Patent US4544622A successfully refreshed from Google Patents.
US4544622A
Expired / Lapsed
US
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Negative-acting photoresist imaging system
Assignee: 3M Co
•
Filing: 1984-07-19
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Granted: 1985-10-01
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Expires: 2004-07-19
Abstract
Abstract A negative-acting photoresist imaging system is provided having a substrate, a metal layer, a latently sensitized, crosslinkable, negative-acting photoresist base layer, and a negative-acting photoresist layer. The system may further have an organic protective coat between the metal layer and the base layer, a matte top layer, and/or an antistatic layer on the back side of the substrate.
Inventors
- 👤 William L. Kausch
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 15:01
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/095; G03F7/0955; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/114; Y10S430/117; Y10S430/127; Y10S430/151
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
140 words
A negative-acting photoresist imaging system comprising: (a) a substrate; (b) a metal layer adhered to said substrate; (c) a latently sensitized crosslinkable, negative-acting photoresist base layer adhered to said metallic layer, said base layer comprising: (i) a polyfunctional acrylate monomer; (ii) an organic, polymeric, polyfunctional film-forming binder with more than one acryloyl group pendant therefrom; (iii) a polyfunctional, thermally activated, acid group crosslinking agent; (iv) an acid group-bearing polymeric binder; and (v) a non-active, photosensitive free-radical generator; and (d) a negative-acting photoresist layer adhered to said base layer, said photoresist layer comprising: (i) a polyfunctional acrylate monomer; (ii) an organic, polymeric, polyfunctional film-forming binder with more than one acryloyl group pendant therefrom; (iii) a polyfunctional, thermally activated, acid group crosslinking agent; (iv) an acid group-bearing polymeric binder; (v) a non-active, photosensitive free-radical generator; and (vi) an active, photosensitive free-radical generator.
Claim 2
Dependent Claim
140 words
A negative-acting photoresist imaging system comprising: (a) a substrate; (b) a metal layer adhered to said substrate; (c) a latently sensitized crosslinkable, negative-acting photoresist base layer adhered to said metallic layer, said base layer comprising: (i) a polyfunctional acrylate monomer; (ii) an organic, polymeric, polyfunctional film-forming binder with more than one acryloyl group pendant therefrom; (iii) a polyfunctional, thermally activated, acid group crosslinking agent; (iv) an acid group-bearing polymeric binder; and (v) a non-active, photosensitive free-radical generator; and (d) a negative-acting photoresist layer adhered to said base layer, said photoresist layer comprising: (i) a polyfunctional acrylate monomer; (ii) an organic, polymeric, polyfunctional film-forming binder with more than one acryloyl group pendant therefrom; (iii) a polyfunctional, thermally activated, acid group crosslinking agent; (iv) an acid group-bearing polymeric binder; (v) a non-active, photosensitive free-radical generator; and (vi) an active, photosensitive free-radical generator.
Claim 3
Dependent Claim
24 words
An imaging system as claimed in claim 1, wherein said substrate is transparent to actinic radiation in the range of 330 to 450 nm.
Claim 4
Dependent Claim
26 words
An imaging system as claimed in claim 1, wherein said substrate comprises a synthetic polymeric resin film having a thickness of 25 microns to 250 microns.
Claim 5
Dependent Claim
14 words
An imaging system as claimed in claim 1, wherein said substrate is polyethylene terephthalate.
Claim 6
Dependent Claim
14 words
An imaging system as claimed in claim 1, wherein said metal layer is aluminum.
Claim 7
Dependent Claim
19 words
An imaging system as claimed in claim 1, where said metal layer thickness is between 600 and 1500 A.
Claim 8
Dependent Claim
26 words
An imaging system as claimed in claim 1, wherein said polyfunctional acrylate monomer comprises 10-60 weight percent of each of the base layer and photoresist layer.
Claim 9
Dependent Claim
28 words
An imaging system as claimed in claim 1, wherein said film-forming binder comprises between 10 and 60 weight percent of each of the base layer and photoresist layer.
Claim 10
Dependent Claim
30 words
An imaging system as claimed in claim 1, wherein said acid group crosslinking agent comprises between 0.05 and 2.5 weight percent of each of the base layer and photoresist layer.
Claim 11
Dependent Claim
30 words
An imaging system as claim in claim 1, wherein said acid group bearing polymeric binder comprises 10 to 60 weight percent of each of the base layer and photoresist layer.
Claim 12
Dependent Claim
30 words
An imaging system as claimed in claim 1, wherein said non-active, photosensitive free-radical generator comprises between 1 and 10 weight percent of each of the base layer and photoresist layer.
Claim 13
Dependent Claim
25 words
An imaging system as claimed in claim 1, wherein said active, photosensitive free-radical generator comprises between 1 and 10 weight percent of the photoresist layer.
Claim 14
Dependent Claim
34 words
An imaging system as claimed in claim 1, wherein said photoresist layer further comprises an effective amount of a spectral sensitizer for said non-active free-radical generator in said base layer and said photoresist layer.
Claim 15
Dependent Claim
36 words
An imaging system as claimed in claim 13, wherein a spectral sensitizer is present in an amount equal to 0.1 to 2.0 molar parts per mole of said non-active, photosensitive, free-radical generator in said photoresist layer.
Claim 16
Dependent Claim
64 words
An imaging system as claimed in claim 1 wherein, in each of said base layer and said photoresist layer, said polyfunctional acrylate monomer has 2 to 8 groups selected from the group consisting of acryloyl and methacryloyl, said film-forming binder has a molecular weight between 1,000 and 100,000, and said acid group bearing organic polymeric binder has a molecular weight between 1,000 and 100,000.
Claim 17
Dependent Claim
21 words
An imaging system as claimed in claim 15 wherein said acid group bearing organic polymeric binder has pendant carboxylic acid groups.
Claim 18
Dependent Claim
34 words
An imaging system as claimed in claim 16 wherein said pendant carboxylic acid groups on said acid group bearing organic polymeric binder provide an acid equivalent weight of 1,000 or less to said binder.
Claim 19
Dependent Claim
29 words
An imaging system as claimed in claim 1, wherein said acid group bearing organic polymeric binders comprise a copolymer of a carboxylic acid anhydride and an ethylenically unsaturated comonomer.
Claim 20
Dependent Claim
28 words
An imaging system as claimed in claim 1, wherein said acid group crosslinking agents are selected from the group consisting of aziridines, epoxy resins, and mixed aziridine-epoxy compounds.
Claim 21
Dependent Claim
17 words
An imaging system as claimed in claim 1 wherein said reactive, photosensitive free-radical generators comprise an s-triazine.
Claim 22
Dependent Claim
22 words
An imaging system as claimed in claim 1, further comprising an organic protective layer between said metal layer and said base layer.
Claim 23
Dependent Claim
18 words
An imaging system as claimed in claim 1, further comprising a matte top coat over said photoresist layer.
Claim 24
Dependent Claim
21 words
An imaging system as claimed in claim 1, further comprising an antistatic layer on said substrate surface opposite said metal layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-09-30 | 1989-04-01 | 1989-10-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-09-30 | 1993-04-01 | 1993-10-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-09-30 | 1997-04-01 | 1997-10-01 | $7700.00 | Window Closed / Lapsed |