Liquid etching reactor and method

Claim 2

In a reactor for removing material by etching from a substrate: means defining a relatively narrow channel of slightly greater dimension than the substrate, means for positioning the substrate in the channel, and means for passing a liquid etchant through the channel at a flow rate such that the composition of the etchant does not change significantly from one end of the substrate to the other as the material is removed from the substrate.

Claim 3

In a reactor for removing copper by etching from a substrate: means defining a relatively narrow channel of slightly greater dimension than the substrate, means for positioning the substrate in the channel, and means for passing a liquid etchant comprising an aqueous solution of a reagent selected from the group consisting of nitric acid, nitric oxide and nitrogen dioxide through the channel at a flow rate such that the composition of the etchant does not change significantly from one end of the substrate to the other as the copper is removed from the substrate.

Claim 4

In a reactor for removing copper by etching from a substrate: means defining a relatively narrow channel of slightly greater dimension than the substrate, means for positioning the substrate in the channel, and means for passing a liquid etchant comprising an aqueous solution of a reagent selected from the group consisting of nitric acid, nitric oxide and nitrogen dioxide through the channel at a flow rate such that the composition of the etchant does not change significantly from one end of the substrate to the other as the copper is removed from the substrate.

Claim 5

The reactor of claim 2 wherein copper nitrate is produced by the reaction of the etchant with the copper, and the flow rate is selected to produce an increase of no more than about ten percent in the concentration of the copper nitrate from one side of the substrate to the other.

Claim 6

In a reactor for removing copper by etching from a printed circuit board: means defining a relatively narrow channel of slightly greater dimension than the circuit board, means for positioning the circuit board in the channel, and means for passing a liquid through the channel at a flow rate such that the composition of the etchant does not change significantly from one end of the circuit board to the other as the copper is removed from the circuit board.

Claim 7

In a reactor for removing copper by etching from a printed circuit board: means defining a relatively narrow channel of slightly greater dimension than the circuit board, means for positioning the circuit board in the channel, and means for passing a liquid through the channel at a flow rate such that the composition of the etchant does not change significantly from one end of the circuit board to the other as the copper is removed from the circuit board.

Claim 8

In a method for removing material by etching from a substrate, the steps of placing the substrate in a relatively narrow channel of slightly greater dimension than the substrate, and passing a liquid etchant through the channel at a flow rate such that the composition of the etchant does not change significantly from one end of the substrate to the other as the material is removed from the substrate.

Claim 9

In a method for removing material by etching from a substrate, the steps of placing the substrate in a relatively narrow channel of slightly greater dimension than the substrate, and passing a liquid etchant through the channel at a flow rate such that the composition of the etchant does not change significantly from one end of the substrate to the other as the material is removed from the substrate.

Claim 10

In a method for removing copper by etching from a substrate, the steps of placing the substrate in a relatively narrow channel of slightly greater dimension than the substrate, and passing a liquid etchant comprising an aqueous solution of a reagent selected from the group consisting of nitric acid, nitric oxide and nitrogen dioxide through the channel at a flow rate such that the composition of the etchant does not change significantly from one end of the substrate to the other as the copper is removed from the substrate.

Claim 11

In a method for removing copper by etching from a substrate, the steps of placing the substrate in a relatively narrow channel of slightly greater dimension than the substrate, and passing a liquid etchant comprising an aqueous solution of a reagent selected from the group consisting of nitric acid, nitric oxide and nitrogen dioxide through the channel at a flow rate such that the composition of the etchant does not change significantly from one end of the substrate to the other as the copper is removed from the substrate.

Claim 12

The method of claim 6 wherein copper nitrate is produced by the reaction of the etchant with the copper, and the flow rate is selected to produce an increase of no more than about ten percent in the concentration of the copper nitrate from one side of the substrate to the other.

Claim 13

In a method for removing copper by etching from a printed circuit board, the steps of placing the circuit board in a relatively narrow channel of slightly greater dimension than the circuit board, and passing a liquid etchant through the channel at a flow rate such that the composition of the etchant does not change significantly from one end of the circuit board to the other as the copper is removed from the circuit board.

Claim 14

In a method for removing copper by etching from a printed circuit board, the steps of placing the circuit board in a relatively narrow channel of slightly greater dimension than the circuit board, and passing a liquid etchant through the channel at a flow rate such that the composition of the etchant does not change significantly from one end of the circuit board to the other as the copper is removed from the circuit board.

Claim 15

In a reactor for etching a material on a generally planar substrate: a pair of generally parallel planar walls spaced apart by a distance somewhat greater than the thickness of the substrate to define a relatively narrow channel, means for positioning the substrate in the channel with at least one surface of the substrate being spaced away from the walls of the channel, means for circulating a liquid etchant through the channel to remove the material from the substrate, and a sump in fluid communication with the channel for collecting the etchant which has passed through the channel.

Claim 16

In a reactor for etching a material on a generally planar substrate: a pair of generally parallel planar walls spaced apart by a distance somewhat greater than the thickness of the substrate to define a relatively narrow channel, means for positioning the substrate in the channel with at least one surface of the substrate being spaced away from the walls of the channel, means for circulating a liquid etchant through the channel to remove the material from the substrate, and a sump in fluid communication with the channel for collecting the etchant which has passed through the channel.

Claim 17

The reactor of claim 9 wherein the substrate is a printed circuit board, the material to be removed is copper, and the etchant comprises an aqueous solution of a reagent selected from the group consisting of nitric acid, nitric oxide and nitrogen dioxide.

Claim 18

The reactor of claim 10 wherein copper nitrate is produced by the reaction of the etchant with the copper, and the etchant is circulated at a rate such that the concentration of copper nitrate increases by no more than about ten percent for each pass of the etchant through the channel.

Claim 19

The reactor of claim 11 including means communicating with the sump for removing the copper nitrate from the solution.

Claim 20

The reactor of claim 9 wherein the means for circulating the etchant comprises a manifold having a generally cylindrical body connected to one end of the channel with the walls of the channel extending in a generally radial direction from the manifold, and a pump for circulating the etchant from the sump through the manifold.

Claim 21

The reactor of claim 13 wherein the means for circulating the etchant further includes a dispersion tube within the manifold body having a plurality of discharge openings which face away from the channel.

Claim 22

The reactor of claim 13 wherein the channel extends in a generally vertical direction and the manifold and the sump are positioned toward the lower end of the channel.

Claim 23

The reactor of claim 9 including means for monitoring the temperature of the etchant, and means for maintaining the etchant at a predetermined temperature.

Claim 24

The reactor of claim 16 wherein the means for maintaining the etchant at the predetermined temperature includes heating and cooling elements in the sump.

Claim 25

In a reactor for removing copper from a printed circuit board with a liquid etchant: a chamber for holding the etchant having a sump in the lower portion thereof, a pair of generally parallel upstanding walls spaced apart by a distance somewhat greater than the thickness of the printed circuit board defining a vertically extending channel within the chamber, means for positioning the printed circuit board within the channel with at least one surface of the board being spaced from and parallel to the walls of the channel, a horizontally extending manifold communicating with the channel at the lower end thereof, and means including a pump interconnecting the sump and the manifold for circulating the liquid etchant in an upward direction through the channel to remove the copper from the circuit board.

Claim 26

In a reactor for removing copper from a printed circuit board with a liquid etchant: a chamber for holding the etchant having a sump in the lower portion thereof, a pair of generally parallel upstanding walls spaced apart by a distance somewhat greater than the thickness of the printed circuit board defining a vertically extending channel within the chamber, means for positioning the printed circuit board within the channel with at least one surface of the board being spaced from and parallel to the walls of the channel, a horizontally extending manifold communicating with the channel at the lower end thereof, and means including a pump interconnecting the sump and the manifold for circulating the liquid etchant in an upward direction through the channel to remove the copper from the circuit board.

Claim 27

The reactor of claim 18 wherein the etchant comprises an aqueous solution of a reagent selected from a group consisting of nitric acid, nitric oxide and nitrogen dioxide.

Claim 28

The reactor of claim 19 wherein copper nitrate is produced by the reaction of the etchant with the copper, and the etchant is circulated at a rate such that the concentration of the copper nitrate increases no more than about ten percent for each pass of the etchant through the channel.

Claim 29

The reactor of claim 18 wherein the manifold includes a generally cylindrical body from which the channel walls extend in a generally radial direction, and a dispersion tube within the manifold by having discharge openings which face away from the channel.

Claim 30

The reactor of claim 18 including means for monitoring the temperature of the etchant, and means for maintaining the etchant at a predetermined temperature.

Claim 31

The reactor of claim 22 wherein the means for maintaining the etchant at a predetermined temperature includes heating and cooling elements in the sump.