US4333792A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Enhancing epitaxy and preferred orientation
Assignee: Massachusetts Institute of Technology
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Filing: 1979-04-09
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Granted: 1982-06-08
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Expires: 1999-04-09
Abstract
Abstract An array of oriented artificial relief features or point defects embraced by parallel planes on a substrate surface influence the orientation of solid films during the course of their growth on the substrate surface. There may be multiple sets embraced in generally parallel planes at an angle to each other that is an integral multiple of 30°.
Inventors
- 👤 Henry I. Smith
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 17:17
CPC Classifications
C; C30; C30B; C30B19/00; C30B19/12; C30B23/00; C30B23/02; C30B25/00; C30B25/02; C30B25/18; Y; Y10; Y10S; Y10S117/00; Y10S117/913
Claims Analysis
Total Claims: 41
Claim 1
Independent Claim
144 words
A method of enhancing epitaxy and preferred orientation which method includes the steps of intentionally forming at predetermined locations a plurality of artificial defects having predetermined geometric form at the surface of a solid substrate, with said artificial defects being selected from the group consisting of (1) artificial point defects and (2) artificial surface relief structure, the separation between adjacent artificial defects being sufficiently small so that both artificial defects in a pair of adjacent ones contribute to influencing said crystallographic orientation, and thereafter depositing a film on said surface to form a substantially epitaxial or preferred orientation layer in said film having crystallographic orientation materially influenced by the geometric arrangement of adjacent artificial defects by a process in which the formation of crystalline regions and any changes in crystallographic orientation occur while material forming said film is in contact with said artificial defects.
Claim 2
Independent Claim
144 words
A method of enhancing epitaxy and preferred orientation which method includes the steps of intentionally forming at predetermined locations a plurality of artificial defects having predetermined geometric form at the surface of a solid substrate, with said artificial defects being selected from the group consisting of (1) artificial point defects and (2) artificial surface relief structure, the separation between adjacent artificial defects being sufficiently small so that both artificial defects in a pair of adjacent ones contribute to influencing said crystallographic orientation, and thereafter depositing a film on said surface to form a substantially epitaxial or preferred orientation layer in said film having crystallographic orientation materially influenced by the geometric arrangement of adjacent artificial defects by a process in which the formation of crystalline regions and any changes in crystallographic orientation occur while material forming said film is in contact with said artificial defects.
Claim 3
Dependent Claim
29 words
A method of enhancing epitaxy and preferred orientation in accordance with claim 1 and further including the step of maintaining the separation between rows of artificial defects substantially equal.
Claim 4
Dependent Claim
26 words
A method of enhancing epitaxy and preferred orientation in accordance with claim 1 and further including the step of establishing said artificial defects in intersecting rows.
Claim 5
Dependent Claim
27 words
A method of enhancing epitaxy and preferred orientation in accordance with claim 3 and further including the step of maintaining the separation between parallel rows substantially equal.
Claim 6
Dependent Claim
27 words
A method of enhancing epitaxy and preferred orientation in accordance with claim 1 and further including the step of forming artificial point defects among said artificial defects.
Claim 7
Dependent Claim
26 words
A method of enhancing epitaxy and preferred orientation in accordance with claim 1 and further including the step of forming artificial steps among said artificial defects.
Claim 8
Dependent Claim
25 words
A method of enhancing epitaxy and preferred orientation in accordance with claim 6 and further including the step of spacing said artificial steps substantially equidistant.
Claim 9
Dependent Claim
31 words
A method for enhancing epitaxy and preferred orientation in accordance with claim 6 and further including the step of forming artificial steps that are substantially orthogonal to the first-mentioned artificial steps.
Claim 10
Dependent Claim
22 words
A substrate having an epitaxial or preferred orientation layer on the substrate surface made in accordance with the method of claim 1.
Claim 11
Dependent Claim
47 words
A method of enhancing epitaxy and preferred orientation in accordance with claim 1 and further including the step of forming said artificial defects with the dimension of each defect in a direction perpendicular to the substrate surface being within the range of 1 atom to 1/2 micron.
Claim 12
Dependent Claim
38 words
A method of enhancing epitaxy and preferred orientation in accordance with claim 3 and further including the step of establishing said artificial defects in rows that intersect at an angle that is an integral multiple of π/6 radians.
Claim 13
Dependent Claim
27 words
A method of enhancing epitaxy and preferred orientation in accordance with claim 3 and further including the step of forming artificial point defects among said artificial defects.
Claim 14
Dependent Claim
26 words
A method of enhancing epitaxy and preferred orientation in accordance with claim 3 and further including the step of forming artificial steps among said artificial defects.
Claim 15
Dependent Claim
45 words
A substrate having an epitaxial or preferred orientation layer on the substrate surface in accordance with claim 10 wherein the dimension of each artificial defect in a direction perpendicular to the surface of said substrate is within the range of 1 atom to 1/2 micron.
Claim 16
Independent Claim
118 words
A method of enhancing epitaxy and preferred orientation which method includes the steps of intentionally forming at predetermined locations a plurality of artificial defects having predetermined geometric form at the surface of an amorphous solid substrate, said artificial defects being selected from the group consisting of (1) artificial point defects and (2) artificial surface relief structure, and thereafter depositing a film on said surface to form a substantially epitaxial or preferred orientation layer in said film having crystallographic orientation materially influenced by the geometric arrangement of adjacent artificial defects by a process in which the formation of crystalline regions and any changes in crystallographic orientation occur while material forming said film is in contact with said artificial defects.
Claim 17
Independent Claim
118 words
A method of enhancing epitaxy and preferred orientation which method includes the steps of intentionally forming at predetermined locations a plurality of artificial defects having predetermined geometric form at the surface of an amorphous solid substrate, said artificial defects being selected from the group consisting of (1) artificial point defects and (2) artificial surface relief structure, and thereafter depositing a film on said surface to form a substantially epitaxial or preferred orientation layer in said film having crystallographic orientation materially influenced by the geometric arrangement of adjacent artificial defects by a process in which the formation of crystalline regions and any changes in crystallographic orientation occur while material forming said film is in contact with said artificial defects.
Claim 18
Dependent Claim
52 words
A substrate having an epitaxial or preferred orientation layer on the substrate surface made in accordance with claim 15 comprising, an amorphous solid substrate having a surface with intentionally formed artificial defects at predetermined locations, said layer in said film having crystallographic orientation determined by the geometric arrangement of adjacent artificial defects.
Claim 19
Dependent Claim
14 words
The product in accordance with claim 16 wherein said amorphous solid substrate is plastic.
Claim 20
Dependent Claim
22 words
The product of claim 16 wherein said substrate is silicon dioxide and said layer comprises at least one of silicon and germanium.
Claim 21
Dependent Claim
19 words
The product in accordance with claim 16 wherein said substrate comprises silicon dioxide and said layer comprises gallium arsenide.
Claim 22
Dependent Claim
17 words
The product in accordance with claim 16 wherein said layer is of different material than said substrate.
Claim 23
Dependent Claim
20 words
A method of enhancing epitaxy and preferred orientation in accordance with claim 6 wherein said steps have substantially vertical walls.
Claim 24
Dependent Claim
19 words
A method of enhancing epitaxy and preferred orientation in accordance with claim 6 wherein said steps have sloping walls.
Claim 25
Dependent Claim
17 words
A substrate in accordance with claim 1 wherein said substrate is amorphous and said layer is semiconductive.
Claim 26
Dependent Claim
30 words
A method of enhancing preferred orientation in accordance with claim 1 and further including subjecting the film and substrate to conditions for enhancing the orienting influence of said artificial defects.
Claim 27
Dependent Claim
17 words
A method of enhancing preferred orientation in accordance with claim 24 wherein said conditions comprise environmental conditions.
Claim 28
Dependent Claim
83 words
A method of enhancing preferred orientation in accordance with claim 25 wherein said conditions include conditions comprising at least one of (1) placing said film and substrate in a plating solution, (2) placing said film and substrate in an environment of reactive gases at elevated temperatures, (3) placing said film and substrate within a solvent medium, and (4) placing said film and substrate in a solution that invades the said film, softens it, or otherwise enhances the mobility of molecules in the film.
Claim 29
Dependent Claim
20 words
A method of enhancing preferred orientation in accordance with claim 24 wherein said conditions include delivering energy to said film.
Claim 30
Dependent Claim
23 words
A method of enhancing preferred orientation in accordance with claim 27 and further including the step of subjecting the film to elevated temperature.
Claim 31
Dependent Claim
30 words
A method of enhancing preferred orientation in accordance with claim 15 and further including subjecting the film and substrate to conditions for enhancing the orienting influence of said artificial defects.
Claim 32
Dependent Claim
17 words
A method of enhancing preferred orientation in accordance with claim 29 wherein said conditions comprise environmental conditions.
Claim 33
Dependent Claim
83 words
A method of enhancing preferred orientation in accordance with claim 30 wherein said conditions include conditions comprising at least one of (1) placing said film and substrate in a plating solution, (2) placing said film and substrate in an environment of reactive gases at elevated temperatures, (3) placing said film and substrate within a solvent medium, and (4) placing said film and substrate in a solution that invades the said film, softens it, or otherwise enhances the mobility of molecules in the film.
Claim 34
Dependent Claim
20 words
A method of enhancing preferred orientation in accordance with claim 29 wherein said conditions include delivering energy to said film.
Claim 35
Dependent Claim
23 words
A method of enhancing preferred orientation in accordance with claim 32 and further including the step of subjecting the film to elevated temperature.
Claim 36
Dependent Claim
24 words
A method in accordance with claim 1 wherein said artificial surface relief structure comprises structure having a preselected shape bounded by substantially planar facets.
Claim 37
Dependent Claim
24 words
A substrate in accordance with claim 10 wherein said artificial surface relief structure comprises structure having a preselected shape bounded by substantially planar facets.
Claim 38
Dependent Claim
23 words
A method of enhancing preferred orientation in accordance with claim 24 wherein said artificial defects comprise material different from that of said substrate.
Claim 39
Independent Claim
102 words
A device comprising, a solid substrate having a surface with artificial defects having predetermined geometric form selected from the group consisting of (1) artificial point defects and (2) artificial relief structure, and a film on said surface including a substantially preferred orientation layer with crystalline regions formed or changed while material of said film was in contact with said artificial defects and having crystallographic orientation influenced by adjacent ones of said artificial defects, the separation between adjacent ones of said artificial defects being sufficiently small so that both artificial defects in a pair of adjacent ones contribute to influencing said crystallographic orientation.
Claim 40
Independent Claim
102 words
A device comprising, a solid substrate having a surface with artificial defects having predetermined geometric form selected from the group consisting of (1) artificial point defects and (2) artificial relief structure, and a film on said surface including a substantially preferred orientation layer with crystalline regions formed or changed while material of said film was in contact with said artificial defects and having crystallographic orientation influenced by adjacent ones of said artificial defects, the separation between adjacent ones of said artificial defects being sufficiently small so that both artificial defects in a pair of adjacent ones contribute to influencing said crystallographic orientation.
Claim 41
Dependent Claim
12 words
A substrate in accordance with claim 1 wherein said layer is semiconductive.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-06-07 | 1985-12-07 | 1986-06-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-06-07 | 1989-12-07 | 1990-06-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-06-07 | 1993-12-07 | 1994-06-08 | $7700.00 | Window Closed / Lapsed |