US4561773A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Projection exposure apparatus
Assignee: Canon Inc
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Filing: 1985-03-13
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Granted: 1985-12-31
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Expires: 2005-03-13
Abstract
Abstract In an apparatus wherein a first object having an information pattern and a second object for recording the information pattern thereon are aligned through a projection optical system and thereafter exposure is effected through the projection optical system, particularly, an apparatus wherein the position of the second object is changed and a plurality of exposures are effected, light for alignment and light for exposure differ in wavelength from each other and the relative positional relation among the first object, the second object and the projection optical system is made to differ during alignment and during exposure.
Inventors
- 👤 Hiroshi Sato
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 02:24
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7003; G03F9/7023; G03F9/7026; G03F9/7049; G03F9/7053; G03F9/7057
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
93 words
A projection exposure apparatus having: a projection optical system for projecting an image of a first object onto a second object, said projection optical system forming different imaging positions by an alignment light and an exposure light; a laser light source emitting the alignment light; a light source for exposure emitting the exposure light different in wavelength from the alignment light; and means for changing the relative positional relation among said first object, said second object and said projection optical system when light is changed from the alignment light to the exposure light.
Claim 2
Dependent Claim
93 words
A projection exposure apparatus having: a projection optical system for projecting an image of a first object onto a second object, said projection optical system forming different imaging positions by an alignment light and an exposure light; a laser light source emitting the alignment light; a light source for exposure emitting the exposure light different in wavelength from the alignment light; and means for changing the relative positional relation among said first object, said second object and said projection optical system when light is changed from the alignment light to the exposure light.
Claim 3
Dependent Claim
24 words
A projection exposure apparatus according to claim 1, wherein said projection optical system is aberration-corrected for at least two exposure lights of different wavelengths.
Claim 4
Dependent Claim
29 words
A projection exposure apparatus according to claim 1, wherein said laser light source is an He-Cd laser light source and said light source for exposure is a mercury lamp.
Claim 5
Dependent Claim
24 words
A projection exposure apparatus according to claim 1, wherein said means for changing the relative positional relation serves also as means for effecting focusing.
Claim 6
Dependent Claim
33 words
A projection exposure apparatus according to claim 4, wherein said means for changing the relative positional relation is a piezo element for displacing said second object in the direction of the optic axis.
Claim 7
Dependent Claim
36 words
A projection exposure apparatus according to claim 4, wherein said means for changing the relative positional relation is reciprocally moved in the direction of the optic axis during a plurality of exposures onto said second object.
Claim 8
Dependent Claim
130 words
A projection exposure apparatus comprising: optical means which is aberration-corrected for light of a first wavelength and of a second wavelength; transferring means for transferring an image of a first body onto a second body through said optical means with at least one of said light of the first wavelength and light of the second wavelength; alignment means for effecting alignment between said first and second bodies through said optical means with light of a third wavelength which differs from the first wavelength and the second wavelength; and adjusting means for adjusting the position of said second body along the direction of the optical axis of said optical means to mutually different positions between the times of the image transfer by said transferring means and alignment by said alignment means.
Claim 9
Dependent Claim
130 words
A projection exposure apparatus comprising: optical means which is aberration-corrected for light of a first wavelength and of a second wavelength; transferring means for transferring an image of a first body onto a second body through said optical means with at least one of said light of the first wavelength and light of the second wavelength; alignment means for effecting alignment between said first and second bodies through said optical means with light of a third wavelength which differs from the first wavelength and the second wavelength; and adjusting means for adjusting the position of said second body along the direction of the optical axis of said optical means to mutually different positions between the times of the image transfer by said transferring means and alignment by said alignment means.
Claim 10
Dependent Claim
50 words
A projection exposure apparatus according to claim 7, wherein said adjusting means adjusts the position of said second body on the basis of an amount of deviation between in-focus positions of said optical means at the times of image transfer by said transferring means and alignment by said alignment means.
Claim 11
Dependent Claim
24 words
A projection exposure apparatus according to claim 8, wherein said alignment means includes a laser light source emitting laser light of the third wavelength.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-12-30 | 1989-07-01 | 1989-12-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-12-30 | 1993-07-01 | 1993-12-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-12-30 | 1997-07-01 | 1997-12-31 | $7700.00 | Window Closed / Lapsed |