US4508610A
Expired / Lapsed
US
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Method for making thin film electroluminescent rare earth activated zinc sulfide phosphors
Assignee: Osram Sylvania Inc
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Filing: 1984-02-27
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Granted: 1985-04-02
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Expires: 2004-02-27
Abstract
Abstract A method of coactivating a rare earth activated, electroluminescent zinc sulfide film with activator gas is described. The phosphor film is deposited upon a substrate by co-sputtering from a zinc sulfide target and a rare earth target in an atmosphere such as hydrogen, chlorine, fluorine or bromine, and an inert gas.
Inventors
- 👤 Eva C. Freeman
- 👤 Donald H. Baird
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 19:15
CPC Classifications
H; H05; H05B; H05B33/00; H05B33/12; H05B33/14; H05B33/145; C; C23; C23C; C23C14/00; C23C14/06; C23C14/0623; C23C14/0629; H05B33/10; H10; H10H; H10H20/00; H10H20/052
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
128 words
A method of making a zinc sulfide electroluminescent thin film phosphor comprising the steps of: (A) evacuating a sputtering chamber to a pressure suitable for sputtering, said sputtering chamber containing a substrate, a zinc sulfide sputtering target, and a rare earth sputtering target; (B) adding to said sputtering chamber from step (A) a fill gas comprising an inert gas and hydrogen, said hydrogen being from about one to about 40 volume percent of said fill gas, said fill gas being held at a pressure from about 7×10 -3 to about 10 -2 Torr; (C) co-sputtering from said zinc sulfide sputtering target and from said rare earth sputtering target in said fill gas held at said pressure to form a thin film zinc sulfide electroluminescent phosphor on said substrate.
Claim 2
Independent Claim
128 words
A method of making a zinc sulfide electroluminescent thin film phosphor comprising the steps of: (A) evacuating a sputtering chamber to a pressure suitable for sputtering, said sputtering chamber containing a substrate, a zinc sulfide sputtering target, and a rare earth sputtering target; (B) adding to said sputtering chamber from step (A) a fill gas comprising an inert gas and hydrogen, said hydrogen being from about one to about 40 volume percent of said fill gas, said fill gas being held at a pressure from about 7×10 -3 to about 10 -2 Torr; (C) co-sputtering from said zinc sulfide sputtering target and from said rare earth sputtering target in said fill gas held at said pressure to form a thin film zinc sulfide electroluminescent phosphor on said substrate.
Claim 3
Dependent Claim
19 words
A method in accordance with claim 1 wherein said hydrogen is from about 10 to about 30 volume percent.
Claim 4
Dependent Claim
23 words
A method in accordance with claim 1 wherein said rare earth is selected from the group consisting of terbium, samarium, and combinations thereof.
Claim 5
Dependent Claim
13 words
A method in accordance with claim 1 wherein said inert gas is argon.
Claim 6
Independent Claim
147 words
A method of making zinc sulfide electroluminescent thin film phosphor comprising the steps of: (A) evacuating a sputtering chamber to a pressure of suitable for sputtering, said sputtering chamber containing a substrate, a zinc sulfide sputtering target, and a rare earth sputtering target; (B) adding to said sputtering chamber from step (A), a fill gas comprising an inert gas and an activator gas, said activator gas being from about 0.1 to about 1.7 volume percent of said fill gas, said activator gas being selected from the group consisting of chlorine, fluorine, bromine, and mixtures thereof, said fill gas being held at a pressure from about 7×10 -3 to about 10 -2 Torr; (C) co-sputtering from said zinc sulfide sputtering target and from said rare earth sputtering target in said fill gas held at said pressure to form a thin film zinc sulfide electroluminescent phosphor on said substrate.
Claim 7
Independent Claim
147 words
A method of making zinc sulfide electroluminescent thin film phosphor comprising the steps of: (A) evacuating a sputtering chamber to a pressure of suitable for sputtering, said sputtering chamber containing a substrate, a zinc sulfide sputtering target, and a rare earth sputtering target; (B) adding to said sputtering chamber from step (A), a fill gas comprising an inert gas and an activator gas, said activator gas being from about 0.1 to about 1.7 volume percent of said fill gas, said activator gas being selected from the group consisting of chlorine, fluorine, bromine, and mixtures thereof, said fill gas being held at a pressure from about 7×10 -3 to about 10 -2 Torr; (C) co-sputtering from said zinc sulfide sputtering target and from said rare earth sputtering target in said fill gas held at said pressure to form a thin film zinc sulfide electroluminescent phosphor on said substrate.
Claim 8
Dependent Claim
21 words
A method in accordance with claim 5 wherein the said activator gas is from about 0.1 to about 1.0 volume percent.
Claim 9
Dependent Claim
23 words
A method in accordance with claim 1 wherein said rare earth is selected from the group consisting of terbium, samarium, and combinations thereof.
Claim 10
Dependent Claim
13 words
A method in accordance with claim 1 wherein said inert gas is argon.
Claim 11
Dependent Claim
16 words
A zinc sulfide electroluminescent thin film phosphor, made in accordance with the method of claim 1.
Claim 12
Dependent Claim
16 words
A zinc sulfide electroluminescent thin film phosphor made in accordance with the method of claim 5.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-04-01 | 1988-10-01 | 1989-04-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-04-01 | 1992-10-01 | 1993-04-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-04-01 | 1996-10-01 | 1997-04-02 | $7700.00 | Window Closed / Lapsed |