Patent US4628006A successfully refreshed from Google Patents.
US4628006A
Expired / Lapsed
US
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Passivation of hybrid microelectronic circuits
Assignee: United States Department of the Navy
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Filing: 1984-01-20
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Granted: 1986-12-09
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Expires: 2004-01-20
Abstract
Abstract Passivation of a hybrid microelectronic device is achieved by plasma polyization of hexamethyldisilazane on the device surface. A moisture impermeable thin film layer is deposited which protects the moisture sensitive components from corrosion. The layer is readily removable, however, in order to effect repairs to the device when necessary.
Inventors
- 👤 Bonnie L. Rathbun
- 👤 Philipp W. H. Schuessler
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 16:58
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/6903; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/6336; H05; H05K; H05K3/00; H05K3/22; H05K3/28; H05K3/284
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
87 words
A process for passivating a microelectronic device comprising the steps of: drawing a vacuum of 10 to 20 microns on a reaction chamber; introducing hexamethyldisilazane (HMDS) monomer into said reaction chamber; subjecting the monomer to electromagnetic energy at a frequency of 13.56 Mhz to form a plasma thereof within the chamber; exposing the device to said plasma for depositing a polymerized thin film layer of the HMDS on the device; and continuing said deposition until the layer of a desired thickness has been deposited on the device.
Claim 2
Dependent Claim
87 words
A process for passivating a microelectronic device comprising the steps of: drawing a vacuum of 10 to 20 microns on a reaction chamber; introducing hexamethyldisilazane (HMDS) monomer into said reaction chamber; subjecting the monomer to electromagnetic energy at a frequency of 13.56 Mhz to form a plasma thereof within the chamber; exposing the device to said plasma for depositing a polymerized thin film layer of the HMDS on the device; and continuing said deposition until the layer of a desired thickness has been deposited on the device.
Claim 3
Dependent Claim
27 words
A passivated electronic component which is easily repaired comprising, in combination: a microelectronic device; and a coating of polymerized hexamethyldisilazane (HMDS) over the surface of said device.
Claim 4
Dependent Claim
27 words
A passivated electronic component which is easily repaired comprising, in combination: a microelectronic device; and a coating of polymerized hexamethyldisilazane (HMDS) over the surface of said device.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-12-08 | 1990-06-09 | 1990-12-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-12-08 | 1994-06-09 | 1994-12-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-12-08 | 1998-06-09 | 1998-12-09 | $7700.00 | Window Closed / Lapsed |