US4626883A
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US
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Textured crystal picosecond photoresponsive element
Assignee: International Business Machines Corp
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Filing: 1985-06-27
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Granted: 1986-12-02
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Expires: 2005-06-27
Abstract
Abstract Picosecond response photoconductors and photoresponsive elements can be provided that retain high carrier mobility and yet have short lifetime by providing on a crystal mismatched substrate a textured layer of domain regions wherein the domain size is such that the lifetime is proportional to the square of the size divided by the diffusion coefficient of the semiconductor material. The crystalline orientation in the domains with respect to the substrate is maintained. An embodiment is an approximately 0.1 micron thick textured layer of <111> GaAs grown on a <0001> hexagonal monocrystalline Al 2 O 3 having domains approximately 1.0 micron with a carrier lifetime about 5 picoseconds and a carrier mobility of about 80 cm 2 volt -1 sec -1 .
Inventors
- 👤 Jeffrey A. Kash
- 👤 Thomas F. Kuech
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 04:43
CPC Classifications
H; H10; H10F; H10F71/00; H10F71/127; H10F30/00; H10F77/00; H10F77/10; H10F77/16; H10F77/162; H10F77/164; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02E10/544; Y10; Y10S; Y10S148/00; Y10S148/15
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
153 words
In a semiconductor element exhibiting the properties of optical sensitivity, high carrier mobility and short lifetime comprising in combination a monocrystalline atomic arrangement substrate member having first and second essentially parallel planar major surfaces, said substrate having a first spacing dimension between atoms in said monocrystalline atomic arrangement, said substrate further having an insulating type conductivity and a layer of an optically sensitive semiconductor material in domain produced textured crystalline relationship with said first surface of said substrate, the atomic arrangement of the atoms of said semiconductor having a second spacing different from said first spacing in said substrate member, said semiconductor material layer maintaining the crystalline orientation of said substrate, said semiconductor layer further having crystalline domains having boundaries perpendicular with said first surface and a crystalline orientation essentially that of said substrate, said domain size being smaller than the diffusion length of the carriers in bulk monocrystalline material of said semiconductor.
Claim 2
Dependent Claim
153 words
In a semiconductor element exhibiting the properties of optical sensitivity, high carrier mobility and short lifetime comprising in combination a monocrystalline atomic arrangement substrate member having first and second essentially parallel planar major surfaces, said substrate having a first spacing dimension between atoms in said monocrystalline atomic arrangement, said substrate further having an insulating type conductivity and a layer of an optically sensitive semiconductor material in domain produced textured crystalline relationship with said first surface of said substrate, the atomic arrangement of the atoms of said semiconductor having a second spacing different from said first spacing in said substrate member, said semiconductor material layer maintaining the crystalline orientation of said substrate, said semiconductor layer further having crystalline domains having boundaries perpendicular with said first surface and a crystalline orientation essentially that of said substrate, said domain size being smaller than the diffusion length of the carriers in bulk monocrystalline material of said semiconductor.
Claim 3
Dependent Claim
104 words
A photoresponsive element comprising in combination a semiconductor element as in claim 1, a first transmission line conductor in ohmic contact with the exposed surface of said textured layer, a second transmission line conductor in ohmic contact with said exposed surface of said textured layer and separated from said first transmission line conductor by a gap, means exposing said exposed surface of said textured layer in said gap to a light signal, means providing a bias on said second transmission line conductor, means providing a reference or ground potential, and means for developing and sensing an output signal on said first transmission line conductor.
Claim 4
Dependent Claim
95 words
A signal sensing element comprising in combination a semiconductor element as in claim 1, a first transmission line conductor in ohmic contact with the exposed surface of said textured layer, a second transmission line conductor in ohmic contact with said exposed surface of said textured layer and separated from said first transmission line conductor by a gap, means impressing and developing an input signal on said first transmission line conductor, means providing a reference or ground potential, and means integrating a charge on said second transmission line conductor in the presence of an input signal.
Claim 5
Dependent Claim
18 words
The element of claim 1 where said substrate is Al 2 O 3 and said semiconductor is GaAs.
Claim 6
Dependent Claim
18 words
The element of claim 4 where said layer is in a range of 0.01 to 2 microns thick.
Claim 7
Dependent Claim
18 words
The element of claim 5 where said domains are in the range of 0.1 micron to 1.0 micron.
Claim 8
Dependent Claim
68 words
In a optical signal conversion semiconductor element comprising in combination a layer of optically sensitive semiconductor material contiguous with and having essentially the crystalline periodicity of a monocrystalline atomically mismatched substrate and having crystal boundaries in the direction essentially orthogonal to the substrate surface defining crystalline domains that are less than the diffusion length of a carrier during the carrier lifetime in monocrystalline bulk material of said semiconductor.
Claim 9
Dependent Claim
68 words
In a optical signal conversion semiconductor element comprising in combination a layer of optically sensitive semiconductor material contiguous with and having essentially the crystalline periodicity of a monocrystalline atomically mismatched substrate and having crystal boundaries in the direction essentially orthogonal to the substrate surface defining crystalline domains that are less than the diffusion length of a carrier during the carrier lifetime in monocrystalline bulk material of said semiconductor.
Claim 10
Dependent Claim
20 words
The element of claim 7 where said semiconductor is GaAs supported by a substrate of Al 2 O 3 .
Claim 11
Dependent Claim
12 words
The element of claim 8 where said layer is 0.1 micron thick.
Claim 12
Dependent Claim
17 words
The element of claim 9 where said substrate is oriented <0001> and said layer is oriented <111>.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-12-01 | 1990-06-02 | 1990-12-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-12-01 | 1994-06-02 | 1994-12-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-12-01 | 1998-06-02 | 1998-12-02 | $7700.00 | Window Closed / Lapsed |