US4479846A
Expired / Lapsed
US
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Method of entraining dislocations and other crystalline defects in heated film contacting patterned region
Assignee: Massachusetts Institute of Technology
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Filing: 1982-06-23
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Granted: 1984-10-30
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Expires: 2002-06-23
Abstract
Abstract A process for entraining dislocations and other crystalline defects in a thin film includes coating a substrate, such as a layer of thermally grown silicon dioxide on a silicon wafer with the thin film of polycrystalline or amorphous silicon in the thickness range 0.05-10μ deposited by chemical vapor deposition. An encapsulation layer that is a composite of 2 μm thickness SiO 2 , 30 nm of Si 3 N 4 is deposited on the thin film. A pattern of stripes is created on this encapsulation layer made of materials, such as titanium, silicon, silicon dioxide and photoresist. A long and narrow molten zone is created in the film with its long axis oriented perpendicular to the lines and is moved with a movable strip-heater over in a direction parallel to the lines in the recrystallization process to establish the dislocation and other crystalline defects in the film entrained to follow the pattern of stripes at locations related to the stripes.
Inventors
- 👤 Henry I. Smith
- 👤 Michael W. Geis
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 22:50
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/20; H10P14/38; H10P14/3802; C; C30; C30B; C30B13/00; C30B13/28; C30B27/00; C30B29/00; C30B29/60; H10P14/32; H10P14/3202; H10P14/3238; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411; H10P14/3451; H10P14/3452; H10P14/3456; H10P14/3466; Y; Y10; Y10S; Y10S117/00; Y10S117/913; Y10S148/00; Y10S148/123; Y10S148/152
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
84 words
A method of entraining dislocations and other crystalline defects in a film on a substrate which method includes the steps of intentionally creating a predetermined pattern in a region embracing at least one of said film and said substrate to form a patterned region, and processing said film by passing a heated zone through said film in a predetermined direction to establish dislocations and other crystalline defects in said film entrained to follow said pattern and located at predetermined positions related to said pattern.
Claim 2
Independent Claim
84 words
A method of entraining dislocations and other crystalline defects in a film on a substrate which method includes the steps of intentionally creating a predetermined pattern in a region embracing at least one of said film and said substrate to form a patterned region, and processing said film by passing a heated zone through said film in a predetermined direction to establish dislocations and other crystalline defects in said film entrained to follow said pattern and located at predetermined positions related to said pattern.
Claim 3
Dependent Claim
19 words
A method in accordance with claim 1 wherein the step of creating said predetermined pattern comprises forming parallel lines.
Claim 4
Dependent Claim
33 words
A method in accordance with claim 1 and further including the step of covering said film with an encapsulation layer and forming parallel lines in said encapsulation layer to form said patterned region.
Claim 5
Independent Claim
20 words
A method in accordance with claims 2 or 3 and further including the step of uniformly spacing said parallel lines.
Claim 6
Dependent Claim
23 words
A method in accordance with claim 3 and further including the step of forming said parallel lines substantially parallel to said predetermined direction.
Claim 7
Dependent Claim
21 words
A method in accordance with claim 1 and further including the step of establishing said pattern with material that reflects radiation.
Claim 8
Dependent Claim
21 words
A method in accordance with claim 1 and further including the step of establishing said pattern with material that absorbs radiation.
Claim 9
Dependent Claim
21 words
A method in accordance with claim 1 and further including the step of forming said pattern by establishing a relief structure.
Claim 10
Dependent Claim
20 words
A method in accordance with claim 8 and further including the step of forming said relief structure in said substrate.
Claim 11
Dependent Claim
30 words
A method in accordance with claim 8 and further including the step of covering said thin film with an encapsulating layer and forming said relief structure in said encapsulating layer.
Claim 12
Dependent Claim
38 words
A method in accordance with claim 1 and further including the step of forming said pattern with material of a chemical composition that differs from that of the material of the surface in which the pattern is created.
Claim 13
Dependent Claim
33 words
A method in accordance with claim 1 wherein said processing said film while in contact with said patterned region includes the step of spatially modulating the temperature in said film with said pattern.
Claim 14
Dependent Claim
34 words
A method in accordance with claim 1 wherein said processing said film while in contact with said patterned region includes creating a spatially varying concentration of impurity atoms in said film with said pattern.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-10-30 | 1988-04-30 | 1988-10-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-10-30 | 1992-04-30 | 1992-10-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-10-30 | 1996-04-30 | 1996-10-30 | $7700.00 | Window Closed / Lapsed |