high resistance.
Claim 8
Dependent Claim 25 words
An array in accordance with claim 6 in which the substrate is of P type conductivity and the isolation region is of N- type conductivity.

References Cited (Backward Citations)

US4089020A Cited
US4040076A Cited
US4063964A Cited
US4119446A Cited
US4261095A Cited
GB2103875A Cited
JPS58157177A Cited
US4533933A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1990-01-19 1990-07-21 1991-01-20 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1994-01-19 1994-07-21 1995-01-20 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1998-01-19 1998-07-21 1999-01-20 $7700.00 Window Closed / Lapsed

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