US4609037A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for heating and cooling articles
Assignee: Tencor Instruments Inc
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Filing: 1985-10-09
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Granted: 1986-09-02
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Expires: 2005-10-09
Abstract
Abstract A first thermally conductive plate holds an article and heats the article with heating elements in the plate. Parallel rails support the first plate above a base. Cooling passageways for coolant flow are in a second thermally conductive plate. The second plate is supported spaced from the base by a shaft in a chamber of the second plate and a spring. During the heating phase, the second plate is spaced apart from the first plate. During the cooling phase, the second plate is urged by the spring into contact with the first plate, so that the second plate acts as a heat sink for the first plate. Vacuum suction and an annular elastomer seal around the top rim of the second plate clamp the first and second plates together in thermal communication. Vacuum suction in the chamber retracts the second plate from the first plate.
Inventors
- 👤 William R. Wheeler
- 👤 Steven R. Lee
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 17:55
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/78
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
140 words
Apparatus for heating and cooling an article comprising, a first thermally conductive plate having opposed first and second major thermally conductive surfaces, the first surface having first clamping means for securely holding an article in tight contact therewith, the first plate having heating means disposed in thermal communication with said first surface for heating said first surface, a second thermally conductive plate having a major thermally conductive surface, the second plate having cooling means disposed in thermal communication with said major surface for removing heat from said first plate, the second plate mounted in at least partially spaced relation from the first plate, and second clamping means for removable urging the major thermally conductive surface of the second plate to contact the thermally conductive second surface of the first plate thereby establishing thermal communication between the first and second plates.
Claim 2
Dependent Claim
140 words
Apparatus for heating and cooling an article comprising, a first thermally conductive plate having opposed first and second major thermally conductive surfaces, the first surface having first clamping means for securely holding an article in tight contact therewith, the first plate having heating means disposed in thermal communication with said first surface for heating said first surface, a second thermally conductive plate having a major thermally conductive surface, the second plate having cooling means disposed in thermal communication with said major surface for removing heat from said first plate, the second plate mounted in at least partially spaced relation from the first plate, and second clamping means for removable urging the major thermally conductive surface of the second plate to contact the thermally conductive second surface of the first plate thereby establishing thermal communication between the first and second plates.
Claim 3
Dependent Claim
27 words
The apparatus of claim 1 further comprising a base supporting one of said first and second conductive plates, the other of said plates spaced from the one.
Claim 4
Dependent Claim
37 words
The apparatus of claim 2 wherein parallel posts extend outwardly from the base, the outward ends of said posts supporting one of said plates, the other of said plates having minor regions connected to the one plate.
Claim 5
Dependent Claim
34 words
The apparatus of claim 2 further comprising a shaft extending outward from said base, the shaft supporting the other of said plates spaced above said base and movable into contact with the one plate.
Claim 6
Dependent Claim
16 words
The apparatus of claim 1 wherein said first and second clamping means comprise negative pressure zones.
Claim 7
Dependent Claim
15 words
The apparatus of claim 5 wherein said second clamping means comprises an elastomer annular seal.
Claim 8
Dependent Claim
213 words
Apparatus for heating and cooling an article comprising, a thermally conductive plate having opposed upper and lower major thermally conductive surfaces, the upper surface having a groove therein in communication with vacuum suction means for securely holding an article in tight contact with the upper surface, the plate having heating means disposed in thermal communication with said upper surface for heating said upper surface, a thermally conductive block having a major thermally conductive surface, the block having heat removal means disposed in thermal communication with said major surface for cooling said first plate, a base, parallel rails extending outwardly form the base, the outward ends of said rails supporting the thermally conductive plate, a spring urging and supporting the block spaced above said base in thermal contact with said plate, a shaft extending outwardly from the base into an axial tubular chamber of said thermally conductive block, said block in at least partially spaced relation from the plate, said chamber in communication with vacuum means for forcing said second plate to retract from contact with said plate, and second clamping means for removable securing the major thermally conductive surface of the block in contact with the lower major thermally conductive surface of the plate thereby establishing thermal communication between the plate and block.
Claim 9
Dependent Claim
213 words
Apparatus for heating and cooling an article comprising, a thermally conductive plate having opposed upper and lower major thermally conductive surfaces, the upper surface having a groove therein in communication with vacuum suction means for securely holding an article in tight contact with the upper surface, the plate having heating means disposed in thermal communication with said upper surface for heating said upper surface, a thermally conductive block having a major thermally conductive surface, the block having heat removal means disposed in thermal communication with said major surface for cooling said first plate, a base, parallel rails extending outwardly form the base, the outward ends of said rails supporting the thermally conductive plate, a spring urging and supporting the block spaced above said base in thermal contact with said plate, a shaft extending outwardly from the base into an axial tubular chamber of said thermally conductive block, said block in at least partially spaced relation from the plate, said chamber in communication with vacuum means for forcing said second plate to retract from contact with said plate, and second clamping means for removable securing the major thermally conductive surface of the block in contact with the lower major thermally conductive surface of the plate thereby establishing thermal communication between the plate and block.
Claim 10
Dependent Claim
65 words
The apparatus of claim 7 wherein said second clamping means comprises an elastomer annular seal disposed around an upper rim of said block, a portion of said seal projecting above said major surface of said block, and vacuum suction means communicating with said major surface of the block for securely holding said major surface and said lower surface of the plate in thermally conductive relation.
References Cited (Backward Citations)
US4097226A
Cited
US4527620A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-09-01 | 1990-03-03 | 1990-09-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-09-01 | 1994-03-03 | 1994-09-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-09-01 | 1998-03-03 | 1998-09-02 | $7700.00 | Window Closed / Lapsed |