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US4584056A
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Method of manufacturing a device with micro-shutters and application of such a method to obtain a light modulating device
Assignee: Centre Electronique Horloger SA
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Filing: 1984-11-13
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Granted: 1986-04-22
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Expires: 2004-11-13
Abstract
Abstract A method for manufacturing a device with micro-shutters, e.g., a light modulating device, includes the following steps: producing a first grid presenting cells; providing a plane support by depositing a layer of organic material on the grid filling the cells; producing a second grid on the layer of organic material; depositing a fine metallic layer on the second grid; cutting shutters and shutter attachments in the fine metallic layer; and removing the organic material layer in the cells to free the shutters.
Inventors
- 👤 Andre Perret
- 👤 Raymond Vuilleumier
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 15:17
CPC Classifications
G; G09; G09F; G09F9/00; G09F9/30; G09F9/37; G09F9/372
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
158 words
A method of manufacturing a micro-shutter device comprising: producing a first rigid and thin grid presenting at least one cell; depositing, on said first grid, a layer of organic material blocking up said at least one cell so as to produce a plane support; producing, on said layer of organic material, a second, rigidifying grid having a thickness substantially less than that of said first grid; depositing, on said second grid and on any parts of said layer of organic material not covered by said second grid, a fine metallic layer with a thickness substantially less than that of said second grid; cutting, in said fine metallic layer, at least one shutter and shutter attachments interconnecting said at least one shutter with said second grid; and etching said layer of organic material from said at least one cell of said first grid so as to free said at least one shutter to be rotatable about said shutter attachments.
Claim 2
Independent Claim
158 words
A method of manufacturing a micro-shutter device comprising: producing a first rigid and thin grid presenting at least one cell; depositing, on said first grid, a layer of organic material blocking up said at least one cell so as to produce a plane support; producing, on said layer of organic material, a second, rigidifying grid having a thickness substantially less than that of said first grid; depositing, on said second grid and on any parts of said layer of organic material not covered by said second grid, a fine metallic layer with a thickness substantially less than that of said second grid; cutting, in said fine metallic layer, at least one shutter and shutter attachments interconnecting said at least one shutter with said second grid; and etching said layer of organic material from said at least one cell of said first grid so as to free said at least one shutter to be rotatable about said shutter attachments.
Claim 3
Dependent Claim
22 words
A method according to claim 1, wherein said second grid surrounds locations corresponding to active regions of said at least one shutter.
Claim 4
Dependent Claim
32 words
A method according to claim 1, wherein a surface of said layer of organic material is treated such that said at least one shutter and said second grid present a diffusing surface.
Claim 5
Dependent Claim
38 words
A method according to claim 1, wherein said surface of said layer of organic material is treated except at locations corresponding to said shutter attachments and regions surrounding said at least one shutter to present a diffusing surface.
Claim 6
Dependent Claim
21 words
A method according to claim 3, wherein said surface of the said layer of organic material is treated by photolithographic methods.
Claim 7
Dependent Claim
45 words
A method according to claim 1, further comprising the step, prior to depositing said fine metallic layer, of producing ribs on said layer of organic material at locations corresponding to said at least one shutter, said ribs serving to rigidify said at least one shutter.
Claim 8
Dependent Claim
19 words
A method according to claim 6, wherein said ribs are produced of the same material as said second grid.
Claim 9
Dependent Claim
20 words
A method according to claim 1, wherein said second grid and said fine metallic layer are of the same material.
Claim 10
Dependent Claim
21 words
A method according to claim 1, wherein said layer of organic material comprises a plastic film glued to said first grid.
Claim 11
Dependent Claim
13 words
A method according to claim 9, wherein said plastic film comprises a polyimide.
Claim 12
Dependent Claim
31 words
A method according to claim 1, wherein said layer of organic material comprises a polymerizable material which is pressed onto said first grid and then polymerized to provide a plane support.
Claim 13
Dependent Claim
32 words
A method according to claim 1, wherein said layer of organic material comprises a polymerizable material which is pressed onto said first grid and then polymerized to provide a plane, structured support.
Claim 14
Dependent Claim
12 words
A method according to claim 1, wherein said first grid is metallic.
Claim 15
Dependent Claim
15 words
A method according to claim 13, wherein said first grid is produced by photolithographic methods.
Claim 16
Dependent Claim
12 words
A method according to claim 13, wherein said first grid comprises aluminum.
Claim 17
Dependent Claim
15 words
A method according to claim 1, wherein said second grid is produced by photolithographic methods.
Claim 18
Dependent Claim
12 words
A method according to claim 16, wherein said second grid comprises aluminum.
Claim 19
Dependent Claim
20 words
A method according to claim 1, wherein edges of said second grid are rounded by dipping in an etching bath.
Claim 20
Dependent Claim
19 words
A method according to claim 1, wherein said fine metallic layer is deposited by evaporation of a metallic material.
Claim 21
Dependent Claim
13 words
A method according to claim 19, wherein said fine metallic layer comprises aluminum.
Claim 22
Dependent Claim
20 words
A method according to claim 1, wherein said at least one shutter and shutter attachments are cut by photolithographic methods.
Claim 23
Dependent Claim
19 words
A method according to claim 1, wherein said layer of organic material is etched by a gas phase plasma.
Claim 24
Dependent Claim
18 words
A method according to claim 1, wherein said first grid has a thickness between 100 and 300 μm.
Claim 25
Dependent Claim
18 words
A method according to claim 1, wherein said second grid has a thickness between 0.5 and 2.5 μm.
Claim 26
Dependent Claim
20 words
A method according to claim 1, wherein said fine metallic layer has a thickness of between 20 and 200 nm.
Claim 27
Dependent Claim
16 words
A method according to claim 1, wherein said first grid is fixed on a transparent base.
Claim 28
Dependent Claim
36 words
A method according to claim 1, wherein said first grid is fixed on a base presenting on a side thereof towards said at least one shutter a surface absorbing at least part of any light received.
Claim 29
Dependent Claim
25 words
A method according to claim 27, wherein said base on which said first grid is fixed carries electrodes arranged facing said at least one shutter.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-04-21 | 1989-10-21 | 1990-04-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-04-21 | 1993-10-21 | 1994-04-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-04-21 | 1997-10-21 | 1998-04-22 | $7700.00 | Window Closed / Lapsed |