US4468258A
Expired / Lapsed
US
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Method of controlling the partial pressure of at least one substance mixture or mixture of substances
Assignee: Licentia Patent Verwaltungs GmbH
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Filing: 1982-07-22
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Granted: 1984-08-28
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Expires: 2002-07-22
Abstract
Abstract A method of controlling the partial pressure of at least one substance or substance mixture comprising arranging the substance or mixture of substances in a chamber, arranging at least one element containing the substance or mixture of substances in the chamber and selecting the structure or crystal structure of the element to provide the desired partial pressure in the chamber.
Inventors
- 👤 Werner Pfister
- 👤 Ewald Schlosser
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 11:17
CPC Classifications
C; C30; C30B; C30B29/00; C30B29/10; C30B29/40; C30B19/00; C30B19/06; C30B19/063; Y; Y10; Y10S; Y10S117/00; Y10S117/906
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
62 words
A method of controlling the partial pressure of at least one substance or a mixture of substances present in a substrate, in which at least one element which contains the substance or mixture of substances is arranged in a chamber which contains the substrate and its crystal structure is selected such that the desired partial pressure is formed in the said chamber.
Claim 2
Independent Claim
62 words
A method of controlling the partial pressure of at least one substance or a mixture of substances present in a substrate, in which at least one element which contains the substance or mixture of substances is arranged in a chamber which contains the substrate and its crystal structure is selected such that the desired partial pressure is formed in the said chamber.
Claim 3
Dependent Claim
33 words
A method as defined in claim 1 wherein one surface of said element is turned towards at least one phase boundary of the substrate with said surface having a substantially uniform crystal structure.
Claim 4
Dependent Claim
41 words
A method as defined in claim 1, wherein a partial pressure is produced by said element and/or its surface, and thermal damage to a surface of the substrate which is a phase boundary of the substrate with a gas is avoided.
Claim 5
Dependent Claim
56 words
A method as defined in claim 1, wherein said element and said substrate have essentially the same chemical composition and essentially the same crystal structure; and one surface of said element which is opposite to a surface of said substrate is selected such that its crystal orientation differs from that of said surface of said substrate.
Claim 6
Dependent Claim
52 words
A method as defined in claim 4 wherein the crystal orientation of said surface of said element and said surface of said substrate are selected so that the partial pressure in the region of said surface of said substrate is smaller than the partial pressure directly at said surface of said element.
Claim 7
Dependent Claim
40 words
A method as defined in claim 1, wherein any contact between a surface of said element and surface of said substrate is avoided, and a spacing is selected between said surface of said element and the surface of said substrate.
Claim 8
Dependent Claim
32 words
A method as defined in claim 1, wherein a III-V semiconductor in solid phase is selected for the said substrate and for said element, respectively, and has a volatile Group 5 component.
Claim 9
Dependent Claim
46 words
A method as defined in claim 7, wherein said semiconductor is selected from the group consisting of InP, GaAs and GaP, said surface of said element comprises a crystallographic (111)-B-surface, and said surface of said substrate comprises a crystal surface which differs from this crystal orientation.
Claim 10
Independent Claim
58 words
A method of controlling the partial pressure of at least one substance or mixture of substances present in a substrate comprising arranging said substrate in a chamber, spacing apart therefrom at least one element containing said substance or mixture of substances in said chamber and selecting its crystal structure to provide the desired partial pressure in said chamber.
Claim 11
Independent Claim
58 words
A method of controlling the partial pressure of at least one substance or mixture of substances present in a substrate comprising arranging said substrate in a chamber, spacing apart therefrom at least one element containing said substance or mixture of substances in said chamber and selecting its crystal structure to provide the desired partial pressure in said chamber.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-08-28 | 1988-02-27 | 1988-08-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-08-28 | 1992-02-27 | 1992-08-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-08-28 | 1996-02-27 | 1996-08-28 | $7700.00 | Window Closed / Lapsed |