High-power cathode system for producing multilayers

Claim 1

A high-power cathode system for producing layers of different materials on a substrate, comprising: a high power cathode device having a target of at least two different materials, each two materials abutting each other at a boundary line therebetween, and means, including a discharge-concentrating, closed-figure magnetic field generator, for producing a glow discharge of the target materials at least across the boundary line therebetween, whereby, because the target materials abut, the magnetically-concentrated glow discharge cannot escape through the target; and means for transporting a substrate in layer-coating relation to the glow discharge of the target materials of the high power cathode device in a direction which crosses each boundary line thereof, whereby, as the substrate is transported across each boundary line, a gradual transition of the target materials coated thereon occurs for adhering the layers of the target materials coated therebefore and thereafter.