Cryopump with improved adsorption capacity

Claim 2

A cryopump comprising: a. a cryogenic refrigerator; b. a condensing cryopanel mounted to a low temperature heat sink on the refrigerator; and c. a honeycomb structure enclosed within said cryopanel, comprising an array of levels stacked along an axis, each level comprising a plurality of side-by-side chambers open radially from said axis with adsorbent material on their interiors, in thermal communication with said low temperature heat sink.

Claim 3

A cryopump as recited in claim 1 wherein the honeycomb structure comprises five sided chambers arranged in an annular matrix.

Claim 4

The cryopumps of claim 1 wherein said honeycomb structure comprises interlocking vertical partitions and disks which are brazed together to form a unified construct.

Claim 5

A cryopump comprising: a. a cryogenic refrigerator in fluid commuinication with a work chamber, said refrigerator having a first stage and a second stage; b. a second stage condensing cryopanel mounted to a low temperature heat sink on the second stage of the refrigerator; and c. a honeycomb structure enclosed within said second stage cryopanel, comprising an array of levels stacked along an axis, each level comprising a plurality of side-by-side chambers open radially from said axis coated on their interiors with an adsorbent material, in thermal communication with the second stage heat sink.

Claim 6

A cryopump comprising: a. a cryogenic refrigerator in fluid commuinication with a work chamber, said refrigerator having a first stage and a second stage; b. a second stage condensing cryopanel mounted to a low temperature heat sink on the second stage of the refrigerator; and c. a honeycomb structure enclosed within said second stage cryopanel, comprising an array of levels stacked along an axis, each level comprising a plurality of side-by-side chambers open radially from said axis coated on their interiors with an adsorbent material, in thermal communication with the second stage heat sink.

Claim 7

A cryopump as recited in claim 4 wherein the honeycomb structure comprises five sided chambers arranged in an annular matrix and open to the cryopump environment at an outer diameter of the annular matrix, and all of said sides of said chambers are coated with adsorbent.

Claim 8

A cryopump as recited in claim 4 wherein the honeycomb structure comprises a single brazed construct of oxygen free high conductivity copper.

Claim 9

A cryopump as recited in claim 4 wherein the honeycomb structure comprises a frustoconical array of adsorbent chambers substantially enclosed within said second stage cryopanel and in thermal communication with said second stage.

Claim 10

A cryopump as recited in claim 4 wherein the honeycomb structure comprises an inverted cup in thermal communication with the second stage refrigerator, the interior of said cup having a cylindrical matrix of adsorbent chambers positioned adjacent to an inner wall of the cup.

Claim 11

The cryopump of claim 4 wherein said honeycomb structure comprises interlocking vertical partitions and disks which are brazed together to form a unified construct.

Claim 12

A cryopump comprising: a. a cryopump housing, said housing having a port for fluid communication with a work chamber; b. a refrigerator within said housing having first and second stages; c. a second stage condensing cryopanel in thermal communication with and surrounding the low temperature second stage; d. a radiation shield partially enclosing said second stage cryopanel, in thermal contact with the first stage; e. a frontal cryopanel extending across an opening in the radiation shield adjacent said port to said work chamber, the frontal cryopanel being in thermal contact with the first stage of the refrigerator; and f. a honeycomb structure coated with an adsorbent material in thermal communication with the second stage heat sink wherein the honeycomb structure comprises a matrix of chambers substantially enclosed within said second stage cryopanel, the matrix of chambers being formed by an array of circumferentially displaced partitions surrounding the second stage and extending generally radially and axially and an array of axially displacer walls extending radially to divide the spaces between the partitions into a plurality of chambers.

Claim 13

A cryopump comprising: a. a cryopump housing, said housing having a port for fluid communication with a work chamber; b. a refrigerator within said housing having first and second stages; c. a second stage condensing cryopanel in thermal communication with and surrounding the low temperature second stage; d. a radiation shield partially enclosing said second stage cryopanel, in thermal contact with the first stage; e. a frontal cryopanel extending across an opening in the radiation shield adjacent said port to said work chamber, the frontal cryopanel being in thermal contact with the first stage of the refrigerator; and f. a honeycomb structure coated with an adsorbent material in thermal communication with the second stage heat sink wherein the honeycomb structure comprises a matrix of chambers substantially enclosed within said second stage cryopanel, the matrix of chambers being formed by an array of circumferentially displaced partitions surrounding the second stage and extending generally radially and axially and an array of axially displacer walls extending radially to divide the spaces between the partitions into a plurality of chambers.

Claim 14

A cryopump comprising a cryogenic refrigerator having a low temperature heat sink and a honeycomb structure in thermal communication with the low temperature heat sink and comprising an array of levels stacked along an axis, each level comprising a plurality of side-by-side chambers open radially from said axis with an adsorbent materialon each wall thereof.

Claim 15

A cryopump comprising a cryogenic refrigerator having a low temperature heat sink and a honeycomb structure in thermal communication with the low temperature heat sink and comprising an array of levels stacked along an axis, each level comprising a plurality of side-by-side chambers open radially from said axis with an adsorbent materialon each wall thereof.