Method and apparatus for measuring intensity variation in a light source

Claim 2

In a method for eliminating the tilt of a trace resulting from plotting the detected energy from a lamp that is imaged along a tapered arcuate slit versus position along the slit, the steps comprising: detecting the light energy at positions along the length of the slit, obtaining a signal representative of the light energy along the length of the slit, providing a taper correction function based upon the position along the slit, and multiplying said intensity signal by said correction factor to produce a signal representative of the exposure uniformity produced by the system and which ideally does not have a linear variation with slit position.

Claim 3

The method of claim 1 including monitoring the intensity of light from the lamp and providing means for compensating for intensity variations in the lamp.

Claim 4

In a system for correcting for variations of light intensity from an ideal value of a lamp used to illuminate an arcuate slit imaged onto a mask that is supported on a pivoting carriage in a projection mask aligner, the combination comprising: a compliant member having an adjustable slit, means for adjusting said slit, means for detecting the intensity of light at positions along the length of said slit, means connected to the detection means for obtaining a signal representative of the intensity of the light along the length of the slit, means for producing a taper correction function based upon the position along the slit, and means for multiplying said intensity signal by said correction factor to produce a signal that directly indicates the uniformity of exposure obtained with such a system.

Claim 5

In a system for correcting for variations of light intensity from an ideal value of a lamp used to illuminate an arcuate slit imaged onto a mask that is supported on a pivoting carriage in a projection mask aligner, the combination comprising: a compliant member having an adjustable slit, means for adjusting said slit, means for detecting the intensity of light at positions along the length of said slit, means connected to the detection means for obtaining a signal representative of the intensity of the light along the length of the slit, means for producing a taper correction function based upon the position along the slit, and means for multiplying said intensity signal by said correction factor to produce a signal that directly indicates the uniformity of exposure obtained with such a system.

Claim 6

The system of claim 3 including means for monitoring the intensity of the lamp to obtain a voltage representative of the temporal variation in light intensity of the lamp and means for dividing the uniformity signal by the signal proportional to the instantaneous intensity of the light from the lamp.

Claim 7

In a method for correcting for variations of light intensity along a tapered arcuate slit employed in a scanning projection mask aligner, the steps comprising: providing a compliant member having an adjustable slit, detecting the intensity of light at positions along the length of said slit, obtaining a signal representative of the intensity of the light along the length of the slit, providing a taper correction function based upon the position along the slit, multiplying said intensity trace signal by said correction factor to produce a signal that is constant along the slit and adjusting the width of the slit to provide uniform exposure in the slit direction.

Claim 8

In a method for correcting for variations of light intensity along a tapered arcuate slit employed in a scanning projection mask aligner, the steps comprising: providing a compliant member having an adjustable slit, detecting the intensity of light at positions along the length of said slit, obtaining a signal representative of the intensity of the light along the length of the slit, providing a taper correction function based upon the position along the slit, multiplying said intensity trace signal by said correction factor to produce a signal that is constant along the slit and adjusting the width of the slit to provide uniform exposure in the slit direction.

Claim 9

The method of claim 5 including monitoring the intensity of the lamp to obtain a measure of temporal variation in the intensity of light emitted thereby and dividing the uniformity signal by the lamp output signal.

Claim 10

In an apparatus for measuring the illumination uniformity in a ring field projection system comprising: a tapered slit, light source means for projecting light through said tapered slit, detector means disposed in said tapered slit adapted to be moved along the length of said tapered slit, said detector means comprising light sensor means providing a signal representative of light intensity at the position of said light sensor means in said tapered slit, said detector means including potentiometer means providing a signal representative of the position of said detector means in said tapered slit, taper correction means connected to said potentiometer means providing a signal which when multiplied by said signal representative of said light intensity provides a voltage representative of light intensity at various locations along said tapered slit corrected for variations of light intensity with position of said detection means in said tapered slit, multiplier means connected to said taper correction means and light sensor means providing said voltage as an output, display means connected to said multiplier means providing a direct indication of light intensity deviation from ideal.

Claim 11

In an apparatus for measuring the illumination uniformity in a ring field projection system comprising: a tapered slit, light source means for projecting light through said tapered slit, detector means disposed in said tapered slit adapted to be moved along the length of said tapered slit, said detector means comprising light sensor means providing a signal representative of light intensity at the position of said light sensor means in said tapered slit, said detector means including potentiometer means providing a signal representative of the position of said detector means in said tapered slit, taper correction means connected to said potentiometer means providing a signal which when multiplied by said signal representative of said light intensity provides a voltage representative of light intensity at various locations along said tapered slit corrected for variations of light intensity with position of said detection means in said tapered slit, multiplier means connected to said taper correction means and light sensor means providing said voltage as an output, display means connected to said multiplier means providing a direct indication of light intensity deviation from ideal.

Claim 12

In a system according to claim 7 further comprising: monitoring means providing a signal representative of the intensity of said light source, divider means connected to said monitoring means and between said multiplier means and said display means to correct for false variations in the display that would otherwise be caused by light source output fluctuations.