Patent US4236115A successfully refreshed from Google Patents.
Patent US4466877A successfully refreshed from Google Patents.
US4466877A
Expired / Lapsed
US
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Magnetron cathode sputtering apparatus
Assignee: Von Ardenne Anlagentechnik GmbH
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Filing: 1983-10-11
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Granted: 1984-08-21
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Expires: 2003-10-11
Abstract
Abstract A magnetron cathode sputtering apparatus including a pair of rotary cylindrical sputtering targets mounted in spaced parallel relation in an evacuable coating chamber and separate magnetic means located within said targets, the magnetic means being oriented relative to one another such that the material sputtered therefrom will be directed inwardly and downwardly at an acute angle whereby the sputtered material from the two targets will be focused upon the substrates.
Inventors
- 👤 Harold E. McKelvey
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 05:27
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3402; H01J37/3405
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
64 words
Magnetron cathode sputtering apparatus, comprising a pair of elongated rotatable sputtering targets mounted in horizontally spaced parallel relation in an evacuable coating chamber for sputter-coating substrates also located in said chamber beneath said targets, and separate magnetic means located in said targets, said magnetic means being disposed at an angle to one another to focus the material sputtered from said targets upon said substrates.
Claim 2
Dependent Claim
64 words
Magnetron cathode sputtering apparatus, comprising a pair of elongated rotatable sputtering targets mounted in horizontally spaced parallel relation in an evacuable coating chamber for sputter-coating substrates also located in said chamber beneath said targets, and separate magnetic means located in said targets, said magnetic means being disposed at an angle to one another to focus the material sputtered from said targets upon said substrates.
Claim 3
Dependent Claim
30 words
Magnetron cathode sputtering apparatus as claimed in claim 1, in which said magnetic means are oriented such that the sputtered material therefrom is directed inwardly and downwardly upon said substrates.
Claim 4
Dependent Claim
30 words
Magnetron cathode sputtering apparatus as claimed in claim 1, including means for changing the angle of said magnetic means to vary the focus of the sputtered material upon the substrates.
Claim 5
Dependent Claim
30 words
Magnetron cathode sputtering apparatus as claimed in claim 2, including means for adjusting the orientation of said magnetic means to vary the concentration of the sputtered material upon the substrates.
Claim 6
Dependent Claim
24 words
Magnetron cathode sputtering apparatus as claimed in claim 1, including means for rotating said sputtering targets, and means for maintaining said magnetic means stationery.
Claim 7
Dependent Claim
24 words
Magnetron cathode sputtering apparatus as claimed in claim 3, including means for rotating said sputtering targets, and means for maintaining said magnetic means stationery.
Claim 8
Dependent Claim
30 words
Magnetron cathode sputtering apparatus as claimed in claim 1, including means for individually changing the angle of said magnetic means, and means for locking said magnetic means in adjusted postion.
Claim 9
Dependent Claim
24 words
Magnetron cathode sputtering apparatus as claimed in claim 2, including means for rotating said sputtering targets, and means for maintaining said magnetic means stationery.
Claim 10
Dependent Claim
42 words
Magnetron cathode sputtering apparatus as claimed in claim 1, in which said sputtering targets comprise elongated, cylindrical tubular members having a coating of the material to be sputtered applied thereto, and in which said magnetic means are located in said tubular members.
Claim 11
Dependent Claim
17 words
Magnetron cathode sputtering apparatus as claimed in claim 9, in which said magnetic means comprise permanent magnets.
Claim 12
Dependent Claim
24 words
Magnetron cathode sputtering apparatus as claimed in claim 10, including means for rotating said tubular members, and means for maintaining said permanent magnets stationery.
Claim 13
Dependent Claim
28 words
Magnetron cathode sputtering apparatus as claimed in claim 11, including means for adjusting the angle of said permanent magnets, and means for locking said magnets in adjusted position.
Claim 14
Dependent Claim
53 words
Magnetron cathode sputtering apparatus as claimed in claim 10, including a coolant conduit mounted lengthwise in each tubular member, in which the permanent magnets extend lengthwise of the tubular members and are supported thereby, and means for individually rotating said conduits about their longitudinal axes to vary the angle of the permanent magnets.
Claim 15
Dependent Claim
23 words
Magnetron cathode sputtering apparatus as claimed in claim 13, including means for rotating said tubular members, and means for maintaining said conduits stationery.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-08-21 | 1988-02-20 | 1988-08-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-08-21 | 1992-02-20 | 1992-08-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-08-21 | 1996-02-20 | 1996-08-21 | $7700.00 | Window Closed / Lapsed |