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US4628296A Expired / Lapsed US ⏱️ 0.0 years remaining

Load cell

Assignee: Tokyo Electron Ltd
•
Filing: 1984-06-04
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Granted: 1986-12-09
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Expires: 2004-06-04
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Abstract

Abstract A load cell has four strain gauge resistors formed through an insulation layer on the beam body having a strain generating section, a conductive pattern for forming a bridge circuit by coupling the strain gauge resistors compensation resistance sections for compensating the bridge balance and span of the bridge circuit is provided. A section of the conductive pattern except the section coupled to the strain gauge resistors is disposed at a position sufficiently isolated from the strain gauge resistors.

Inventors

  • 👤 Tohru Kitagawa
  • 👤 Koichiro Sakamoto

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-24 05:08
CPC Classifications
G; G01; G01L; G01L1/00; G01L1/20; G01L1/22; G01L1/2287; G01L1/2206; G01L1/2243; G01L1/225; G01L1/2262

Claims Analysis

Total Claims: 19
Claim 1
Independent Claim 154 words
A load cell comprising: a beam body having at least one strain generating section with a substantially flat, straight-edged, multi-sided surface section; a plurality of strain gauge resistors formed on and insulated from said beam body, each strain gauge having one portion closest to an associated edge of said surface; a conductive pattern including a conductive layer formed along at least a portion of the periphery of said beam body and coupling said strain gauge resistors to form a bridge circuit, said conductive layer being interposed between said one portion of each of said strain gauge resistors and its associated surface edge; each of said strain guage resistors having its said one portion spaced at a preset distance from the portion of the interposed conductive layer to which it is closest, said present distance for one strain gauge resistor being equal to the preset distance for at least another of said strain gauge resistors.
Claim 2
Dependent Claim 154 words
A load cell comprising: a beam body having at least one strain generating section with a substantially flat, straight-edged, multi-sided surface section; a plurality of strain gauge resistors formed on and insulated from said beam body, each strain gauge having one portion closest to an associated edge of said surface; a conductive pattern including a conductive layer formed along at least a portion of the periphery of said beam body and coupling said strain gauge resistors to form a bridge circuit, said conductive layer being interposed between said one portion of each of said strain gauge resistors and its associated surface edge; each of said strain guage resistors having its said one portion spaced at a preset distance from the portion of the interposed conductive layer to which it is closest, said present distance for one strain gauge resistor being equal to the preset distance for at least another of said strain gauge resistors.
Claim 3
Dependent Claim 17 words
A load cell according to claim 1, wherein said plurality of strain gauge resistors includes four resistors.
Claim 4
Dependent Claim 76 words
A load cell according to claim 2, wherein the conductive layer includes first and second conductive layers with each being formed along an edge of said beam body, two of said resistors having said one portion thereof extending parallel to and spaced from the first conductive layer by a first distance, and the remaining two of said resistors having said portion thereof extending parallel to and spaced from the second conductive layer by a second distance.
Claim 5
Dependent Claim 15 words
A load cell according to claim 3, wherein said first and second distances are equal.
Claim 6
Dependent Claim 25 words
A load cell according to claim 4, further including a plurality of compensation resistances for compensating a bridge balance and span of said bridge circuit.
Claim 7
Dependent Claim 33 words
A load cell according to claim 5, wherein the compensation resistances are disposed on said beam body at positions where the beam body is not substantially deformed when a load is applied thereto.
Claim 8
Dependent Claim 28 words
A load cell according to claim 6, wherein the conductive layer, strain gauge resistors and compensating resistances are part of a thin film formed on said beam body.
Claim 9
Dependent Claim 25 words
A load cell according to claim 7, wherein said strain gauge resistors and compensation resistances are formed on said beam body by a deposition technique.
Claim 10
Dependent Claim 20 words
A load cell according to claim 1, wherein said preset distance is the same for all the strain gauge resistors.
Claim 11
Dependent Claim 92 words
A load cell according to claim 2, further comprising first to fourth stress generating sections which are formed of the same material as said conductive pattern, each of said first and second stress generating sections being separated from the portion of a corresponding one of said first and second strain gauge resistors by a predetermined distance smaller than said preset distance and each of said third and fourth stress generating sections being separated from the portion of a corresponding one of said third and fourth strain gauge resistors by said predetermined distance.
Claim 12
Dependent Claim 34 words
A load cell according to claim 1, further including a stress generating section placed alongside and parallel to at least one of said strain gauge resistors at a distance less than said preset distance.
Claim 13
Dependent Claim 22 words
A load cell according to claim 11, wherein the stress generating section is formed of the same material as the conductive pattern.
Claim 14
Dependent Claim 27 words
A load cell according to claim 2, further comprising first to fourth stress generating sections which are located adjacent to said first to fourth strain gauge resistors.
Claim 15
Dependent Claim 38 words
A load cell according to claim 13, wherein each of said stress generating sections is formed to have the same dimensions and at the same distance from a corresponding one of said first to fourth strain gauge resistors.
Claim 16
Dependent Claim 29 words
A load cell according to claim 13, wherein said stress generating sections are formed of the same material as said conductive pattern and formed integrally with said conductive pattern.
Claim 17
Dependent Claim 23 words
A load cell according to claim 1, wherein said one portion of each strain gauge resistor is parallel to the interposed conductive layer.
Claim 18
Dependent Claim 23 words
A load cell according to claim 9, wherein said one portion of each strain gauge resistor is parallel to the interposed conductive layer.
Claim 19
Dependent Claim 20 words
A load cell according to claim 10, wherein said stress generating sections have the same dimensions as said conductive pattern.

References Cited (Backward Citations)

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US3697918A Cited
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US4299130A Cited
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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1989-12-08 1990-06-09 1990-12-09 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1993-12-08 1994-06-09 1994-12-09 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1997-12-08 1998-06-09 1998-12-09 $7700.00 Window Closed / Lapsed

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