Patent US4486292A successfully refreshed from Google Patents.
US4486292A
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Support and anchoring mechanism for membranes in selectively responsive field effect devices
Assignee: Ethicon Inc
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Filing: 1983-01-13
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Granted: 1984-12-04
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Expires: 2003-01-13
Abstract
Abstract In the formation of a chemically sensitive field effect device, prior to formation of the gate membrane, an aluminum pad is disposed over the gate, and a polyimide layer is disposed thereover. Photoresist and etching steps produce openings in the polyimide to form a gridwork which is anchored to the device on the periphery of the gate. The aluminum layer is etched completely away, forming a void defined by the suspended polyimide mesh on one side, and the gate insulator on the other. Polymeric membrane is formed in the void by insertion in liquid form.
Inventors
- 👤 Gary F. Blackburn
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 22:13
CPC Classifications
G; G01; G01N; G01N27/00; G01N27/26; G01N27/403; G01N27/414
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
87 words
In a system employing a selectively reactive membrane overlying a specified gate region of a field effect device, the improvement comprising: a substantially nonreactive mesh structure spaced away from but overlying said specified region, wherein said mesh spans and encloses said gate region, is affixed to said device about the periphery of said region, and forms a void, open through said mesh, for location of a membrane; and a membrane integrally located within said void and through openings in said mesh on the outside of said mesh.
Claim 2
Dependent Claim
87 words
In a system employing a selectively reactive membrane overlying a specified gate region of a field effect device, the improvement comprising: a substantially nonreactive mesh structure spaced away from but overlying said specified region, wherein said mesh spans and encloses said gate region, is affixed to said device about the periphery of said region, and forms a void, open through said mesh, for location of a membrane; and a membrane integrally located within said void and through openings in said mesh on the outside of said mesh.
Claim 3
Dependent Claim
14 words
The invention described in claim 1 wherein said mesh consists essentially of polyimide material.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-12-04 | 1988-06-04 | 1988-12-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-12-04 | 1992-06-04 | 1992-12-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-12-04 | 1996-06-04 | 1996-12-04 | $7700.00 | Window Closed / Lapsed |