Method for manufacturing a semiconductor device having vertical and lateral transistors

Claim 1

A method for manufacturing from a silicon substrate a semiconductor device including a vertical transistor having a first semiconductor region of a first conductivity type, a second semiconductor region of a second conductivity type opposite to the first conductivity type formed in the first semiconductor region and a third semiconductor region of the first conductivity type formed in the second semiconductor region, and a lateral transistor having a fourth semiconductor region of the first conductivity type, a fifth semiconductor region of the second conductivity type formed in the fourth semiconductor region and a sixth semiconductor region of the second conductivity type formed in the fourth semiconductor region and spaced from the fifth semiconductor region, the method comprising the steps of: (a) forming, within the silicon substrate and extending from a first surface thereof, the first and fourth semiconductor regions, and isolating the first and fourth semiconductor regions from one another and providing each with an exposed surface at the first surface of the silicon substrate; (b) forming on the first surface of the silicon substrate an anti-oxidation mask having a first mask portion at the desired location of the second semiconductor region and second and third mask portions, each spaced from the first mask portion, the mask leaving exposed the exposed surface of the fourth semiconductor region; (c) simultaneously and selectively forming, with the forming step (b), a thick countersunk first oxide layer on the portions of the first surface of the silicon substrate including the exposed surface of the fourth semiconductor region, where the mask is not formed, by heat oxidizing the first surface of the silicon substrate; (d) removing the first mask portion to form a first opening; (e) selectively removing portions of the first oxide layer formed on the surface of the fourth semiconductor region at the desired location of the fifth and sixth semiconductor regions, thereby forming second and third openings partially exposing the surface of the fourth semiconductor region; (f) forming the second, fifth and sixth semiconductor regions by introducing an impurity of the second conductivity type through the first, second and third openings; and (g) forming the third semiconductor region by introducing an impurity of the first conductivity type into the second semiconductor region.

Claim 2

A method for manufacturing from a silicon substrate a semiconductor device including a vertical transistor having a first semiconductor region of a first conductivity type, a second semiconductor region of a second conductivity type opposite to the first conductivity type formed in the first semiconductor region and a third semiconductor region of the first conductivity type formed in the second semiconductor region, and a lateral transistor having a fourth semiconductor region of the first conductivity type, a fifth semiconductor region of the second conductivity type formed in the fourth semiconductor region and a sixth semiconductor region of the second conductivity type formed in the fourth semiconductor region and spaced from the fifth semiconductor region, the method comprising the steps of: (a) forming, within the silicon substrate and extending from a first surface thereof, the first and fourth semiconductor regions, and isolating the first and fourth semiconductor regions from one another and providing each with an exposed surface at the first surface of the silicon substrate; (b) forming on the first surface of the silicon substrate an anti-oxidation mask having a first mask portion at the desired location of the second semiconductor region and second and third mask portions, each spaced from the first mask portion, the mask leaving exposed the exposed surface of the fourth semiconductor region; (c) simultaneously and selectively forming, with the forming step (b), a thick countersunk first oxide layer on the portions of the first surface of the silicon substrate including the exposed surface of the fourth semiconductor region, where the mask is not formed, by heat oxidizing the first surface of the silicon substrate; (d) removing the first mask portion to form a first opening; (e) selectively removing portions of the first oxide layer formed on the surface of the fourth semiconductor region at the desired location of the fifth and sixth semiconductor regions, thereby forming second and third openings partially exposing the surface of the fourth semiconductor region; (f) forming the second, fifth and sixth semiconductor regions by introducing an impurity of the second conductivity type through the first, second and third openings; and (g) forming the third semiconductor region by introducing an impurity of the first conductivity type into the second semiconductor region.