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US4554727A Expired / Lapsed US ⏱️ 0.0 years remaining

Method for making optically enhanced thin film photovoltaic device using lithography defined random surfaces

Assignee: ExxonMobil Technology and Engineering Co
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Filing: 1984-05-22
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Granted: 1985-11-26
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Expires: 2004-05-22
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Abstract

Abstract The present invention is a method for producing an optically enhanced thin film photovoltaic device. The method includes the steps of producing an active layer of semiconductor material wherein the surface of at least one side of the active layer is textured such that the surface includes randomly spaced, densely packed microstructures of predetermined dimensions of the order of the wavelength of visible light in the semiconductor material and attaching a reflecting surface directly to one side of the semiconductor material and making an ohmic contact to the material.

Inventors

  • 👤 Harry W. Deckman
  • 👤 Horst Witzke
  • 👤 Christopher Wronski
  • 👤 Eli Yablonovitch

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-25 06:46
CPC Classifications
F; F24; F24S; F24S70/00; F24S70/20; F24S70/225; F24S70/25; H; H10; H10F; H10F10/00; H10F10/10; H10F10/17; H10F77/00; H10F77/40; H10F77/42; H10F77/48; H10F77/70; H10F77/703; H10P; H10P14/00; H10P14/60; H10P14/68; H10P14/683; Y; Y02; Y02E; Y02E10/00; Y02E10/40; Y02E10/50; Y02E10/52; Y02E10/548

Claims Analysis

Total Claims: 17
Claim 1
Independent Claim 188 words
A method for producing an optically enhanced thin film photovoltaic semiconductor device having electrical contacts to carry current from said device comprising: a. producing an active layer of semiconductor material wherein the surface of at least one side of said active layer is textured such that said surface includes randomly spaced, densely packed microstructures of predetermined dimensions of the order of the wavelength of visible light in said semiconductor material, said microstructure being microcolumnar posts having a predetermined profile such that said texture of said active layer results in optically enhancement by incoherent scattering with a randomization fraction, β, greater than 0.75; b. forming a reflecting surface directly to either side of said semiconductor material and making an ohmic contact to said material such that the parasitic optical absorption in said electrical contacts and said reflecting surface are less than 1/n 2 , where n is the semiconductor index of refraction, such that the enhancement factor, E, for optical absorption within the active layer of the semiconductor material and the quantum efficiency of collection of photogenerated carriers in increased by a factor greater than 1.5 n 2 .
Claim 2
Independent Claim 188 words
A method for producing an optically enhanced thin film photovoltaic semiconductor device having electrical contacts to carry current from said device comprising: a. producing an active layer of semiconductor material wherein the surface of at least one side of said active layer is textured such that said surface includes randomly spaced, densely packed microstructures of predetermined dimensions of the order of the wavelength of visible light in said semiconductor material, said microstructure being microcolumnar posts having a predetermined profile such that said texture of said active layer results in optically enhancement by incoherent scattering with a randomization fraction, β, greater than 0.75; b. forming a reflecting surface directly to either side of said semiconductor material and making an ohmic contact to said material such that the parasitic optical absorption in said electrical contacts and said reflecting surface are less than 1/n 2 , where n is the semiconductor index of refraction, such that the enhancement factor, E, for optical absorption within the active layer of the semiconductor material and the quantum efficiency of collection of photogenerated carriers in increased by a factor greater than 1.5 n 2 .
Claim 3
Dependent Claim 24 words
The method of claim 1 wherein said optical absorption increase is within 90% of the full measure of light trapping allowed by statistical mechanics.
Claim 4
Dependent Claim 14 words
The method of claim 1 wherein said active layer has a thickness≦carrier collection width.
Claim 5
Dependent Claim 89 words
The method of claim 1 for producing an optically enhanced thin film photovoltaic device wherein said step of producing an active layer of semiconductor material comprises: a. producing a textured surface on a transparent conductor, wherein said textured surface includes randomly spaced, densely packed microstructures of predetermined dimensions of the order of the wavelength of visible light in said semiconductor material; and b. forming said active layer of semiconductor material on said transparent conductor forming an ohmic contact, said material conforming to the shape of said textured transparent conductor.
Claim 6
Dependent Claim 39 words
The method of claim 4 for producing an optically enhanced thin film photovoltaic device wherein said step for producing a textured surface comprises: a. depositing a transparent conductor on a flat light transparent substrate; b. texturing said transparent conductor.
Claim 7
Dependent Claim 22 words
The method of claim 5 for producing an optically enhanced thin film photovoltaic device wherein said semiconductor material is amorphous silicon hydride.
Claim 8
Dependent Claim 23 words
The method of claim 6 for producing an optically enhanced thin film photovoltaic device wherein said photovoltaic device is a PIN solar cell.
Claim 9
Dependent Claim 47 words
The method of claim 4 for producing an optically enhanced thin film photovoltaic device comprising: a. texturing one side of transparent substrate; b. attaching a transparent conductor on said textured surface of said light transparent substrate, said transparent conductor conforming to the shape of said textured surface.
Claim 10
Dependent Claim 23 words
The method of claim 1 for producing an optically enhanced thin film photovoltaic device wherein said texturing step is performed by lithographic techniques.
Claim 11
Dependent Claim 35 words
The method of claim 9 for producing an optically enhanced thin film photovoltaic device wherein said lithographic technique includes a lithographic mask composed of colloidal particles with sizes ranging from 2,000 A to 10,000 A.
Claim 12
Independent Claim 227 words
A method for producing an optically enhanced thin film photovoltaic semiconductor device comprising: a. producing a textured surface on a substrate, wherein said textured surface includes randomly spaced, densely packed microstructures of predetermined dimensions of the order of the wavelength of visible light in the semiconductor material of said device, said microstructures being microcolumnar posts having a predetermined profile, such that said texture of said active layer results in optical enhancement by incoherent scattering; b. forming a reflecting surface on said substrate, said reflecting surface conforming to the shape of said textured substrate such that the parasitic optical absorption in said diffusion barrier is less than 5/n 2 , where n is the semiconductor index of refraction c. forming a conducting transparent diffusion barrier to said reflecting surface, said diffusion barrier conforming to the shape of said reflecting surface; d. depositing semiconductor material on said diffusion barrier forming an ohmic contact, such that the parasitic optical absorption in said contact is less than 5/n 2 , where n is the semiconductor index of refraction, said semiconductor material conforming to the shape of said diffusion barrier, and; e. attaching a transparent ohmic contact to said semiconductor material on the side away from said substrate such that the parasitic optical absorption in said diffusion barrier is less than 5/n 2 , where n is the semiconductor index of refraction.
Claim 13
Independent Claim 227 words
A method for producing an optically enhanced thin film photovoltaic semiconductor device comprising: a. producing a textured surface on a substrate, wherein said textured surface includes randomly spaced, densely packed microstructures of predetermined dimensions of the order of the wavelength of visible light in the semiconductor material of said device, said microstructures being microcolumnar posts having a predetermined profile, such that said texture of said active layer results in optical enhancement by incoherent scattering; b. forming a reflecting surface on said substrate, said reflecting surface conforming to the shape of said textured substrate such that the parasitic optical absorption in said diffusion barrier is less than 5/n 2 , where n is the semiconductor index of refraction c. forming a conducting transparent diffusion barrier to said reflecting surface, said diffusion barrier conforming to the shape of said reflecting surface; d. depositing semiconductor material on said diffusion barrier forming an ohmic contact, such that the parasitic optical absorption in said contact is less than 5/n 2 , where n is the semiconductor index of refraction, said semiconductor material conforming to the shape of said diffusion barrier, and; e. attaching a transparent ohmic contact to said semiconductor material on the side away from said substrate such that the parasitic optical absorption in said diffusion barrier is less than 5/n 2 , where n is the semiconductor index of refraction.
Claim 14
Dependent Claim 23 words
The method of claim 11 for producing an optically exhanced thin film photovoltaic device wherein said texturing step is performed by lithographic techniques.
Claim 15
Dependent Claim 26 words
The method of claim 12 for producing an optically enhanced thin film photovoltaic device wherein said lithographic technique includes a lithographic mask comprised of colloidal particles.
Claim 16
Dependent Claim 21 words
The method of claim 11 for producing an optically enhanced thin film photovoltaic device wherein said semiconductor material is amorphous silicon.
Claim 17
Dependent Claim 23 words
The method of claim 11 for producing an optically enhanced thin film photovoltaic device wherein said photovoltaic device is a PIN solar cell.

References Cited (Backward Citations)

US4229233A Cited
JPS55108780A Cited
US4328390A Cited
US4284689A Cited
DE3023165A1 Cited
JPS5749278A Cited
US4344996A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1988-11-25 1989-05-27 1989-11-26 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1992-11-25 1993-05-27 1993-11-26 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1996-11-25 1997-05-27 1997-11-26 $7700.00 Window Closed / Lapsed

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