Patent US4540885A successfully refreshed from Google Patents.
US4540885A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Spectrometer objective having parallel objective fields and spectrometer fields for the potential measuring technique
Assignee: Siemens AG
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Filing: 1983-07-14
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Granted: 1985-09-10
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Expires: 2003-07-14
Abstract
Abstract An apparatus for the potential measuring technique has an objective lens for focusing primary electrons onto an object, and also has a spectrometer for the energy selection of secondary electrons to provide an improvement of the quantitative potential measurement on printed conductors of integrated microelectronic components with improved local resolution, higher probe current, and improved potential resolution. The objective lens is a magnetic lens in which the lens field lies largely outside the lens body, and the spectrometer is an electrostatic retarding field spectrometer arranged in the magnetic field of the lens.
Inventors
- 👤 Erich Plies
- 👤 Reinhard Weyl
- 👤 Burkhard Lischke
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 08:33
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/04; H01J37/10; H01J37/05; H01J37/26; H01J37/266; H01J49/00; H01J49/44; H01J49/46; H01J49/48; H01J49/488
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
110 words
A potential measuring technique apparatus, comprising: an objective lens means for focusing primary electrons on an object; spectrometer secondary electron detection means for energy selection of secondary electrons; said objective lens means comprising a magnetic lens in which a magnetic field thereof lies primarily outside a body of the lens means; the spectrometer detection means comprising an electrostatic retarding field spectrometer detection means arranged in the magnetic field of the lens means; and the magnetic lens and spectrometer detection means being designed such that the magnetic field and an electric field of the spectrometer detection means run substantially in a same direction and with field lines parallel to one another.
Claim 2
Dependent Claim
110 words
A potential measuring technique apparatus, comprising: an objective lens means for focusing primary electrons on an object; spectrometer secondary electron detection means for energy selection of secondary electrons; said objective lens means comprising a magnetic lens in which a magnetic field thereof lies primarily outside a body of the lens means; the spectrometer detection means comprising an electrostatic retarding field spectrometer detection means arranged in the magnetic field of the lens means; and the magnetic lens and spectrometer detection means being designed such that the magnetic field and an electric field of the spectrometer detection means run substantially in a same direction and with field lines parallel to one another.
Claim 3
Dependent Claim
24 words
An apparatus according to claim 1 wherein a source of the primary electrons is arranged on the field side of the magnetic lens means.
Claim 4
Dependent Claim
25 words
An apparatus according to claim 1 wherein a source of the primary electrons is arranged on a ferromagnetic circuit side of the magnetic lens means.
Claim 5
Dependent Claim
19 words
An apparatus according to claim 1 wherein the spectrometer detection means has a grid electrode as a collector electrode.
Claim 6
Dependent Claim
19 words
An apparatus according to claim 1 wherein the spectrometer detection means has a pinhole diaphragm as a collector electrode.
Claim 7
Dependent Claim
22 words
An apparatus according to claim 1 wherein the spectrometer detection means has a scintillator with a light conductor as a detector element.
Claim 8
Dependent Claim
19 words
An apparatus according to claim 1 wherein the spectrometer detection means has a channel plate as a detector element.
Claim 9
Dependent Claim
27 words
A potential measuring technique apparatus, comprising: objective lens means for focusing primary electrons on an object; spectrometer secondary electron detection means for energy selection of secondary electrons;
Claim 10
Dependent Claim
27 words
A potential measuring technique apparatus, comprising: objective lens means for focusing primary electrons on an object; spectrometer secondary electron detection means for energy selection of secondary electrons;
Claim 11
Dependent Claim
80 words
said objective lens means comprising a magnetic lens in which a magnetic field thereof lies primarily outside a body of the lens means; and the spectrometer detection means comprising an electrostatic retarding field field spectrometer detection means arranged in the magnetic field of the lens means such that the magnetic field and an electric field of the spectrometer detection means are substantially parallel with one another so that the electric field is substantially spatially superimposed on the magnetic lens field.
Claim 12
Dependent Claim
80 words
said objective lens means comprising a magnetic lens in which a magnetic field thereof lies primarily outside a body of the lens means; and the spectrometer detection means comprising an electrostatic retarding field field spectrometer detection means arranged in the magnetic field of the lens means such that the magnetic field and an electric field of the spectrometer detection means are substantially parallel with one another so that the electric field is substantially spatially superimposed on the magnetic lens field.
Claim 13
Dependent Claim
36 words
An apparatus according to claim 8 wherein the magnetic lens and spectrometer detection means are designed such that the magnetic field and an electric field of the spectrometer detection means run substantially in a same direction.
Claim 14
Dependent Claim
36 words
An apparatus according to claim 8 wherein the magnetic lens and spectrometer detection means are designed such that the magnetic field and an electric field of the spectrometer detection means run substantially in an opposite direction.
Claim 15
Dependent Claim
110 words
A potential measuring technique apparatus, comprising: an objective lens means for focusing primary electrons on an object; spectrometer secondary electron detection means for energy selection of secondary electrons; said objective lens means comprising a magnetic lens in which a magnetic field thereof lies primarily outside a body of the lens means; the spectrometer detection means comprising an electrostatic retarding field spectrometer detection means arranged in the magnetic field of the lens means; and the magnetic lens and spectrometer detection means being designed such that the magnetic field and an electric field of the spectrometer detection means run substantially in an opposite direction and with field lines parallel to one another.
Claim 16
Dependent Claim
110 words
A potential measuring technique apparatus, comprising: an objective lens means for focusing primary electrons on an object; spectrometer secondary electron detection means for energy selection of secondary electrons; said objective lens means comprising a magnetic lens in which a magnetic field thereof lies primarily outside a body of the lens means; the spectrometer detection means comprising an electrostatic retarding field spectrometer detection means arranged in the magnetic field of the lens means; and the magnetic lens and spectrometer detection means being designed such that the magnetic field and an electric field of the spectrometer detection means run substantially in an opposite direction and with field lines parallel to one another.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-09-09 | 1989-03-11 | 1989-09-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-09-09 | 1993-03-11 | 1993-09-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-09-09 | 1997-03-11 | 1997-09-10 | $7700.00 | Window Closed / Lapsed |