Patent US4603082A successfully refreshed from Google Patents.
US4603082A
Expired / Lapsed
US
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Diamond-like film
Assignee: Intersil Corp
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Filing: 1985-04-29
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Granted: 1986-07-29
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Expires: 2005-04-29
Abstract
Abstract The optical transmission of an amorphous, carbonaceous film having diamond-like properties is enhanced by the ion implantation thereof with carbon ions. The film preferably is between about 30 and 110 nanometers in thickness and is implanted with a dosage of between about 1012 and 1014 carbon ions per square centimeter.
Inventors
- 👤 Joseph Zelez
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 18:06
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/26; C03; C03C; C03C23/00; C03C23/0005; C03C23/0055; C23C14/00; C23C14/22; C23C14/48; Y; Y10; Y10T; Y10T428/00; Y10T428/26; Y10T428/263; Y10T428/264; Y10T428/265; Y10T428/30
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
26 words
A process for enhancing the optical transmission of an amorphous, carbonaceous film having diamond-like properties, said process consisting of ion implanting said film with carbon ions.
Claim 2
Dependent Claim
26 words
A process for enhancing the optical transmission of an amorphous, carbonaceous film having diamond-like properties, said process consisting of ion implanting said film with carbon ions.
Claim 3
Dependent Claim
33 words
A process in accordance with claim 1, wherein said film has a hydrogen content of not more than about one atomic percent, and a stress below about 10 10 dynes per square centimeter.
Claim 4
Dependent Claim
19 words
A process in accordance with claim 1, wherein the film is between about 57 and 220 nanometers in thickness.
Claim 5
Dependent Claim
19 words
A process in accordance with claim 3, wherein the film is between about 110 and 115 nanometers in thickness.
Claim 6
Dependent Claim
27 words
A process in accordance with claim 1, wherein the film is implanted with an areal dosage of between about 10 12 and 10 14 per square centimeter.
Claim 7
Dependent Claim
36 words
An article of manufacture comprising a transparent substrate having deposited thereon an amorphous carbonaceous film having diamond-like properties, said film being ion implanted with between about 5×10 12 and 1×10 13 carbon ions per square centimeter.
Claim 8
Dependent Claim
36 words
An article of manufacture comprising a transparent substrate having deposited thereon an amorphous carbonaceous film having diamond-like properties, said film being ion implanted with between about 5×10 12 and 1×10 13 carbon ions per square centimeter.
Claim 9
Dependent Claim
35 words
An article of manufacture in accordance with claim 6, wherein said film has a hydrogen content of not more than about one atomic percent and a stress below about 10 10 dynes per square centimeter.
Claim 10
Dependent Claim
21 words
An article of manufacture in accordance with claim 6, wherein said film is between about 57 and 220 nanometers in thickness.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-07-28 | 1990-01-27 | 1990-07-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-07-28 | 1994-01-27 | 1994-07-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-07-28 | 1998-01-27 | 1998-07-29 | $7700.00 | Window Closed / Lapsed |