US3664294A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Push-pull structure for solution epitaxial growth of iii{14 v compounds
Assignee: Fairchild Semiconductor Corp
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Filing: 1970-01-29
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Granted: 1972-05-23
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Expires: 1990-01-29
Abstract
Abstract Epitaxial layers of III-V compounds are grown on the facing surfaces of a pair of parallel, spaced-apart wafers by forcing a small quantity of a solution saturated with a III-V compound between the wafers for a selected time. Lowering the temperature of the solution precipitates the III-V compound epitaxially onto the adjacent surfaces of the wafers.
Inventors
- 👤 Raymond Solomon
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 14:13
CPC Classifications
C; C30; C30B; C30B19/00; C30B19/06; C30B19/063; H; H10; H10P; H10P14/00; H10P14/20; H10P14/26; H10P14/263; H10P14/265; H10P14/34; H10P14/3402; H10P14/3414; H10P14/3418; H10P14/3421; H10P14/3438; H10P14/3441; H10P14/3442; H10P14/3444; H10P14/3446; Y; Y10; Y10S; Y10S148/00; Y10S148/049; Y10S148/107
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
55 words
Structure as in claim 1 wherein said runner possesses a second cavity, located in and extending through said runner, for containing a second selected material, said second cavity being located in said runner in such a manner that said second cavity is capable of being placed adjacent said recesses in said bottom and said top.
Claim 2
Dependent Claim
15 words
Structure as in claim 1 wherein said jig and said runner are made of graphite.
Claim 3
Dependent Claim
16 words
Structure as in claim 1 wherein said jig and said runner are made of fused quartz.
Claim 4
Independent Claim
159 words
A system for the automatic growth of epitaxial layers on wafers, which comprises means for heating; a plurality of boats stacked one on top of another in said means for heating, each boat comprising a jig containing a spaced-apart bottom and top with a chamber therebetween, said bottom and said top each containing a recess facing said chamber for receiving a wafer, said recesses being selectively aligned; and a runner selected to slide into and out of said chamber, said runner possessing a cavity for containing a selected fluid, said cavity being located adjacent said recesses in said bottom and said top when said runner is fully inserted into said chamber; and means for inserting automatically said runners into said jigs in response to a signal indicating that the temperature in said means for heating has reached a certain value, and for withdrawing automatically said runners from said jigs when said temperature has dropped to a selected lower value.
Claim 5
Dependent Claim
142 words
The system as in claim 5 in which said means for inserting comprises; means for measuring the temperature in said means for heating and for producing a signal indicative thereof; bellows means, attached to one end of said means for heating, including a first drive means linking the interior of said bellows to each runner, for moving each runner into and out of its corresponding jig, and a second drive means linking the exterior of said bellows means to a drive motor, for actuating, through said bellows means, said first driVe means, and means, responsive to signals from said means for measuring, for actuating said drive motor at a first time so as to move each runner into its corresponding jig, and for actuating said drive motor at a second time so as to move each runner out of its corresponding jig.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-05-23 | 1975-11-22 | 1976-05-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-05-23 | 1979-11-22 | 1980-05-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-05-23 | 1983-11-22 | 1984-05-23 | $7700.00 | Window Closed / Lapsed |