Cryogenic pumping apparatus with replaceable pumping surface elements

Claim 2

In a cryogenic pumping apparatus having pumping surfaces maintained at a predetermined temperature for condensation and adsorption of gaseous species: a frame having an axially extending core portion and a plurality of fins extending radially from the core portion, a group of axially spaced generally parallel plate members extending outwardly from the core portion between adjacent ones of the fins and inclined at a predetermined angle to the axis of the core portion, a coating of cryosorbent material on one surface of each of the plate members, and removable fasteners securing the plate members to the fins.

Claim 3

The apparatus of claim 1 wherein the plate members have generally planar web portions with mounting portions at the sides of the web portions adjacent the radial fins of the frame.

Claim 4

The apparatus of claim 1 wherein said one surface of each plate member is the inner surface.

Claim 5

In a cryogenic pumping apparatus for removing gaseous species from a chamber: means forming an inlet opening for gaseous communication with the chamber, a first stage extending axially from the inlet opening and having a pumping surface maintained at a first temperature for removing a portion of the gaseous species, and a second stage positioned coaxially within the first stage and having a plurality of pumping surfaces maintained at a temperature lower than the first temperature for removing an additional portion of the gaseous species, said first stage including a louvered thermal shield positioned between the inlet opening and the second stage for preventing thermal radiation from the chamber from falling directly on the pumping surfaces of the second stage while permitting relatively unimpeded flow of gaseous species from the inlet opening to the second stage, said second stage comprising a frame having an axially extending core portion and a plurality of fins extending radially from the core portion, a plurality of axially spaced generally parallel plate members extending outwardly from the core portion and extending away from the inlet opening and extending between adjacent ones of the fins, a coating of cryosorbent material on the inner surface of each of the plate members, and removable fasteners securing the plate members to the fins.

Claim 6

In a cryogenic pumping apparatus for removing gaseous species from a chamber: means forming an inlet opening for gaseous communication with the chamber, a first stage extending axially from the inlet opening and having a pumping surface maintained at a first temperature for removing a portion of the gaseous species, and a second stage positioned coaxially within the first stage and having a plurality of pumping surfaces maintained at a temperature lower than the first temperature for removing an additional portion of the gaseous species, said first stage including a louvered thermal shield positioned between the inlet opening and the second stage for preventing thermal radiation from the chamber from falling directly on the pumping surfaces of the second stage while permitting relatively unimpeded flow of gaseous species from the inlet opening to the second stage, said second stage comprising a frame having an axially extending core portion and a plurality of fins extending radially from the core portion, a plurality of axially spaced generally parallel plate members extending outwardly from the core portion and extending away from the inlet opening and extending between adjacent ones of the fins, a coating of cryosorbent material on the inner surface of each of the plate members, and removable fasteners securing the plate members to the fins.

Claim 7

In a cryogenic pumping apparatus for removing gaseous species from a chamber: a first pumping stage maintained at a first temperature for removing a portion of the gaseous species, and a second pumping stage maintained at a temperature lower than the first temperature for removing an additional portion of the gaseous species, said second stage comprising a frame having an axially extending core portion and a plurality of fins extending radially from the core portion, and a plurality of individual plate members removably mounted on the frame to form pumping surfaces for the gaseous species, said plate members having a coating of cryosorbent material on one surface thereof and being arrayed in axially spaced groups extending outwardly from the core portion and extending between adjacent ones of the fins.

Claim 8

In a cryogenic pumping apparatus for removing gaseous species from a chamber: a first pumping stage maintained at a first temperature for removing a portion of the gaseous species, and a second pumping stage maintained at a temperature lower than the first temperature for removing an additional portion of the gaseous species, said second stage comprising a frame having an axially extending core portion and a plurality of fins extending radially from the core portion, and a plurality of individual plate members removably mounted on the frame to form pumping surfaces for the gaseous species, said plate members having a coating of cryosorbent material on one surface thereof and being arrayed in axially spaced groups extending outwardly from the core portion and extending between adjacent ones of the fins.

Claim 9

The apparatus of claim 12 wherein the plate members have generally planar web portions with mounting portions at the sides of the web portions adjacent the radial fins of the frame.

Claim 10

In a cryogenic pumping apparatus for removing gaseous species from a chamber: a first pumping stage maintained at a first temperature for removing a portion of the gaseous species, and a second pumping stage maintained at a temperature lower than the first temperature for removing an additional portion of the gaseous species, said second stage comprising a frame having an axially extending core portion and a plurality of fins extending radially from the core portion, and a plurality of individual plate members removably mounted on the frame to form pumping surfaces for the gaseous species, said plate members having generally planar web portions with mounting portions at the sides of the web portions adjacent the radial fins of the frame, and said plate members having a coating of cryosorbent material on one surface thereof and being arrayed in axially spaced groups extending outwardly from the core portion and extending between adjacent ones of the fins.

Claim 11

In a cryogenic pumping apparatus for removing gaseous species from a chamber: a first pumping stage maintained at a first temperature for removing a portion of the gaseous species, and a second pumping stage maintained at a temperature lower than the first temperature for removing an additional portion of the gaseous species, said second stage comprising a frame having an axially extending core portion and a plurality of fins extending radially from the core portion, and a plurality of individual plate members removably mounted on the frame to form pumping surfaces for the gaseous species, said plate members having generally planar web portions with mounting portions at the sides of the web portions adjacent the radial fins of the frame, and said plate members having a coating of cryosorbent material on one surface thereof and being arrayed in axially spaced groups extending outwardly from the core portion and extending between adjacent ones of the fins.

Claim 12

In a cryogenic pumping apparatus for removing gaseous species from a chamber: means forming an inlet opening for gaseous communication with the chamber, a first stage extending from the inlet opening and having a pumping surface maintained at a first temperature for removing a portion of the gaseous species, and a second stage positioned within the first stage and maintained at a temperature lower than the first temperature for removing an additional portion of the gaseous species, said first stage including a thermal shield means positioned between the inlet opening and the second stage for preventing thermal radiation from the chamber from falling directly on the second stage while permitting relatively unimpeded flow of gaseous species from the inlet opening to the second stage, said second stage comprising a frame having an axially extending core portion and a plurality of fins extending radially from the core portion, a plurality of individual plate members removably mounted on the frame to form pumping surfaces for the gaseous species, said plate members being axially spaced and generally parallel, and said plate members extending outwardly from the core portion and extending away from the inlet opening and extending between adjacent ones of the fins, a coating of cryosorbent material on one surface of each of the plate members, and removable fasteners securing the plate members to the fins.

Claim 13

In a cryogenic pumping apparatus for removing gaseous species from a chamber: means forming an inlet opening for gaseous communication with the chamber, a first stage extending from the inlet opening and having a pumping surface maintained at a first temperature for removing a portion of the gaseous species, and a second stage positioned within the first stage and maintained at a temperature lower than the first temperature for removing an additional portion of the gaseous species, said first stage including a thermal shield means positioned between the inlet opening and the second stage for preventing thermal radiation from the chamber from falling directly on the second stage while permitting relatively unimpeded flow of gaseous species from the inlet opening to the second stage, said second stage comprising a frame having an axially extending core portion and a plurality of fins extending radially from the core portion, a plurality of individual plate members removably mounted on the frame to form pumping surfaces for the gaseous species, said plate members being axially spaced and generally parallel, and said plate members extending outwardly from the core portion and extending away from the inlet opening and extending between adjacent ones of the fins, a coating of cryosorbent material on one surface of each of the plate members, and removable fasteners securing the plate members to the fins.

Claim 14

The apparatus of claim 8 wherein said one surface of each plate member is the inner surface.

Claim 15

The apparatus of claim 9 wherein the plate members have generally planar web portions with mounting portions at the sides of the web portions adjacent the radial fins of the frame.

Claim 16

The apparatus of claim 8 wherein the plate members have generally planar web portions with mounting portions at the sides of the web portions adjacent the radial fins of the frame.