Patent US3963416A successfully refreshed from Google Patents.
Patent US4628174A successfully refreshed from Google Patents.
US4628174A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Forming electrical conductors in long microdiameter holes
Assignee: Intersil Corp
•
Filing: 1984-09-17
•
Granted: 1986-12-09
•
Expires: 2004-09-17
Abstract
Abstract A conductor is provided through a narrow bore hole of a wafer. The hole has a length-to-diameter ratio in excess of six. The conductor is formed by condensation of metal vapor generated at the bottom of said hole by a spark. The spark is generated between a vaporizable metal at the bottom of the hole and a thin electrode disposed above the hole from a conventional automobile coil and battery operating through a mercury switch.
Inventors
- 👤 Thomas R. Anthony
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 20:14
CPC Classifications
H; H01; H01B; H01B13/00; H01B13/0026; H05; H05K; H05K3/00; H05K3/40; H05K3/4038; H05K3/4076
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
64 words
A method of forming a through conductor in a small bore hole through a wafer having a length to diameter ratio in excess of six which comprises disposing a vaporizable metal at the bottom of said hole, disposing a thin electrode over the top of the hole, and creating a spark between the metal and electrode to vaporize metal into and through said hole.
Claim 2
Independent Claim
64 words
A method of forming a through conductor in a small bore hole through a wafer having a length to diameter ratio in excess of six which comprises disposing a vaporizable metal at the bottom of said hole, disposing a thin electrode over the top of the hole, and creating a spark between the metal and electrode to vaporize metal into and through said hole.
Claim 3
Dependent Claim
13 words
The method of claim 1 wherein the ratio is in excess of 10.
Claim 4
Dependent Claim
13 words
The method of claim 1 wherein the ratio is in excess of 20.
Claim 5
Dependent Claim
10 words
The method of claim 1 wherein the metal is copper.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-12-08 | 1990-06-09 | 1990-12-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-12-08 | 1994-06-09 | 1994-12-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-12-08 | 1998-06-09 | 1998-12-09 | $7700.00 | Window Closed / Lapsed |