US4626449A
Expired / Lapsed
US
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Method for forming deposition film
Assignee: Canon Inc
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Filing: 1985-10-28
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Granted: 1986-12-02
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Expires: 2005-10-28
Abstract
Abstract A method for forming a deposition film by introducing a starting gas for formation of a deposition film into a reaction chamber housing a substrate therein and forming a deposition film on the substrate by irradiation with light comprises performing deposition by using a monochromatic light and a continuous polychromatic light in combination and projecting the lights on the substrate on which the deposition film is to be formed.
Inventors
- 👤 Yutaka Hirai
- 👤 Hiroshi Echizen
- 👤 Masafumi Sano
- 👤 Hisanori Tsuda
- 👤 Katsuji Takasu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 14:48
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/48; C23C16/482; C23C16/483; H; H10; H10P; H10P14/00; H10P14/20; H10P14/24; H10P14/29; H10P14/2901; H10P14/2922; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411; H10P34/00; H10P34/40; H10P34/42
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
70 words
A method for forming a deposition film by introducing a starting gas for formation of a deposition film into a reaction chamber housing a substrate therein and forming a deposition film on the substrate by irradiation with light, which comprises performing deposition by using a monochromatic light and a continuous polychromatic light in combination and projecting the lights on the substrate on which the deposition film is to be formed.
Claim 2
Independent Claim
70 words
A method for forming a deposition film by introducing a starting gas for formation of a deposition film into a reaction chamber housing a substrate therein and forming a deposition film on the substrate by irradiation with light, which comprises performing deposition by using a monochromatic light and a continuous polychromatic light in combination and projecting the lights on the substrate on which the deposition film is to be formed.
Claim 3
Dependent Claim
13 words
The method according to claim 1, wherein the monochromatic light is laser light.
Claim 4
Dependent Claim
15 words
The method according to claim 2, wherein the laser is krypton fluoride (KrF) excimer laser.
Claim 5
Dependent Claim
15 words
The method according to claim 2, wherein the laser is xenon chloride (XeCl) excimer laser.
Claim 6
Dependent Claim
15 words
The method according to claim 2, wherein the laser is xenon fluride (XeF) excimer laser.
Claim 7
Dependent Claim
17 words
The method according to claim 1, wherein the continuous polychromatic light is light of a xenon lamp.
Claim 8
Dependent Claim
52 words
The method according to claim 2, wherein the laser light is selected and used so that photon energy E p of the laser may be related to the threshold value E th of the activation energy necessary for forming the active species by dissociation of the starting gas as follows: E.sub.p <E.sub.th.
Claim 9
Dependent Claim
28 words
The method according to claim 7, wherein disilane (Si 2 H 6 ) is used as the starting gas and KrF excimer laser is used as the laser.
Claim 10
Dependent Claim
18 words
The method according to claim 6, wherein the xenon lamp is an ellipsoidal mirror built-in type xenon lamp.
Claim 11
Dependent Claim
20 words
The method according to claim 1, wherein the light from the light source is converged and projected on the substrate.
Claim 12
Dependent Claim
19 words
The method according to claim 1, wherein the continuous polychromatic light is the light of a xenon mercury lamp.
Claim 13
Dependent Claim
18 words
The method according to claim 1, wherein the continuous polychromatic light is the light of a deuterium lamp.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-12-01 | 1990-06-02 | 1990-12-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-12-01 | 1994-06-02 | 1994-12-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-12-01 | 1998-06-02 | 1998-12-02 | $7700.00 | Window Closed / Lapsed |