Patent US4518667A successfully refreshed from Google Patents.
US4518667A
Expired / Lapsed
US
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Automatic repetitive registration and image wise exposure of sheet substrates
Assignee: EIDP Inc
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Filing: 1982-06-11
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Granted: 1985-05-21
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Expires: 2002-06-11
Abstract
Abstract Method and apparatus for registering and imagewise exposing to actinic radiation a sequence of similar sheet substrates. A liquid layer separates the photosensitive layer and each photomask during the exposure step.
Inventors
- 👤 Robert B. Heiart
- 👤 Abraham B. Cohen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 18:44
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/20; G03F7/22; H; H05; H05K; H05K3/00; H05K3/0073; H05K3/0082
Claims Analysis
Total Claims: 34
Claim 1
Independent Claim
254 words
A process of registering and imagewise exposing to actinic radiation a sequence of similar sheet substrates, each substrate containing a photosensitive layer comprising the steps of: (1) advancing a substrate to a position in a device to undertake in either order or concurrently (a) aligning the substrate and a photomask in a predetermined relationship to one another through a hinged relationship of the photomask and the substrate to permit substantially identical alignment of the photomask and each similar sheet substrate of the sequence; (b) applying a liquid between the photosensitive layer and the photomask; (2) contacting through the liquid the substrate containing the photosensitive layer and the photomask wherein liquid between the photosensitive layer and the photomask is displaced when the substrate and photomask are brought into more intimate contact by an advancing pressure line whereby during said contacting substantially no movement of the photosensitive layer relative to the photomask occurs other than a more intimate contact due to displacement of the liquid in a liquid layer and whereby at least one of a set of interfacial or viscous forces due to the liquid layer aids in holding the photosensitive layer and photomask in a fixed position relative to one another; (3) exposing the photosensitive layer to actinic radiation through the photomask; (4) removing the photomask from the exposed photosensitive layer; (5) removing the substrate whereby steps 1 to 5 can be repeated; and (6) repeating steps 1 to 5 for each of said similar sheet substrates whereby substantially identical imaged substrates are obtained.
Claim 2
Dependent Claim
254 words
A process of registering and imagewise exposing to actinic radiation a sequence of similar sheet substrates, each substrate containing a photosensitive layer comprising the steps of: (1) advancing a substrate to a position in a device to undertake in either order or concurrently (a) aligning the substrate and a photomask in a predetermined relationship to one another through a hinged relationship of the photomask and the substrate to permit substantially identical alignment of the photomask and each similar sheet substrate of the sequence; (b) applying a liquid between the photosensitive layer and the photomask; (2) contacting through the liquid the substrate containing the photosensitive layer and the photomask wherein liquid between the photosensitive layer and the photomask is displaced when the substrate and photomask are brought into more intimate contact by an advancing pressure line whereby during said contacting substantially no movement of the photosensitive layer relative to the photomask occurs other than a more intimate contact due to displacement of the liquid in a liquid layer and whereby at least one of a set of interfacial or viscous forces due to the liquid layer aids in holding the photosensitive layer and photomask in a fixed position relative to one another; (3) exposing the photosensitive layer to actinic radiation through the photomask; (4) removing the photomask from the exposed photosensitive layer; (5) removing the substrate whereby steps 1 to 5 can be repeated; and (6) repeating steps 1 to 5 for each of said similar sheet substrates whereby substantially identical imaged substrates are obtained.
Claim 3
Dependent Claim
31 words
The process of claim 1 whereby liquid between the photosensitive layer and the photomask is displaced when the substrate and photomask are brought into more intimate contact by an advancing nip.
Claim 4
Dependent Claim
23 words
The process of claim 1 wherein the application of liquid is carried out with the substrate surface held in a substantially vertical plane.
Claim 5
Dependent Claim
21 words
The process of claim 1 wherein steps 1 to 5 are with the substrate surface held in a substantially horizontal plane.
Claim 6
Dependent Claim
32 words
The process of claim 1 wherein the sheet substrate contains a photosensitive layer on opposite sides thereof and steps 1 to 5 are with the substrate held in a substantially vertical plane.
Claim 7
Dependent Claim
33 words
The process of claim 2 wherein steps 1 to 5 are with the substrate in an upright position and the substrate and photomask are brought into more intimate contact by an advancing nip.
Claim 8
Dependent Claim
17 words
The process of claim 5 wherein both sides of the sheet substrate are exposed to actinic radiation.
Claim 9
Dependent Claim
11 words
The process of claim 1 wherein the photosensitive layer is smooth.
Claim 10
Dependent Claim
17 words
The process of claim 1 wherein the photosensitive layer overlays an irregular relief pattern in the substrate.
Claim 11
Dependent Claim
12 words
The process of claim 1 wherein the photosensitive layer is positive working.
Claim 12
Dependent Claim
12 words
The process of claim 1 wherein the photosensitive layer is negative working.
Claim 13
Dependent Claim
12 words
The process of claim 1 wherein the photosensitive layer contains photohardenable component.
Claim 14
Dependent Claim
15 words
The process of claim 1 wherein the photosensitive layer contains a photohardenable addition polymerizable component.
Claim 15
Dependent Claim
13 words
The process of claim 14 wherein the photohardenable component is photocrosslinkable or photodimerizable.
Claim 16
Dependent Claim
10 words
The process of claim 1 wherein the photomask is flexible.
Claim 17
Dependent Claim
19 words
The process of claim 1 without a support or cover sheet present between the photosensitive layer and the photomask.
Claim 18
Dependent Claim
27 words
The process of claim 1 wherein the photosensitive layer is separated from the liquid layer by a support or cover sheet which allows actinic radiation to pass.
Claim 19
Dependent Claim
10 words
The process of claim 1 wherein the liquid comprises water.
Claim 20
Dependent Claim
18 words
The process of claim 1 wherein excess liquid is applied to cause flushing of the photomask or substrate.
Claim 21
Dependent Claim
18 words
The process of claim 1 wherein excess liquid is applied to cause flushing of the photomask and substrate.
Claim 22
Dependent Claim
15 words
The process of claim 1 wherein liquid is applied to both sides of the photomask.
Claim 23
Dependent Claim
12 words
The process of claim 1 wherein the photomask contains a release coating.
Claim 24
Dependent Claim
22 words
The process of claim 1 wherein the substrate along at least a portion of one edge makes registration contact with a carrier.
Claim 25
Dependent Claim
20 words
The process of claim 1 wherein at least two contact points on the substrate makes registration contact with a carrier.
Claim 26
Dependent Claim
33 words
The process of claim 1 wherein step (2) registration contact is made by precise alignment of details contained on the substrate containing the photosensitive layer or substrate carrier with details on the photomask.
Claim 27
Dependent Claim
62 words
The process of claim 1 wherein in step (1) (b) an excess of liquid is provided compared to the amount used to separate the substrate containing the photosensitive layer and the photomask in the subsequent operation of step (2) and whereby in step (2) a cleaning action is achieved on both the photosensitive layer and photomask by the use of excess liquid.
Claim 28
Dependent Claim
64 words
The process of claim 26 wherein in step (1) (b) an excess of liquid is provided compared to the amount used to separate the substrate containing the photosensitive layer and the photomask in the subsequent operation of step (2) and whereby in step (2) a cleaning action is achieved on both the photosensitive layer and photomask by the use of an excess of liquid.
Claim 29
Independent Claim
253 words
A method of registration and imagewise exposing to actinic radiation a sheet substrate with the opposite surfaces containing photosensitive layers comprising the steps of: (1) advancing a substrate in an upright position in a device to undertake in either order of concurrently (a) aligning the substrate with a photomask comprising two flexible sheet portions through a hinged relationship of the photomask and the substrate whereby each of sheet portions faces an opposite surface of the substrate; (b) applying liquid on both sides of the substrate between the photosensitive layers and the flexible sheet portions of the photomask; (2) contacting through the liquid the surface of each of the two photosensitive layers and the flexible sheet portions of the photomask whereby during said contacting substantially no relative movement of the photosensitive layers to the photomask occurs other than a more intimate contact due to displacement of the liquid in a liquid layer from two interfaces whereby liquid is displaced by a nip moving relative to the substrate when the substrate and flexible sheet portions are brought into more intimate contact and whereby at least one of a set of interfacial or viscous forces from the liquid aids to hold the photosensitive layers and flexible sheet portions in a fixed position relative to one another; (3) either sequentially or simultaneously exposing both photosensitive layers to actinic radiation through the flexible sheet portion; (4) removing the flexible sheet portions from the exposed photosensitive layers; (5) removing the substrate whereby steps 1 to 5 can be repeated.
Claim 30
Independent Claim
253 words
A method of registration and imagewise exposing to actinic radiation a sheet substrate with the opposite surfaces containing photosensitive layers comprising the steps of: (1) advancing a substrate in an upright position in a device to undertake in either order of concurrently (a) aligning the substrate with a photomask comprising two flexible sheet portions through a hinged relationship of the photomask and the substrate whereby each of sheet portions faces an opposite surface of the substrate; (b) applying liquid on both sides of the substrate between the photosensitive layers and the flexible sheet portions of the photomask; (2) contacting through the liquid the surface of each of the two photosensitive layers and the flexible sheet portions of the photomask whereby during said contacting substantially no relative movement of the photosensitive layers to the photomask occurs other than a more intimate contact due to displacement of the liquid in a liquid layer from two interfaces whereby liquid is displaced by a nip moving relative to the substrate when the substrate and flexible sheet portions are brought into more intimate contact and whereby at least one of a set of interfacial or viscous forces from the liquid aids to hold the photosensitive layers and flexible sheet portions in a fixed position relative to one another; (3) either sequentially or simultaneously exposing both photosensitive layers to actinic radiation through the flexible sheet portion; (4) removing the flexible sheet portions from the exposed photosensitive layers; (5) removing the substrate whereby steps 1 to 5 can be repeated.
Claim 31
Dependent Claim
19 words
The process of claim 28 wherein steps 1 to 5 are repeated for a sequence of similar sheet substrates.
Claim 32
Dependent Claim
204 words
A process of contacting and imagewise exposing to actinic radiation a sequence of similar sheet substrates, each substrate containing a photosensitive layer comprising the steps of: (1) forming a liquid layer between the substrate and photomask with the substrate and photomask in a hinged relationship to one another; (2) contacting the photomask to the substrate whereby during said contacting substantially no movement of the photosensitive layer relative to the photomask occurs on the liquid layer other than a more intimate contact due to displacement of liquid from the liquid layer due to application of an advancing pressure line with additional liquid applied between the photomask and substrate in advance of the pressure line during said contacting of the photomask and substrate, and whereby at least one of interfacial or viscous force due to the liquid layer aids to maintain the photosensitive layer and photomask in a fixed relationship; (3) exposing the photosensitive layer to actinic radiation through the photomask; (4) removing the photomask from the exposed photosensitive layer or a support sheet thereon; (5) removing the substrate whereby steps 1 to 5 can be repeated; and (6) repeating steps 1 to 5 of said similar sheet substrates whereby substantially identical imaged substrates are obtained.
Claim 33
Dependent Claim
204 words
A process of contacting and imagewise exposing to actinic radiation a sequence of similar sheet substrates, each substrate containing a photosensitive layer comprising the steps of: (1) forming a liquid layer between the substrate and photomask with the substrate and photomask in a hinged relationship to one another; (2) contacting the photomask to the substrate whereby during said contacting substantially no movement of the photosensitive layer relative to the photomask occurs on the liquid layer other than a more intimate contact due to displacement of liquid from the liquid layer due to application of an advancing pressure line with additional liquid applied between the photomask and substrate in advance of the pressure line during said contacting of the photomask and substrate, and whereby at least one of interfacial or viscous force due to the liquid layer aids to maintain the photosensitive layer and photomask in a fixed relationship; (3) exposing the photosensitive layer to actinic radiation through the photomask; (4) removing the photomask from the exposed photosensitive layer or a support sheet thereon; (5) removing the substrate whereby steps 1 to 5 can be repeated; and (6) repeating steps 1 to 5 of said similar sheet substrates whereby substantially identical imaged substrates are obtained.
Claim 34
Dependent Claim
57 words
The process of claim 30 wherein (i) the advancing pressure line begins at or near the edge of the photomask which is in a hinge relationship with the substrate to form a hinge line, and (ii) the advancing pressure line advances in a direction substantially perpendicular to the hinge line and substantially parallel to the substrate surface.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-05-20 | 1988-11-19 | 1989-05-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-05-20 | 1992-11-19 | 1993-05-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-05-20 | 1996-11-19 | 1997-05-21 | $7700.00 | Window Closed / Lapsed |