Patent US4539934A successfully refreshed from Google Patents.
US4539934A
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Plasma vapor deposition film forming apparatus
Assignee: Canon Inc
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Filing: 1984-09-06
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Granted: 1985-09-10
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Expires: 2004-09-06
Abstract
Abstract In a vapor deposition film forming apparatus having a plurality of reactors each having a substrate and an electrode oppositely arranged in a vacuum chamber and means for applying a voltage thereacross to react or decompose reaction gas introduced into the vacuum chamber, the reactors are arranged on the circumference of a circle and exhaust pipes having substantially equal exhaust resistance radially extend to the reactors from a common exhaust pipe located at the center of the circle.
Inventors
- 👤 Yasutomo Fujiyama
- 👤 Shotaro Okabe
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 15:26
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C23C16/505; C23C16/4412; H; H01; H01J; H01J37/00; H01J37/02; H01J37/18
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
81 words
A vapor deposition film forming apparatus having a plurality of reactors each having a substrate and an electrode oppositely arranged in a vacuum chamber and means for applying a voltage thereacross to react or decompose reaction gas introduced into said vacuum chamber, wherein center axes of said reactors are arranged on the circumference of a circle and exhaust pipes having substantially equal exhaust resistance radially extend to said reactors from a common exhaust pipe located at the center of said circle.
Claim 2
Dependent Claim
81 words
A vapor deposition film forming apparatus having a plurality of reactors each having a substrate and an electrode oppositely arranged in a vacuum chamber and means for applying a voltage thereacross to react or decompose reaction gas introduced into said vacuum chamber, wherein center axes of said reactors are arranged on the circumference of a circle and exhaust pipes having substantially equal exhaust resistance radially extend to said reactors from a common exhaust pipe located at the center of said circle.
References Cited (Backward Citations)
US4226208A
Cited
US4369730A
Cited
DE3217708A1
Cited
GB2114160A
Cited
US4466380A
Cited
US4482419A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-09-09 | 1989-03-11 | 1989-09-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-09-09 | 1993-03-11 | 1993-09-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-09-09 | 1997-03-11 | 1997-09-10 | $7700.00 | Window Closed / Lapsed |