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US4469985A
Expired / Lapsed
US
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Radiation-sensitive tube using photoconductive layer composed of amorphous silicon
Assignee: Fujifilm Holdings Corp
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Filing: 1981-10-27
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Granted: 1984-09-04
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Expires: 2001-10-27
Abstract
Abstract A radiation-sensitive tube is described having a target comprising (1) an electrically conductive support, (2) at least one layer composed of insulative an amorphous silicon represented by the formula Si 1-x N x wherein 1>x, y and z≧0 and 1>x+y+z>0 and (3) a photoconductive layer composed of amorphous silicon.
Inventors
- 👤 Eiichi Inoue
- 👤 Isamu Shimizu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 08:52
CPC Classifications
H; H01; H01J; H01J29/00; H01J29/02; H01J29/10; H01J29/36; H01J29/39; H01J29/45; H01J29/451; H01J29/456
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
105 words
A radiation-sensitive tube having a target comprising (1) an electrically conductive support, (2) at least one layer composed of an amorphous silicon-containing substance represented by the formula Si 1-x-y-z N x C y O z wherein 1>x, y, z≧0 and 1>x+y+z>0, and (3) a photoconductive layer composed of amorphous silicon, said layer composed of an amorphous silicon-containing substance is adjacent to the photoconductive layer, said at least one layer (2) being positioned as a blocking layer (A) between said support (1) and the said photoconductive layer (3) and/or being positioned as a cover layer (B) on the surface of layer (3) opposite from support (1).
Claim 2
Dependent Claim
105 words
A radiation-sensitive tube having a target comprising (1) an electrically conductive support, (2) at least one layer composed of an amorphous silicon-containing substance represented by the formula Si 1-x-y-z N x C y O z wherein 1>x, y, z≧0 and 1>x+y+z>0, and (3) a photoconductive layer composed of amorphous silicon, said layer composed of an amorphous silicon-containing substance is adjacent to the photoconductive layer, said at least one layer (2) being positioned as a blocking layer (A) between said support (1) and the said photoconductive layer (3) and/or being positioned as a cover layer (B) on the surface of layer (3) opposite from support (1).
Claim 3
Dependent Claim
22 words
A radiation-sensitive tube as in claim 1, wherein Si 1-x-y-z N x C y O z is Si 1-x N x .
Claim 4
Dependent Claim
22 words
A radiation-sensitive tube as in claim 1, wherein Si 1-x-y-z N x C y O z is Si 1-y C y .
Claim 5
Dependent Claim
23 words
A radiation sensitive tube as in claim 1, wherein Si 1-x-y-z N x C y O z is Si 1-z O z .
Claim 6
Dependent Claim
32 words
A radiation-sensitive tube as in claim 1, wherein the target comprises a blocking layer composed of amorphous silicon-containing substance represented by the formula Si 1-x-y-z N x C y O z .
Claim 7
Dependent Claim
32 words
A radiation-sensitive tube as in claim 1, wherein the target comprises a cover layer composed of amorphous silicon-containing substance represented by the formula Si 1-x-y-z N x C y O z .
Claim 8
Dependent Claim
39 words
A radiation-sensitive tube as in claim 1, wherein the target comprises a blocking layer and a cover layer, each being composed of the amorphous silicon-containing substance represented by the formula Si 1-x-y-z N x C y O z .
Claim 9
Dependent Claim
32 words
A radiation-sensitive tube as claimed in claim 5 or 7 wherein the transmission (at 500 nm) of the blocking layer is more than 50% for a blocking layer of 100 Å thickness.
Claim 10
Dependent Claim
24 words
A radiation-sensitive tube as in claim 5 or 7, wherein the blocking layer has a conductivity of 10 -13 (Ω cm) -1 or less.
Claim 11
Dependent Claim
24 words
A radiation-sensitive tube as in claim 6 or 7, wherein the cover layer has a specific resistance of 10 12 Ω cm or more.
Claim 12
Dependent Claim
22 words
A radiation-sensitive tube as in claim 1, wherein the photoconductive layer has a conductivity of 10 -8 (Ω cm) -1 or less.
Claim 13
Dependent Claim
19 words
A radiation-sensitive tube as in claim 9, wherein the blocking layer has a film thickness of 0.005 to 1μ.
Claim 14
Dependent Claim
19 words
A radiation-sensitive tube as in claim 12, wherein the blocking layer has a film thickness of 0.1μ or less.
Claim 15
Dependent Claim
19 words
A radiation-sensitive tube as in claim 10, wherein the cover layer has a film thickness of 0.005 to 50μ.
Claim 16
Dependent Claim
19 words
A radiation-sensitive tube as in claim 11, wherein the photoconductive layer has a film thickness of 0.5 to 10μ.
Claim 17
Dependent Claim
21 words
A radiation-sensitive tube as in claim 1, wherein the value of x, y or z, respectively, is from 0.4 to 0.9.
Claim 18
Dependent Claim
21 words
A radiation-sensitive tube as in claim 1, wherein the value of x, y or z, respectively, is from 0.5 to 0.8.
Claim 19
Dependent Claim
22 words
A radiation-sensitive tube as in claim 1, wherein the value of x+y+z, x+y, x+z or y+z, respectively, is from 0.1 to 0.9.
Claim 20
Dependent Claim
16 words
A radiation-sensitive tube as in claim 5, wherein a cover layer composes of an amorphous chalcogenide.
Claim 21
Dependent Claim
24 words
A radiation-sensitive tube as in claim 1, wherein Si 1-x-y-z N x C y O z is Si 1-x-z N x O z .
Claim 22
Dependent Claim
24 words
A radiation-sensitive tube as in claim 1, wherein Si 1-x-y-z N x C y O z is Si 1-y-z C y O z .
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-09-04 | 1988-03-05 | 1988-09-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-09-04 | 1992-03-05 | 1992-09-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-09-04 | 1996-03-05 | 1996-09-04 | $7700.00 | Window Closed / Lapsed |