US4097226A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Furnace for practising temperature gradient zone melting
Assignee: General Electric Co
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Filing: 1976-10-26
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Granted: 1978-06-27
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Expires: 1996-10-26
Abstract
Abstract A furnace for practising temperature gradient zone melting on one or more semiconductor bodies comprises a closable work chamber for receiving semiconductor bodies for processing, a radiant heat source which forms a first closure member and a heat sink which forms a second closure member, the closure members defining the work chamber and being mutually separable by, for example, a hydraulic actuator to allow access to the interior of the work chamber. A reflector is disposed between the heat source and heat sink in surrounding relationship to the semiconductor bodies being processed to ensure the maintenance of a uniform temperature gradient within the work chamber. The reflector and the heat sink are liquid cooled for the effective removal of heat therefrom. The heat sink is further provided with a plurality of radiation attenuating cavities to enhance the performance of the heat sink.
Inventors
- 👤 Carl A. Erikson
- 👤 John O. Fielding
- 👤 Harvey E. Cline
- 👤 Thomas R. Anthony
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 09:29
CPC Classifications
C; C30; C30B; C30B13/00; C30B13/16; C30B13/22; C30B13/24
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
176 words
An apparatus for the simultaneous processing of one or more bodies of semiconductor material by temperature gradient zone melting, said apparatus comprising: a closable work chamber for receiving said semiconductor bodies for processing; a radiative heat source facing internally of said work chamber, said heat source comprising a first closure member for said work chamber; a heat sink provided with a multiplicity of closely packed radiation attenuating cavities disposed in a major surface thereof facing internally of said work chamber and located opposite to, and facing, said heat source whereby when radiation is emitted from said heat source to said cavities the radiation is repeatedly reflected within the interiors of said cavities to the extent of substantially complete attenuation, said heat sink comprising a second closure member for said work chamber; said closure members defining at least in part said work chamber and at least one of said closure members being movable to allow access to the interior of said work chamber, and means disposed in said work chamber for supporting said bodies of semiconductor material.
Claim 2
Independent Claim
176 words
An apparatus for the simultaneous processing of one or more bodies of semiconductor material by temperature gradient zone melting, said apparatus comprising: a closable work chamber for receiving said semiconductor bodies for processing; a radiative heat source facing internally of said work chamber, said heat source comprising a first closure member for said work chamber; a heat sink provided with a multiplicity of closely packed radiation attenuating cavities disposed in a major surface thereof facing internally of said work chamber and located opposite to, and facing, said heat source whereby when radiation is emitted from said heat source to said cavities the radiation is repeatedly reflected within the interiors of said cavities to the extent of substantially complete attenuation, said heat sink comprising a second closure member for said work chamber; said closure members defining at least in part said work chamber and at least one of said closure members being movable to allow access to the interior of said work chamber, and means disposed in said work chamber for supporting said bodies of semiconductor material.
Claim 3
Dependent Claim
44 words
The apparatus of claim 1 and further including an actuation means, said actuation means being operatively connected to said first and second closure members and providing relative movement between said first and second closure members to effect opening and closing of said work chamber.
Claim 4
Dependent Claim
35 words
The apparatus of claim 2 wherein said first closure member is stationary and said second closure member is moveable by said first actuation means into and out of closing engagement with said first closure member.
Claim 5
Dependent Claim
35 words
The apparatus of claim 2 wherein said second closure member is stationary and said first closure member is moveable by said first actuation means into and out of closing engagement with said second closure member.
Claim 6
Dependent Claim
13 words
The apparatus of claim 2 wherein said actuation means comprises an hydraulic actuator.
Claim 7
Dependent Claim
13 words
The apparatus of claim 2 wherein said actuation means comprises a pneumatic actuator.
Claim 8
Dependent Claim
13 words
The apparatus of claim 2 wherein said actuation means comprises a hydro-pneumatic actuator.
Claim 9
Dependent Claim
20 words
The apparatus of claim 1 wherein said radiative heat source emits radiation of a temperature as high as 3000° C.
Claim 10
Dependent Claim
17 words
The apparatus of claim 1 wherein said radiative heat source comprises a plurality of infrared emitting lamps.
Claim 11
Dependent Claim
16 words
The apparatus of claim 1 wherein said heat sink comprises a fluid cooled substantially flat plate.
Claim 12
Dependent Claim
19 words
The apparatus of claim 10 wherein said heat sink is provided with a coolant passage in the interior thereof.
Claim 13
Dependent Claim
14 words
The apparatus of claim 11 wherein said coolant passage is of a serpentine configuration.
Claim 14
Dependent Claim
27 words
The apparatus of claim 10 and further including a radiation absorbing coating disposed on selected portions of a surface of said heat sink facing said heat source.
Claim 15
Dependent Claim
10 words
The apparatus of claim 13 wherein said coating comprises carbon.
Claim 16
Dependent Claim
31 words
The apparatus of claim 1 wherein said radiation attenuating cavities are cylindrical in shape, the depth of said cavities being at least three times greater than the diameter of said cavities.
Claim 17
Dependent Claim
25 words
The apparatus of claim 1 wherein said heat sink comprises a substantially flat plate having a serpentine arrangement of coolant passages in the interior thereof.
Claim 18
Dependent Claim
20 words
The apparatus of claim 1 wherein said semiconductor body supporting means are receivable within any of said radiation attenuating cavities.
Claim 19
Dependent Claim
54 words
The apparatus of claim 1 and further including a reflector disposed between said heat source and said heat sink in surrounding relationship to said one or more bodies of semiconductor material, said reflector having a reflective surface serving to direct heat from said heat source toward said one or more bodies of semiconductor material.
Claim 20
Dependent Claim
21 words
The apparatus of claim 18 wherein said reflector is formed from a refractory material and said reflective surface is of gold.
Claim 21
Dependent Claim
11 words
The apparatus of claim 19 wherein said refractory material is quartz.
Claim 22
Dependent Claim
13 words
The apparatus of claim 18 wherein said reflective surface is of polished metal.
Claim 23
Dependent Claim
13 words
The apparatus of claim 21 wherein said reflective surface is of polished aluminum.
Claim 24
Dependent Claim
40 words
The apparatus of claim 18 wherein said reflective surface generally faces said heat source and is disposed at an angle of between 5° and 24° from a normal to a major surface of said heat sink facing said heat source.
Claim 25
Dependent Claim
12 words
The apparatus of claim 22 wherein said angle is of approximately 15°.
Claim 26
Dependent Claim
18 words
The apparatus of claim 17 wherein said reflector is provided with a coolant passage in the interior thereof.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1981-06-26 | 1981-12-26 | 1982-06-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1985-06-26 | 1985-12-26 | 1986-06-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1989-06-26 | 1989-12-26 | 1990-06-27 | $7700.00 | Window Closed / Lapsed |