US4476215A
Expired / Lapsed
US
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Negative-acting photoresist composition
Assignee: 3M Co
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Filing: 1983-11-25
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Granted: 1984-10-09
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Expires: 2003-11-25
Abstract
Abstract Negative-acting photoresist compositions are used in a variety of reproductive and imaging systems. Significant problems with these compositions are their inability to cure to a tough, solvent resistant state, tackiness in the uncured compositions, and the tendency of the uncured compositions to flow under force. The present composition combines six ingredients to form a photoresist composition which overcomes many of these problems in the prior art.
Inventors
- 👤 William L. Kausch
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 16:11
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/027; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/106; Y10S430/111
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
56 words
A negative-acting photosensitive resist composition comprising: (a) at least one polyfunctional acrylate monomer, (b) an organic, polymeric, film-forming binder with more than one pendant acryloyl group pendant therefrom, (c) a polyfunctional, thermally activated, acid group crosslinking agent, (d) an active, photosensitive free-radical generator, (e) a non-active, photosensitive free-radical generator, and (f) an acid group-bearing polymeric binder.
Claim 2
Dependent Claim
56 words
A negative-acting photosensitive resist composition comprising: (a) at least one polyfunctional acrylate monomer, (b) an organic, polymeric, film-forming binder with more than one pendant acryloyl group pendant therefrom, (c) a polyfunctional, thermally activated, acid group crosslinking agent, (d) an active, photosensitive free-radical generator, (e) a non-active, photosensitive free-radical generator, and (f) an acid group-bearing polymeric binder.
Claim 3
Dependent Claim
20 words
The composition of claim 1 wherein said at least one polyfunctional acrylate monomer comprises 10-50 weight percent of the composition.
Claim 4
Dependent Claim
19 words
The composition of claim 1 wherein said film-forming binder comprises between 10 and 60 weight percent of the composition.
Claim 5
Dependent Claim
21 words
The composition of claim 1 wherein said acid group crosslinking agent comprises between 0.05 and 2.5 weight percent of the composition.
Claim 6
Dependent Claim
44 words
The composition of claim 1 wherein said active, photosensitive free-radical generator and said non-active, photosensitive free-radical generator individually comprises between 1 and 10 weight percent of the composition, and an effective amount of a spectral sensitizer for said non-active free-radical generator is also present.
Claim 7
Dependent Claim
21 words
The composition of claim 1 wherein said acid group bearing polymeric binder comprises 10 to 60 weight percent of said composition.
Claim 8
Dependent Claim
119 words
The composition of claim 1 wherein said at least one polyfunctional acrylate monomer comprises 10 to 50 weight percent of said composition, and film forming binder comprises 10 to 60 weight percent of said composition, said acid group crosslinking agent comprises 0.05 to 2.5 weight percent of said composition, said active, photosensitive free-radical generator comprises 1 to 10 weight percent of said composition, said non-active, photosensitive free-radical generator comprises 1 to 10 weight percent of said composition, and said acid group bearing organic polymeric binder comrpises 10 to 60 percent of said composition, said composition further comprising a spectral sensitizer present in an amount equal to 0.1 to 2 molar parts per mole of said non-active, photosensitive, free-radical generator.
Claim 9
Dependent Claim
54 words
The composition of claim 7 wherein said at least one polyfunctional acrylate monomer has 2 to 8 groups selected form the group consisting of acryloyl and methacryloyl, said film-forming binder has a molecular weight between 1,000 and 100,000, and said acid group bearing organic polymeric binder has a molecular weight between 1,000 and 100,000.
Claim 10
Dependent Claim
18 words
The composition of claim 8 wherein said acid group bearing organic polymeric binder has pendant carboxylic acid groups.
Claim 11
Dependent Claim
31 words
The composition of claim 9 wherein said pendant carboxylic acid groups on said acid group bearing organic polymeric binder provide an acid equivalent weight of 1,000 or less to said binder.
Claim 12
Dependent Claim
25 words
The composition of claim 7 wherein said acid group crosslinking agent is selected from the group consisting of aziridines, epoxy resins, and mixed aziridine-epoxy compounds.
Claim 13
Dependent Claim
25 words
The composition of claim 8 wherein said acid group crosslinking agent is selected from the group consisting of aziridines, epoxy resins, and mixed aziridine-epoxy compounds.
Claim 14
Dependent Claim
25 words
The composition of claim 9 wherein said acid group crosslinking agent is selected from the group consisting of aziridines, epoxy resins, and mixed aziridine-epoxy compounds.
Claim 15
Dependent Claim
25 words
The composition of claim 10 wherein said acid group crosslinking agent is selected from the group consisting of aziridines, epoxy resins, and mixed aziridine-epoxy compounds.
Claim 16
Dependent Claim
26 words
The composition of claim 8 wherein said acid group bearing organic polymeric binder comprises a copolymer of a carboxylic acid anhydride and an ethylenically unsaturated comonomer.
Claim 17
Dependent Claim
26 words
The composition of claim 11 wherein said acid group bearing organic polymeric binder comprises a copolymer of a carboxylic acid anhydride and an ethylenically unsaturated comonomer.
Claim 18
Dependent Claim
26 words
The composition of claim 10 wherein said acid group bearing organic polymeric binder comprises a copolymer of a carboxylic acid anhydride and an ethylenically unsaturated comonomer.
Claim 19
Dependent Claim
26 words
The composition of claim 11 wherein said acid group bearing organic polymeric binder comprises a copolymer of a carboxylic acid anhydride and an ethylenically unsaturated comonomer.
Claim 20
Dependent Claim
14 words
The composition of claim 11 wherein said active, photosensitive free-radical generator comprises an s-triazine.
Claim 21
Dependent Claim
14 words
The composition of claim 18 wherein said reactive, photosensitive free-radical generator comprises an s-triazine.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-10-09 | 1988-04-09 | 1988-10-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-10-09 | 1992-04-09 | 1992-10-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-10-09 | 1996-04-09 | 1996-10-09 | $7700.00 | Window Closed / Lapsed |