Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
135 words
A ceramic heater having a heating element composed of a sintered body of powdery mixture consisting essentially of: from 20 to 90 mol % of silicon nitride powder including a sintering agent selected from the group consisting of yttrium oxide, magnesium oxide, aluminum oxide, silicon dioxide, aluminium magnesium oxide (MgAl 2 O 4 ) and a mixture thereof, and from 10 to 80 mol % of an electrically conductive ceramic powder selected from the group consisting of titanium carbide, titanium nitride and a mixture thereof and having a particle diameter smaller than said silicon nitride powder including said sintering agent, this electrically conductive ceramic powder existing at grain boundaries of the silicon nitride of said sintered body; and said heater having a resistance controllable within a range of 10 -3 to 10 3 ohm cm.
Claim 2
Dependent Claim
135 words
A ceramic heater having a heating element composed of a sintered body of powdery mixture consisting essentially of: from 20 to 90 mol % of silicon nitride powder including a sintering agent selected from the group consisting of yttrium oxide, magnesium oxide, aluminum oxide, silicon dioxide, aluminium magnesium oxide (MgAl 2 O 4 ) and a mixture thereof, and from 10 to 80 mol % of an electrically conductive ceramic powder selected from the group consisting of titanium carbide, titanium nitride and a mixture thereof and having a particle diameter smaller than said silicon nitride powder including said sintering agent, this electrically conductive ceramic powder existing at grain boundaries of the silicon nitride of said sintered body; and said heater having a resistance controllable within a range of 10 -3 to 10 3 ohm cm.
Claim 3
Dependent Claim
41 words
A ceramic heater according to claim 1, wherein said silicon nitride powder including said sintering agent has a particle diameter of from 10 to 50 microns, and said electrically conductive powder has a particle diameter of from 0.1 to 4 microns.
Claim 4
Dependent Claim
27 words
A ceramic heater according to claim 1, wherein said sintering agent constitutes from 3.5 to 15 mol % per 100 mol % of the entire sintered body.
Claim 5
Independent Claim
197 words
A method of producing a ceramic heater having a heating element composed of a sintered body, said method comprising the steps of: (a) preparing a mixture consisting essentially of (1) from 20 to 90 mol % of silicon nitride powders which are prepared by mixing silicon nitride and a sintering agent selected from the group consisting of yttrium oxide, magnesium oxide, aluminium oxide, silicon dioxide, aluminium magnesium oxide (MgAl 2 O 4 and a mixture thereof and calcining into a solid solution, and (2) from 10 to 80 mol % of an electrically conductive ceramic powder selected from the group consisting of titanium carbide, titanium nitride and a mixture thereof and having a particle diameter smaller than that of said silicon nitride powder in the solid solution, (b) forming the mixture of step (a) into the shape of the desired sintered body; and (c) heating and sintering the shape of step (b) in a non-oxidizing inert or nitrogen atmosphere to produce a sintered body in which the electrically conductive powder exists at the grain boundaries of the silicon nitride, said sintered body having a resistance controllable within a range of 10 -3 to 10 3 ohm cm.
Claim 6
Independent Claim
197 words
A method of producing a ceramic heater having a heating element composed of a sintered body, said method comprising the steps of: (a) preparing a mixture consisting essentially of (1) from 20 to 90 mol % of silicon nitride powders which are prepared by mixing silicon nitride and a sintering agent selected from the group consisting of yttrium oxide, magnesium oxide, aluminium oxide, silicon dioxide, aluminium magnesium oxide (MgAl 2 O 4 and a mixture thereof and calcining into a solid solution, and (2) from 10 to 80 mol % of an electrically conductive ceramic powder selected from the group consisting of titanium carbide, titanium nitride and a mixture thereof and having a particle diameter smaller than that of said silicon nitride powder in the solid solution, (b) forming the mixture of step (a) into the shape of the desired sintered body; and (c) heating and sintering the shape of step (b) in a non-oxidizing inert or nitrogen atmosphere to produce a sintered body in which the electrically conductive powder exists at the grain boundaries of the silicon nitride, said sintered body having a resistance controllable within a range of 10 -3 to 10 3 ohm cm.
Claim 7
Dependent Claim
36 words
A method of producing a ceramic heater according to claim 4, wherein said silicon nitride powder before being calcined into the solid solution in the step (a) has a particle diameter of less than 2 microns.