US3542469A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Photographic production of semiconductor microstructures
Assignee: Telefunken Electronic GmbH
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Filing: 1968-06-13
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Granted: 1970-11-24
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Expires: 1988-06-13
Abstract
No abstract record available.
Inventors
- 👤 Klaus Hennings
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 15:57
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; H; H10; H10P; H10P95/00
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1973-11-23 | 1974-05-25 | 1974-11-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1977-11-23 | 1978-05-25 | 1978-11-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1981-11-23 | 1982-05-25 | 1982-11-24 | $7700.00 | Window Closed / Lapsed |