Patent US4474621A successfully refreshed from Google Patents.
US4474621A
Expired / Lapsed
US
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Method for low temperature ashing in a plasma
Assignee: Alcatel Lucent NV
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Filing: 1982-06-16
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Granted: 1984-10-02
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Expires: 2002-06-16
Abstract
Abstract Ashing rates of encapsulants exposed to an oxygen plasma in a reactor are increased by simultaneously exposing a solid halogen-substituted hydrocarbon polymer to a plasma jet formed within a cavity in a grounded conductive surface of the reactor. Advantageously the solid reactant may be polyvinyl chloride or polytetrafluorethylene in solid form.
Inventors
- 👤 Edward J. Saccocio
- 👤 Mark E. Holycross
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 16:59
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/20; H10P50/28; H10P50/286; H10P50/287; B; B01; B01J; B01J19/00; B01J19/08; B01J19/087; B01J19/088; B01J3/00; B01J3/006; B29; B29C; B29C59/00; B29C59/14; G; G03; G03F; G03F7/00; G03F7/26; G03F7/42; G03F7/427; B01J2219/00; B01J2219/08; B01J2219/0894; B29K; B29K2027/00; B29K2027/06; B29K2027/12; B29K2027/18
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
61 words
A method for accelerating ashing rates of encapsulants in a plasma environment comprising the step of exposing at least one encapsulant to at least one gaseous plasma formed from oxygen in a reactor and simultaneously exposing a halogen substituted hydrocarbon polymer in solid form to a gaseous plasma jet formed within a cavity in a grounded conductive surface of said reactor.
Claim 2
Independent Claim
61 words
A method for accelerating ashing rates of encapsulants in a plasma environment comprising the step of exposing at least one encapsulant to at least one gaseous plasma formed from oxygen in a reactor and simultaneously exposing a halogen substituted hydrocarbon polymer in solid form to a gaseous plasma jet formed within a cavity in a grounded conductive surface of said reactor.
Claim 3
Dependent Claim
13 words
A method in accordance with claim 1 wherein said encapsulants consist of phenolformaldehyde.
Claim 4
Independent Claim
19 words
A method in accordance with claims 1 or 2 wherein said halogen substituted hydrocarbon polymer consists of polyvinyl chloride.
Claim 5
Independent Claim
18 words
A method in accordance with claims 1 or 2 wherein said halogen substituted hydrocarbon polymer consists of polytetrafluorethylene.
Claim 6
Independent Claim
49 words
A method for accelerating ashing rates of at least one encapsulant in an oxygen plasma environment in a reactor comprising the step of exposing a halogen substituted hydrocarbon polymer in solid form to an oxygen plasma jet formed within a cavity in a grounded conductive surface of said reactor.
Claim 7
Independent Claim
49 words
A method for accelerating ashing rates of at least one encapsulant in an oxygen plasma environment in a reactor comprising the step of exposing a halogen substituted hydrocarbon polymer in solid form to an oxygen plasma jet formed within a cavity in a grounded conductive surface of said reactor.
Claim 8
Dependent Claim
17 words
A method in accordance with claim 5 wherein said halogen substituted hydrocarbon polymer consists of polyvinyl chloride.
Claim 9
Dependent Claim
16 words
A method in accordance with claim 5 wherein said halogen substituted hydrocarbon polymer consists of polytetrafluorethylene.
Claim 10
Independent Claim
62 words
A method of accelerating ashing rates of encapsulants in a plasma reactor having a plurality of plasma jets formed within a cavity in a grounded conductive surface of said reactor comprising the steps of exposing at least one encapsulant to a gaseous plasma formed from oxygen and simultaneously exposing a halogen substituted polymer in solid form to said plurality of plasma jets.
Claim 11
Independent Claim
62 words
A method of accelerating ashing rates of encapsulants in a plasma reactor having a plurality of plasma jets formed within a cavity in a grounded conductive surface of said reactor comprising the steps of exposing at least one encapsulant to a gaseous plasma formed from oxygen and simultaneously exposing a halogen substituted polymer in solid form to said plurality of plasma jets.
Claim 12
Dependent Claim
17 words
A method in accordance with claim 8 wherein said halogen substituted hydrocarbon polymer consists of polyvinyl chloride.
Claim 13
Dependent Claim
16 words
A method in accordance with claim 8 wherein said halogen substituted hydrocarbon polymer consists of polytetrafluorethylene.
Claim 14
Independent Claim
23 words
A method in accordance with claims 8, 9 or 10 wherein said plurality of plasma jets is formed of said halogen substituted polymer.
Claim 15
Independent Claim
16 words
A method in accordance with claims 8, 9 or 10 wherein said encapsulant consists of phenolformaldehyde.
Claim 16
Independent Claim
17 words
A method in accordance with claims 8, 9 or 10 wherein said encapsulant is an organic compound.
Claim 17
Dependent Claim
13 words
A method in accordance with claim 11 wherein said encapsulant consists of phenolformaldehyde.
Claim 18
Independent Claim
55 words
A method for chemically ashing material in a plasma environment in a reactor comprising the steps of: exposing the material to a gaseous plasma formed from oxygen, and simultaneously exposing a halogen substituted hydrocarbon polymer in solid form to a gaseous plasma jet formed within a cavity in a grounded conductive surface of said reactor.
Claim 19
Independent Claim
55 words
A method for chemically ashing material in a plasma environment in a reactor comprising the steps of: exposing the material to a gaseous plasma formed from oxygen, and simultaneously exposing a halogen substituted hydrocarbon polymer in solid form to a gaseous plasma jet formed within a cavity in a grounded conductive surface of said reactor.
Claim 20
Dependent Claim
13 words
A method in accordance with claim 15 wherein said polymer comprises polyvinyl chloride.
Claim 21
Dependent Claim
12 words
A method in accordance with claim 15 wherein said polymer comprises polytetrafluorethylene.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-10-02 | 1988-04-02 | 1988-10-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-10-02 | 1992-04-02 | 1992-10-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-10-02 | 1996-04-02 | 1996-10-02 | $7700.00 | Window Closed / Lapsed |