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US4542090A Expired / Lapsed US ⏱️ 0.0 years remaining

Electron beam sensitive resist

Assignee: ISP Investments LLC
•
Filing: 1984-04-05
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Granted: 1985-09-17
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Expires: 2004-04-05
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Abstract

Abstract This invention describes an improved ionizing radiation sensitive material having high contrast, high sensitivity and comprised of a metal complex of a mixed half-ester or half amide product of the reaction of an N-hydroxy or N-aminoalkyl amide and a hydroxy alkyl terminally unsaturated compound with an alkylvinyl ether-maleic anhydride copolymer. A typical material is made by reacting a metal salt with the mixed half-ester or half-amide product of the reaction of an N-hydroxy or N-amino alkyl amide and a hydroxy alkyl terminally unsaturated compound with an alkyl vinyl ether-maleic anhydride copolymer.

Inventors

  • 👤 David F. Lewis

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 07:33
CPC Classifications
C; C08; C08F; C08F8/00; C08F8/44; G; G03; G03F; G03F7/00; G03F7/004; G03F7/038

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 120 words
A method of recording information on a coated substrate comprising the steps of laying down a substrate, coating the substrate with a copolymer of a metal complex wherein the metal is selected from a group consisting of lead, rhodium, calcium or thallium, wherein the lead, calcium or thallium complex is a salt formed by an excess metal ion and carboxy ion and the rhodium complex is a metal ion and an olefin group in a one to one relationship of the mixed half-ester reaction product of an alkyl vinyl ether maleic anhydride copolymer with a terminally unsaturated alcohol and an N-hydroxyalkyl amide, allowing the copolymer to dry on the substrate, and scanning the coated substrate with a beam of electrons.
Claim 2
Independent Claim 120 words
A method of recording information on a coated substrate comprising the steps of laying down a substrate, coating the substrate with a copolymer of a metal complex wherein the metal is selected from a group consisting of lead, rhodium, calcium or thallium, wherein the lead, calcium or thallium complex is a salt formed by an excess metal ion and carboxy ion and the rhodium complex is a metal ion and an olefin group in a one to one relationship of the mixed half-ester reaction product of an alkyl vinyl ether maleic anhydride copolymer with a terminally unsaturated alcohol and an N-hydroxyalkyl amide, allowing the copolymer to dry on the substrate, and scanning the coated substrate with a beam of electrons.
Claim 3
Independent Claim 120 words
A method of recording information on a coated substrate comprising the steps of laying down a substrate, coating the substrate with a copolymer of a metal complex wherein the metal is selected from a group consisting of lead, rhodium, calcium or thallium, wherein the lead, calcium or thallium complex is a salt formed by an excess metal ion and carboxy ion and the rhodium complex is a metal ion and an olefin group in a one to one relationship of the mixed half-ester reaction product of an alkyl vinyl ether maleic anhydride copolymer with a terminally unsaturated alcohol and an N-aminoalkyl amide, allowing the copolymer to dry on the substrate, and scanning the coated substrate with a beam of electrons.
Claim 4
Independent Claim 120 words
A method of recording information on a coated substrate comprising the steps of laying down a substrate, coating the substrate with a copolymer of a metal complex wherein the metal is selected from a group consisting of lead, rhodium, calcium or thallium, wherein the lead, calcium or thallium complex is a salt formed by an excess metal ion and carboxy ion and the rhodium complex is a metal ion and an olefin group in a one to one relationship of the mixed half-ester reaction product of an alkyl vinyl ether maleic anhydride copolymer with a terminally unsaturated alcohol and an N-aminoalkyl amide, allowing the copolymer to dry on the substrate, and scanning the coated substrate with a beam of electrons.
Claim 5
Dependent Claim 11 words
The method of claim 1 wherein the amide is hydroxyalkyl pyrrolidone.
Claim 6
Dependent Claim 11 words
The method of claim 2 wherein the amide is aminoalkyl pyrrolidone.
Claim 7
Dependent Claim 12 words
The method of claim 1 wherein the unsaturated alcohol is hydroxyethyl acrylate.
Claim 8
Dependent Claim 12 words
The method of claim 2 wherein the unsaturated alcohol is hydroxymethyl acrylate.

References Cited (Backward Citations)

US3703402A Cited
US4375398A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1988-09-16 1989-03-18 1989-09-17 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1992-09-16 1993-03-18 1993-09-17 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1996-09-16 1997-03-18 1997-09-17 $7700.00 Window Closed / Lapsed

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