Abstract This invention relates generally to ohmic contacts to substrates made of III-V compounds and to a process for fabricating such contacts. More specifically, the invention is directed to a contact to gallium arsenide having a given level of n-type dopant therein, a region of the substrate doped with germanium and a layer of a germanide of a refractory metal selected from the group consisting of molybdenum, tungsten and tantalum disposed on the substrate. Still more specifically, the invention relates to an ohmic contact to gallium arsenide which includes an interface region of germanium heavily doped with arsenic disposed between the region doped with germanium and the layer of germanide. The contact is formed by evaporating germanium and a refractory metal selected from the group consisting of molybdenum, tungsten and tantalum on the surface of an n-type gallium arsenide substrate and sintering the substrate in a reducing atmosphere for a time and at a temperature sufficient to form the first-to-form germanide of the refractory metal. The resulting contact is stable, has a very low contact resistance and may be subjected to later high temperature processing steps without affecting its characteristics.
A semiconductor device comprising: a substrate of a Group III-V compound having a given uniform concentration of n-type dopant therein, a region of said substrate doped with germanium, a layer of a germanide of refractory metal molybdenum disposed over said substrate, and, a interface region of germanium heavily doped with Group V element of said Group III-V compound disposed between said region and said layer of germanide, said interface region having a thickness of 100 Angstroms or less, said device having a contact resistance of 10 -6 ohm cm 2 .
Claim 2
Dependent Claim
91 words
A semiconductor device comprising: a substrate of a Group III-V compound having a given uniform concentration of n-type dopant therein, a region of said substrate doped with germanium, a layer of a germanide of refractory metal molybdenum disposed over said substrate, and, a interface region of germanium heavily doped with Group V element of said Group III-V compound disposed between said region and said layer of germanide, said interface region having a thickness of 100 Angstroms or less, said device having a contact resistance of 10 -6 ohm cm 2 .
Claim 3
Dependent Claim
20 words
A semiconductor device according to claim 1 wherein said III-V compound is gallium arsenide and said n-type dopant is silicon.
Claim 4
Dependent Claim
14 words
A semiconductor device according to claim 1 wherein said Group V element is arsenic.
Claim 5
Dependent Claim
26 words
A semiconductor device according to claim 1 wherein said n-type dopant is present in said substrate in a concentration of about 1×10 17 cm -3 .
Claim 6
Dependent Claim
17 words
A semiconductor device according to claim 1 wherein said interface region of germanium is 50-100 Å thick.
Claim 7
Dependent Claim
27 words
A semiconductor device according to claim 4 wherein arsenic is present in said interface region of germanium in a concentration of about 5×10 19 cm -3 .