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US4544444A
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Reactive ion etching of tin oxide films using silicon tetrachloride reactant gas
Assignee: Motors Liquidation Co
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Filing: 1984-08-15
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Granted: 1985-10-01
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Expires: 2004-08-15
Abstract
Abstract High resolution patterns can be etched in tin oxide films in one step using reactive ion etching when the reactant gas consists essentially of silicon tetrachloride (SiCl 4 ).
Inventors
- 👤 Shih-Chia Chang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 18:01
CPC Classifications
C; C04; C04B; C04B41/00; C04B41/009; C04B41/53; C04B41/5338; C04B41/5346; C04B41/80; C04B41/91; H; H10; H10F; H10F71/00; H10F71/138; Y; Y02; Y02E; Y02E10/00; Y02E10/50
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
46 words
In a method of reactive ion etching, the improvement wherein tin oxide is reactive ion etched using a reactant gas consisting essentially of silicon tetrachloride, whereby the tin oxide is highly uniformly etched and without producing a residue that must be removed in a following step.
Claim 2
Dependent Claim
46 words
In a method of reactive ion etching, the improvement wherein tin oxide is reactive ion etched using a reactant gas consisting essentially of silicon tetrachloride, whereby the tin oxide is highly uniformly etched and without producing a residue that must be removed in a following step.
Claim 3
Dependent Claim
34 words
A one-step process for the etching of high resolution patterns in tin oxide films comprising the step of reactively ion etching a tin oxide film with a reactant gas consisting essentially of silicon tetrachloride.
Claim 4
Dependent Claim
34 words
A one-step process for the etching of high resolution patterns in tin oxide films comprising the step of reactively ion etching a tin oxide film with a reactant gas consisting essentially of silicon tetrachloride.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-09-30 | 1989-04-01 | 1989-10-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-09-30 | 1993-04-01 | 1993-10-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-09-30 | 1997-04-01 | 1997-10-01 | $7700.00 | Window Closed / Lapsed |